Daniel Jacobsson1, Fangfang Yang1, Karla Hillerich2, Filip Lenrick3, Sebastian Lehmann1, Dominik Kriegner4, Julian Stangl5, L Reine Wallenberg3, Kimberly A Dick6, Jonas Johansson1. 1. Solid State Physics/The Nanometer Structure Consortium, Lund University , Box 118, 221 00 Lund, Sweden. 2. Solid State Physics/The Nanometer Structure Consortium, Lund University , Box 118, 221 00 Lund, Sweden ; AZUR Space Solar Power GmbH , Theresienstrasse 2, 74072 Heilbronn, Germany. 3. nCHREM/Centre for Analysis and Synthesis, Lund University , Box 124, 221 00 Lund, Sweden. 4. Semiconductor and Solid State Physics, Johannes Kepler University Linz , Altenbergerstrasse 69, A-4040 Linz, Austria ; Department of Condensed Matter Physics, Charles University in Prague , Ke Karlovu 5, 121 16, Praha 2, Czech Republic. 5. Semiconductor and Solid State Physics, Johannes Kepler University Linz , Altenbergerstrasse 69, A-4040 Linz, Austria. 6. Solid State Physics/The Nanometer Structure Consortium, Lund University , Box 118, 221 00 Lund, Sweden ; nCHREM/Centre for Analysis and Synthesis, Lund University , Box 124, 221 00 Lund, Sweden.
Abstract
III-V Nanowires (NWs) grown with metal-organic chemical vapor deposition commonly show a polytypic crystal structure, allowing growth of structures not found in the bulk counterpart. In this paper we studied the radial overgrowth of pure wurtzite (WZ) GaAs nanowires and characterized the samples with high resolution X-ray diffraction (XRD) to reveal the crystal structure of the grown material. In particular, we investigated what happens when adjacent WZ NWs radially merge with each other by analyzing the evolution of XRD peaks for different amounts of radial overgrowth and merging. By preparing cross-sectional lamella samples we also analyzed the local crystal structure of partly merged NWs by transmission electron microscopy. Once individual NWs start to merge, the crystal structure of the merged segments is transformed progressively from initial pure WZ to a mixed WZ/ZB structure. The merging process is then modeled using a simple combinatorial approach, which predicts that merging of two or more WZ NWs will result in a mixed crystal structure containing WZ, ZB, and 4H. The existence large and relaxed segments of 4H structure within the merged NWs was confirmed by XRD, allowing us to accurately determine the lattice parameters of GaAs 4H. We compare the measured WZ and 4H unit cells with an ideal tetrahedron and find that both the polytypes are elongated in the c-axis and compressed in the a-axis compared to the geometrically converted cubic ZB unit cell.
III-V Nanowires (NWs) grown with metal-organic chemical vapor deposition commonly show a polytypic crystal structure, allowing growth of structures not found in the bulk counterpart. In this paper we studied the radial overgrowth of pure wurtzite (WZ) GaAs nanowires and characterized the samples with high resolution X-ray diffraction (XRD) to reveal the crystal structure of the grown material. In particular, we investigated what happens when adjacent WZ NWs radially merge with each other by analyzing the evolution of XRD peaks for different amounts of radial overgrowth and merging. By preparing cross-sectional lamella samples we also analyzed the local crystal structure of partly merged NWs by transmission electron microscopy. Once individual NWs start to merge, the crystal structure of the merged segments is transformed progressively from initial pure WZ to a mixed WZ/ZB structure. The merging process is then modeled using a simple combinatorial approach, which predicts that merging of two or more WZ NWs will result in a mixed crystal structure containing WZ, ZB, and 4H. The existence large and relaxed segments of 4H structure within the merged NWs was confirmed by XRD, allowing us to accurately determine the lattice parameters of GaAs4H. We compare the measured WZ and 4H unit cells with an ideal tetrahedron and find that both the polytypes are elongated in the c-axis and compressed in the a-axis compared to the geometrically converted cubic ZB unit cell.
