Axial beam scanning in multiphoton microscopy with MEMS-based actuator.

We demonstrate a remotely located microelectromechanical systems (MEMS) actuator that can translate >400 μm to perform axial beam scanning in a multiphoton microscope. We use a 2-dimensional MEMS mirror for lateral scanning, and collected multiphoton excited fluorescence images in either the horizontal or vertical plane with a field-of-view of either 270 × 270 or 270 × 200 μm², respectively, at 5 frames per second. Axial resolution varied from 4.5 to 7 μm over the scan range. The compact size of the actuator and scanner allows for use in an endomicroscope to collect images in the vertical plane with >200 μm depth.