Over the past few years,
semiconductor nanowires (NWs) have become
a large research field due to their interesting electrical and optical
properties due to quantum effects, large surface to volume ratio,
and capability for bottom-up assembly. NW-based memory devices,[1,2] lasers,[3] single-molecule sensors,[4] and solar cells[5,6] have been demonstrated
in recent years. Additionally, one outstanding feature of the NW growth
is that the crystal structure can be different from the stable bulk
crystal structure, with possible striking effects on their optical
properties.[7,8] The stable bulk crystal structure for most
III–V binary semiconductor materials is cubic zincblende (ZB),
while synthesis of the hexagonal wurtzite (WZ) structure in bulk GaAs
requires high pressure and temperature.[9] However, NWs can adopt both ZB and WZ crystal structures, and previous
research has demonstrated the control of WZ and ZB crystal structure
in GaAs NWs grown by metal–organic chemical vapor deposition
(MOCVD).[10,11]The most common growth direction of
Au-seeded ZB III–V NWs
is [1̅1̅1̅] with a stacking sequence of ···ABCABC···,
which could also be denoted as 3C using the Ramsdell notation.[12] The equivalent growth direction in the hexagonal
case is [000.1̅], with the stacking sequence ···ABABAB···
for WZ, or 2H in the Ramsdell notation. 3C (ZB) and 2H (WZ) thus differ
only in the stacking sequence in the [1̅1̅1̅]/[000.1̅]
direction and exhibit a small difference in cohesive energies, with
3C being the highest, hence the stable phase in bulk.[13−15] However, with the large surface to volume ratio of NWs, compared
to bulk, the relative contribution of lateral surface energies to
the total free energy of formed NWs has to be considered and is a
key parameter in growth models attempting to explain formation of
polytypes in III–V NWs.[16] To expand
the theoretical models, polytypes with longer periodicity should also
be included. The polytype 4H, for example, has a favorable formation
energy.[17] NWs with a structure different
from their bulk counterpart should be treated as metastable, and the
growth is kinetically controlled. Treating NWs as metastable implies
that their phase could change to a more stable one upon perturbation.
In addition, if it is the large surface to volume ratio that enables
growth of metastable NWs, will the structure be maintained under large
radial overgrowth, where the surface to volume ratio decreases?Phase transformation of grown GaAs NWs has been observed previously,
where 2H structure epitaxially buried in planar 3C overgrowth gradually
adopted the structure of the burying layer.[18,19] Phase transformation has also been observed in InGaAs NWs, using
an electron beam to deliver a high energy dose to the structure, enough
to transform 2H to a mixed 3C/2H structure.[20] In the case of epitaxial burying, one layer at a time of the metastable
2H is gradually surrounded with a layer of the stable 3C structure.
With a lateral mismatch of the top layer burying the NW, a linear
defect is created at the interface between the burying layer and NW,
which could be viewed as a Shockley partial dislocation in the 3C
matrix. Once the dislocation has formed along at least two sides of
the NW, it could propagate into the NW without changing its length.
As the surrounding 3C layer has a higher cohesive energy, the total
energy associated with the linear defect is decreased as the dislocation
propagates through the NW and changes its structure to 3C. By completely
burying the structure in a 3C matrix, the low energy surfaces of 2H
cannot stabilize the structure any longer, and the structure is forced
into 3C. To further develop the model to apply to free-standing structures,
contributions from the surface energies must be taken into account.
In addition, the dislocation line between a buried structure and its
surrounding matrix compared to the dislocation line formed between
free-standing structures has different geometries, which could have
a big impact on the propagation of the dislocation line.In
this work, we investigated what happens when adjacent WZ NWs
radially merge with each other, for different amounts of radial overgrowth
and merging. The approach resembles the epitaxial lateral overgrowth
(ELO) technique, which has been used since the 1960s to reduce threading
dislocation densities in growth of lattice-mismatched thin films.[21,22] ELO is widely used to grow high quality GaN films,[23] but is not as common for non-nitride III-Vs. Using a MOCVD
system, we first grew GaAs2H NWs on 3C GaAs substrate, and by radial
overgrowth in a second step increased the NW diameter. During radial
growth, the shell will adopt the same crystal structure as the core,
which has been observed in several nanowire core–shell material
combinations.[24−26] With increasing radial overgrowth time, more and
more of the initial 2H NWs radially merge with each other. For the
longest growth times, the initial GaAs2H NWs have merged to form
a nearly continuous film. The crystal structure of samples with different
amounts of radial overgrowth and merging was investigated. We used
high resolution XRD and high resolution transmission electron microscopy
(HRTEM) for structural investigations. Although one might expect to
find a 2H film after the radial overgrowth, our observations show
that this is not the case. Once individual NWs merge together, the
crystal structure of the merged NWs is transformed progressively from
the initial pure 2H structure to a mixed 2H/3C structure. We use a
rather simple combinatorial approach to explain the main features
in the resulting crystal structure of radially merged NWs. Comparing
energy contributions from differences in cohesive energy, surface
energies and dislocation line energy, only a small energy difference
for transforming 2H compared to 3C is found, which justifies the use
of a combinatorial model.
Experimental Details
GaAs2H NWs were grown on GaAs (111)B substrates using MOCVD and
70 nm size-selected Au seed particles with a surface density of 1
μm–2 with 2H growth parameters as reported
previously.[11] A pregrowth annealing step
was performed in a 100 mbar MOCVD reactor under hydrogen (H2) and arsine (AsH3) for 10 min at 650 °C to remove
the surface oxides and form catalyst droplets. Trimethylgallium (TMGa)
and AsH3 were used as precursors, respectively. After annealing,
the temperature was reduced to the growth temperature of 550 °C,
and TMGa was introduced to initiate the growth. The molar fractions
of TMGa and AsH3 flow were 1.46 × 10–5 and 5.5 × 10–5, respectively (V/III ratio
of 4), with a total gas flow of 6 slm. After 2H NW growth, the samples
were cooled down under H2 only to prevent formation of
a 3C neck region.[27] After cooldown, the
samples were removed from the MOCVD system in order to remove the
Au-alloy seed particles by etching in a cyanide based etching solution
(TFAC from Transene). Removing the Au seed particles is essential
to limit axial elongation of the NWs during subsequent radial overgrowth.
For this step, the samples were reintroduced into the MOCVD system
and annealed under a H2/AsH3 environment at
650 °C for 10 min to remove surface oxides formed as the NWs
were exposed to air. The temperature was then reduced to 630 °C,
and TMGa was introduced to initiate radial overgrowth. The growth
time ranged from 5 to 240 min with molar fractions of TMGa and AsH3 of 1.5 × 10–5 and 2.2 × 10–3, respectively (V/III ratio 150). Figure shows a schematic of the process
flow.
Figure 1
Schematic illustration of the process for the designed structure
fabrication. (a) Growth of WZ GaAs NWs, (b) removal of Au particles,
(c) radial overgrowth of GaAs NWs, (d) merging of NWs in order to
form the designed structure.
Schematic illustration of the process for the designed structure
fabrication. (a) Growth of WZGaAs NWs, (b) removal of Au particles,
(c) radial overgrowth of GaAs NWs, (d) merging of NWs in order to
form the designed structure.For structural investigations of large ensembles of NWs and
parasitic
substrate growth, we performed high-resolution X-ray diffraction (XRD)
measurements on as-grown samples. Two laboratory diffractometers with
Cu anode and channel-cut monochromators were used together with one-dimensional
detectors to record reciprocal space maps (RSMs). The measurements
were performed in the scattering plane spanned by the [1̅1̅1̅]
and [1̅1̅2] directions of the substrate. Symmetric RSMs
around the 3C GaAs (3̅3̅3̅) reciprocal lattice point
and 2HGaAs (000.6̅) as well as asymmetric RSMs between 3C GaAs
substrate (2̅2̅4̅) Bragg peak and (3̅3̅1̅)
twinned GaAs Bragg peak were recorded, which also covers the 2HGaAs
(1̅01.5̅). The occurrence of the 3C (3̅3̅1̅)
from twinned NWs in the same azimuth as the 3C substrate (2̅2̅4̅)
is due to the 180° rotation around [1̅1̅1̅]
caused by twin defects.To characterize the local crystal structure
and the quality at
the interface between merged NWs, we used focused ion beam (FIB) to
prepare cross sectional lamellae samples for transmission electron
microscopy (TEM). Using FIB could potentially induce defects, but
our method is gentle enough to preserve high crystalline quality of
the prepared sample.[28] High resolution
TEM (HRTEM), dark field TEM (DFTEM), scanning TEM (STEM), and selected
area electron diffraction (SAED) were used for analysis.
Results
Morphology
and Surface Coverage
The grown NWs have
an average length of 2 μm and average diameter of 100 nm prior
to radial overgrowth, with 2H structure including low densities of
stacking defects in the range of <10–20 μm–1, as revealed by HRTEM; see Figure a–c. After the etching process, most of the
Au catalyst particles on the tops of the NWs were removed, but the
NWs were insignificantly affected by the etchant (see detail in Supporting
Information, Figure S1).
Figure 2
(a–c) TEM and
HRTEM images of a 2H structured NW before
overgrowth imaged in the ⟨112̅.0⟩ zone axis. (d–i)
SEM images of NWs with radial overgrowth for different times. With
30° tilting angle: (d) 5 min; (e) 20 min; (f) 60 min; top view
SEM images of NWs radial overgrowth with different time: (g) 120 min;
(h) 180 min; (i) 240 min. The insets shown in (g) and (h) are SEM
images taken at a 30° tilting angle, scale bars are 2000nm.
(a–c) TEM and
HRTEM images of a 2H structured NW before
overgrowth imaged in the ⟨112̅.0⟩ zone axis. (d–i)
SEM images of NWs with radial overgrowth for different times. With
30° tilting angle: (d) 5 min; (e) 20 min; (f) 60 min; top view
SEM images of NWs radial overgrowth with different time: (g) 120 min;
(h) 180 min; (i) 240 min. The insets shown in (g) and (h) are SEM
images taken at a 30° tilting angle, scale bars are 2000nm.Figure d–i
shows the NW overgrowth at different stages ranging from 5 to 240
min overgrowth time. After the first 5 min, we observed mainly an
increase in the volume of the pyramidal base of the NWs; see Figure d. The 2H NWs are
terminated by low energy {101̅.0} facets, which gives a low
possibility of nucleation directly at the side facets. The pyramidal
base consists of higher index facets, which have a higher surface
energy due to the increased density of dangling bonds, resulting in
an increased rate of nucleation of new layers. After 20 min (see Figure e), the base starts
to form {101̅.0} facets, and the morphology evolution of the
NWs changes with radial overgrowth time of 60 min (compare Figure e,f). At the kink
site between the base and the NW side facets, the higher coordination
number is expected to have an even higher rate of nucleation. Nucleation
at the kink site followed by growth of layers along the NW [000.1̅]
direction could explain the homogeneous shell at 60 min with steps
at the top of the NW. As the growth time is increased further, the
area between the NWs becomes smaller, and the NWs eventually merge.
After 240 min of growth, most of the NWs have merged with each other,
and a nearly continuous film is formed. In parallel with the radial
growth of the NWs, we observe continuous growth on the substrate surface.
As the parasitic substrate growth proceeds, some of the lower parts
of the initial 2H NWs are buried, which explains the apparently thinner
base in Figure f compared
to 2d and 2e. However, most parts of the NWs are radially merged before
being buried in parasitic substrate growth, as seen in the insets
in Figure g,h. Average
NW length and diameter and parasitic substrate growth thickness are
plotted in Supporting Information, Figure S3. The NWs never become fully buried in the parasitic substrate growth,
as the openings between the NWs become too small to allow adatoms
to reach the bottom of the pits between them. Instead, growth on the
NW top facets increases with decreased openings between the NWs.
Crystal Structure Evolution
Using high resolution XRD
to characterize the crystal structure of the samples, the measurements
collect diffraction data from several mm2 area of the sample,
and signals from the substrate and grown structures cannot be separated
directly. However, as the 2H structure only originates from the NWs,
the NW signal can be distinguished from the substrate. As 3C occurs
in two different twin directions, two sets of 3C diffraction peaks
occur; one originates from the substrate and possible 3C formed during
the growth in the same twin direction, and the other set solely from
3C formed during the growth with the other twin direction. Figure displays RSMs from
the sample with 120 min radial overgrowth time. In the symmetric RSM,
the 3C GaAs (3̅3̅3̅) peak at Q[1̅1̅1̅] = 5.777 Å–1 and 2HGaAs (000.6̅) at Q[1̅1̅1̅] = 5.738 Å–1 are clearly visible. In the symmetric
RSM, both the substrate and twinned 3C contribute to the signal of
the 3C (3̅3̅3̅) Bragg peak and cannot be distinguished.
Between the 2H and 3C peaks, a weaker signal is visible at Q[1̅1̅1̅] = 5.758 Å–1, which originates from GaAs4H.
Figure 3
X-ray diffraction reciprocal
space maps (RSMs) of the sample with
120 min radial overgrowth time. Panel (a) shows a symmetric RSM around
the 3C (3̅3̅3̅) and 2H (000.6̅) Bragg peaks,
(b) shows asymmetric RSM including ZB substrate (2̅2̅4̅),
(3̅3̅1̅) twin 3C, 2H (1̅01.5̅), and
4H (1̅01.9̅), (1̅01.1̅0̅), and (1̅01.1̅1̅)
Bragg reflections. In (c) and (d), details of the twin 3C and 2H peaks
are shown. With Roman numerals, the positions of possible detector
streak (I, white line), broadening due to tilt distribution (II, red
line) and finite NW radius (III, black line) are marked. Linecuts
from the RSMs are shown in (e) and (f) for the symmetric and asymmetric
case, respectively. Linecuts from RSMs recorded in both (3̅3̅1̅)
and (2̅2̅4̅) azimuths are overlaid in (e) and (f).
X-ray diffraction reciprocal
space maps (RSMs) of the sample with
120 min radial overgrowth time. Panel (a) shows a symmetric RSM around
the 3C (3̅3̅3̅) and 2H (000.6̅) Bragg peaks,
(b) shows asymmetric RSM including ZB substrate (2̅2̅4̅),
(3̅3̅1̅) twin 3C, 2H (1̅01.5̅), and
4H (1̅01.9̅), (1̅01.1̅0̅), and (1̅01.1̅1̅)
Bragg reflections. In (c) and (d), details of the twin 3C and 2H peaks
are shown. With Roman numerals, the positions of possible detector
streak (I, white line), broadening due to tilt distribution (II, red
line) and finite NW radius (III, black line) are marked. Linecuts
from the RSMs are shown in (e) and (f) for the symmetric and asymmetric
case, respectively. Linecuts from RSMs recorded in both (3̅3̅1̅)
and (2̅2̅4̅) azimuths are overlaid in (e) and (f).In the asymmetric RSMs in Figure b, six Bragg peaks
are visible. The peaks are attributed
to the 3C (2̅2̅4̅) Bragg peak, which originates
from the substrate and grown 3C material with same twin orientation
as the substrate as the peak with highest intensity and the 3C (3̅3̅1̅)
Bragg peak from 3C grown with opposite twin-orientation as the second
strongest peak. In between the two 3C peaks, the 2H (1̅01.5̅)
is visible next to a weak 4HGaAs (1̅01.1̅0̅) peak.
On either side of the 3C peaks, two more 4H peaks are visible, 4HGaAs (1̅01.9̅) and 4HGaAs (1̅01.1̅1̅).
For asymmetric RSMs for all six growth shell times; see Supporting
Information, Figure S4. Figure c,d shows details in the RSM
around the 2H (1̅01.5̅) and 3C (3̅3̅1̅)
Bragg peaks. The position of possible detector streak is marked with
white (I), broadening due to tilt distribution with red (II) and broadening
due to finite radius of the nanowires as black (III). In Figure e,f, line cuts from
the symmetric and asymmetric RSMs for both (3̅3̅1̅)
and (2̅2̅4̅) are shown.Using the Bragg peak
integrated intensity, we estimate the change
in scattering volume. First, line cuts along [1̅1̅1̅]
are made in the asymmetric RSMs; see Figure a. To each peak, a Voigt shape curve was
fitted after removal of background signal, and the curves’
integrated intensity was normalized with respect to the substrate
peak intensity. As a consistency check, peaks from both azimuths on
each sample were used. Using different azimuths, the difference in
structure factors for (2̅2̅4̅) and (3̅3̅1̅)
as well as the difference in illuminated area were taken into account.
In Figure b, the peak
intensities for the 2H, 4H (1̅01.1̅0̅) and twinned
3C peaks are plotted. As seen, the 2H initially increases, and the
largest 2H volume was found for the sample with 60 min radial overgrowth
time. For the twinned 3C, the volume increases for the full radial
overgrowth series. For the 4H (1̅01.1̅0̅) peak intensity,
the scattering intensity follows a similar trend as for 2H, but with
the strongest scattering signal at 120 min radial overgrowth time.
Figure 4
(a) Linecuts
along Q_[1̅1̅1̅] from asymmetric
RSM with substrate peak at (2̅2̅4̅) plotted with
offsets. The position for different Bragg peaks are marked with dashed
lines. Decreasing intensities for the 4H and 2H peaks are visible
for the longer radial overgrowth times. (b) Integrated intensities
for the 2H (red, square), 4H (triangles, green), and the 3C (blue,
circles) peaks arising from the twinned ZB. Peaks from both azimuths
are used. The trend lines are guides for the eyes only.
(a) Linecuts
along Q_[1̅1̅1̅] from asymmetric
RSM with substrate peak at (2̅2̅4̅) plotted with
offsets. The position for different Bragg peaks are marked with dashed
lines. Decreasing intensities for the 4H and 2H peaks are visible
for the longer radial overgrowth times. (b) Integrated intensities
for the 2H (red, square), 4H (triangles, green), and the 3C (blue,
circles) peaks arising from the twinned ZB. Peaks from both azimuths
are used. The trend lines are guides for the eyes only.By preparing a cross sectional lamella sample by
FIB, the crystal
structure along the NWs and the parasitic substrate growth were investigated
after 120 min radial growth. Figure a,b shows merged sections in bright-field (BF) and
dark-field (DF) TEM images, respectively. The dark field is taken
around (1̅11) and (002̅) reflection for the two different
3C twin directions, and (000.1̅) for the 2H. The top part includes
two free-standing NWs, which have pure 2H crystal structure with no
visible stacking faults. Beneath this section, the merged region exhibits
a heavily twinned 3C crystal structure. The merged region includes
two crystal orientations with twin boundaries perpendicular to the
NW growth direction, and the barcode-like pattern of twin regions
span the majority of the formerly individual nanowires. The parasitic
substrate growth results in 3C crystal structure which is heavily
twinned including boundaries not perpendicular to the NW growth direction
(diffraction pattern and additional TEM image in Supporting Information, Figure S5). The crystal structure of the merged
region is confirmed by the SAED pattern shown in the inset of Figure b. The SAED pattern
indicates two dominant 3C crystals twinned in the NW growth direction
only.
Figure 5
(a) BFTEM images from an FIB lamella with two partly merged nanowires.
(b) DFTEM image of the same region as in (a) highlighting the crystal
structure in different parts marked with different colors. The arrow
marks the point up to where the two nanowires have merged. The free-standing
nanowires have 2H crystal structure with no visible stacking faults,
while the merged regions have 3C crystal structure. The substrate
growth has 3C crystal structure which is heavily twinned including
boundaries not perpendicular to the growth direction. The inset in
(b) shows SAED from the merged region, which indicates two dominant
3C crystals twinned in the growth direction only.
(a) BFTEM images from an FIB lamella with two partly merged nanowires.
(b) DFTEM image of the same region as in (a) highlighting the crystal
structure in different parts marked with different colors. The arrow
marks the point up to where the two nanowires have merged. The free-standing
nanowires have 2H crystal structure with no visible stacking faults,
while the merged regions have 3C crystal structure. The substrate
growth has 3C crystal structure which is heavily twinned including
boundaries not perpendicular to the growth direction. The inset in
(b) shows SAED from the merged region, which indicates two dominant
3C crystals twinned in the growth direction only.Figure shows
the
TEM image of a FIB lamella with two merged NWs after 120 min radial
overgrowth in which a large section of 4H was found. The corresponding
SAED patterns of the 2H and 4H phases are shown in Figure b,c, respectively. The independent
GaAs NW segment before the merging exhibits a pure 2H crystal structure
with almost no stacking faults, which is clear from the SAED pattern
in Figure b. The appearance
of a (000.1̅) reflection indicated by a small arrow in Figure c and two times shorter
distance between (000.0) and (000.1̅) reflection compared to
SAED pattern of 2H in Figure b confirms the existence of 4H crystal structure. The HRTEM
image shown in Figure d and the FFT shown in the inset further verify the presence of the
4H crystal structure. The length of the 4H segment is approximately
200 nm, which is consistent with the observation in XRD (see below).
Figure 6
(a) BFTEM
image of a FIB lamella with two merged nanowires. (b)
SAED from the region in the blue circle in (a) showing 2H structure,
and (c) SAED from the region in the green circle in (a) showing the
4H crystal structure. (d) HRTEM image from the region marked with
rectangular in (a) showing a band of 4H crystal structure merging
the two nanowires. The inset in (d) shows a FFT from the left nanowire,
which is a typical 4H diffractogram.
(a) BFTEM
image of a FIB lamella with two merged nanowires. (b)
SAED from the region in the blue circle in (a) showing 2H structure,
and (c) SAED from the region in the green circle in (a) showing the
4H crystal structure. (d) HRTEM image from the region marked with
rectangular in (a) showing a band of 4H crystal structure merging
the two nanowires. The inset in (d) shows a FFT from the left nanowire,
which is a typical 4H diffractogram.
2H and 4H Unit Cells Determinations
XRD performed on
nanostructures is affected by finite size effects, which in the case
of NWs are usually dominated by their small diameter, causing a broadening
in the [1̅1̅2] direction. NWs also tend to not grow exactly
perpendicular to the substrate surface, but a small mosaicity due
to a random NW tilt distribution causes a broadening in the same direction
as the finite width in the symmetric RSMs. With both finite size and
tilt contributing to the same broadening in symmetric RSMs, it is
not possible to distinguish one from the other. Since the effects
scale differently for different reflections as well as show up in
slightly different directions in asymmetric RSMs, a distinction of
the two effects is possible in the asymmetric RSMs. The finite size
contribution is always inversely proportional to the width of the
NWs, while the broadening due to tilt distribution increases linearly
with Q. In the asymmetric scans, the tilt distribution and finite
width broadens the peak in different directions, which is indicated
in Figure c,d. For
the 120 min radial overgrowth time shown in Figure , the broadening due to tilt distribution
is larger than that due to finite NW width. The tilt distribution
found is on the order of 0.1 deg, which is on the same order of magnitude
as for other NW samples, such InAs2H and InSb 2H on InAs 3C and GaP
2H on GaP 3C.[8,29] Tilt distribution is a general
feature in NW samples and is a limiting factor when performing high
resolution XRD on such samples.Another finite size effect present
in the asymmetric RSMs is the broadening of the diffraction peaks
in the [1̅1̅1̅] direction, caused by short segments
of the respective polytype in the NW growth direction. The inverse
width of the diffraction peaks is proportional to the average segment
length and for the 4H peaks segment lengths of 100–200 nm were
estimated. Worth noting is that no 4H was found in the reference NWs
prior to radial overgrowth. For the 3C and 2H peaks, the widths are
limited by the instrumental resolution and length estimations are
therefore not possible.With a very high crystal quality as
seen in both the HRTEM analysis
and XRD, we are able to accurately calculate the lattice parameters
of both GaAs2H and 4H using the asymmetric RSMs. The accuracy of
the measurements is similar to the case of InP 2H,[30] limited mainly by experimental setup and beam broadening
due to measurement geometries. Table summarizes the calculated lattice parameters with
relative differences with respect to ideal tetrahedral structures,
using geometrically converted cubic 3C lattice parameters.[29] Both the 2H and 4H unit cells are elongated
in the NW growth direction and contracted in the radial direction
compared to 3C.
Table 1
Experimental Measured Lattice Parameters
of GaAs WZ/2H and 4H, with the Percentage Difference versus the Geometrically
Converted Cubic ZB/3C Lattice Parameter, Which Are Given As the Lattice
Parameters for an Ideal Tetrahedral Structurea
a [Å]
Δa/a [%]
aideal [Å]
c [Å]
Δc/c [%]
cideal [Å]
WZ
3.9845(15)
–0.324
3.9975
6.5701(08)
0.648
6.5278
4H
3.9900(11)
–0.186
3.9975
13.0964(10)
0.313
13.0556
Values in brackets are the errors
to the two last digits.
Values in brackets are the errors
to the two last digits.
Discussion
Phase
Transformation
From the SEM images shown in Figure , a continuous increase
in 2H volume would be expected for the full radial overgrowth time
series, since the radii of the NWs continuously increase with time.
However, from the XRD data, a decrease in 2H is found for radial overgrowth
times longer than 60 min. Intuitively, one could argue that the decrease
in 2H is due to epitaxial burying in a 3C substrate layer, similar
to what has been observed in refs (18 and 19), which would also be supported by the continuous increase in 3C
diffraction signal with increasing growth time. However, comparing
the volume of not-yet-buried NWs for 5 and 180 min radial overgrowth,
the volume is 2 orders of magnitude larger for the longer growth time,
yet the 2H diffraction signal is weaker. Hence, the burying of the
NWs is not sufficient to explain the drastic decrease in the 2H signal.
In addition, epitaxial burying of the 2H NWs in a 3C matrix would
not explain the appearance of 4H segments, estimated to be 100–200
nm long in the samples with the most 4H, as an epitaxial burying driven
phase transformation would force the structure to adopt the burying
matrix structure, in this case 3C. Interestingly, the largest increase
in 4H scattering intensity is found as the 2H scattering signal starts
to decrease. The decreasing 2H signal coincides with the onset of
the radial merging of adjacent NWs, as seen in the inset in Figure g,h.As reported
by Ng et al.,[31] a high energy electron
beam could potentially induce crystal phase transformation, which
could affect the results obtained by TEM. However, the agreement of
the XRD and TEM results suggests that the crystal phase transformation
is independent of measurement technique. In addition, reference NWs
and the parts not yet merged showed only pure 2H structure under similar
TEM analysis; therefore, the possibility of electron beam induced
transformation is discarded.Instead of explaining the phase
transformation by epitaxial burying,
we propose that the transformation could be explained by a NW–NW
interaction. To understand the process of the merging better we come
back to the stacking sequences of the different crystallographic phases.
The stacking along the hexagonal [000.1̅] direction of the 2H
crystal structure can be described as ···ABABAB···,
while for 3C crystal structure it is described as ···ABCABC···
along the equivalent [1̅1̅1̅] direction. Each capital
letter denotes a pair of layers consisting of one group V and group
III atom, a bilayer, at three distinct lateral positions. As the NWs
grow in [1̅1̅1̅]/[000.1̅], the position of
As in each new bilayer will determine whether the layer is in cubic
or hexagonal position. The stacking sequences of 2H can also equivalently
be described as ···BCBCBC···, ···ACACAC···,
etc. Suppose the first 2H structured NW (NW 1) retains the stacking
order as ···ABABAB··· and the second
2H structured NW (NW 2) retains the stacking order as ···BABABA···.
When the bottom bilayer of NW 1 reaches the periphery of NW 2, the
As atoms in the bottom bilayer of NW 1 is not in lateral registry
with that of NW 2. In principle now two scenarios compete with each
other. Either this mismatch is kept at the cost of having a line defect
at the interface of the merging NWs, or in order to release this mismatch,
the line defect may propagate through one of the NWs to accommodate
the corresponding As plane. For such a gliding process, three different
translation vectors (the Burger vectors, b) are possible,
1/3[101̅.0], 1/3[11̅0.0], and 1/3[011̅.0]; see Figure . This edge dislocation could be seen as a Shockley
partial dislocation, and when propagating through the crystal changes
the configuration of the As from hexagonal to cubic position (or vice
versa).
Figure 7
(a) Schematic of two miss-matched 2H NWs viewed in the {000.1}/{111}
direction. The mismatch causes a translation in the [11̅0.0]
direction of the As atoms in NW 1 closest to the interface. (b–d)
Schematics displaying propagation of a defect through one of the nanowires.
(a) Schematic of two miss-matched 2H NWs viewed in the {000.1}/{111}
direction. The mismatch causes a translation in the [11̅0.0]
direction of the As atoms in NW 1 closest to the interface. (b–d)
Schematics displaying propagation of a defect through one of the nanowires.Changing a 2HGaAs to 3C GaAs
would to a first approximation result
in a lower total energy for the crystal, as the cohesive energy is
24 meV/III–V pair higher for 3C.[15] Changing from 2H {101̅.0}-type facets to 3C {112̅}-type
facets increases the surface energy due to the increase of dangling
bonds, with a net energy difference of 3.06 meV/nm2.[32] In addition to the change in cohesive energy
and surface energies, the dislocation line itself has an energy per
unit length. The dislocation line energy originates from the strain
field around it and the distorted bonds at the dislocation core. Detailed
calculations on defects in GaAs2H are lacking, but as an approximation
the dislocation line energy could be calculated as Edis = Gb2, where G is the shear modulus and b is the magnitude of
the Burgers vector. Using the shear modulus of GaAs 3C,[33] as the shear modulus of 2H is unknown, the dislocation
line energy is estimated to be 10.74 eV/nm. The 2H NWs are hexagonal
and have {101̅.0} type facets, which are perpendicular to the
Burgers vector, and the NWs all have facets parallel to each other.
For two NWs merging along the full length of a side facet, as in Figure , the dislocation
line has initially the same length as the side facet of the NWs. For
the dislocation line to propagate into one of the two NWs by only
changing the position of one As, it has to increase its length; see Figure b–d. The minimum
increase in length would then be b/cos(30), if the
propagation occurs at a NW facet. In total, this step would increase
the total energy by 2.83 eV. Similarly, if the dislocation propagates
into a 3C structure, the total energy increases by 2.88 eV for the
first As moved. The difference between the two values is less than
thermal energy at the present growth temperature. With the dislocation
line energy as the dominant factor for the energies related to the
phase transformation, the initial structures of the two merging NWs
are of minor importance—the probability of either one to transform
is roughly equal.Comparing our phase transformation with the
case of epitaxial burying
described by Patriarche et al.,[18] the
dislocation is of the same type, and both transformations are triggered
by the interaction between two crystals with As atoms at different
lateral positions. However, in the case of epitaxial burying where
the burying matrix completely surrounds the NW, the NW has to adopt
the structure of the burying matrix or keep the dislocation at the
periphery of the NW. To let the dislocation propagate through the
NW makes the dislocation shorter, and eventually disappear, which
is the thermodynamically most favorable case, and the final structure
will be easy to predict—the one of the burying matrix. In our
case, with a NW–NW interaction, the dislocation could propagate
into either crystal, and the final structure is much harder to predict.
As the dislocation line energy depends on the shear modulus of the
crystal and the Burgers vector, changing growth conditions would not
change the dynamics of the crystal phase transformation. Changing
the growth temperature could however change the propagation rate of
the dislocation, as the Peierls energy barrier sets an activation
energy for the propagation. Hypothetically, by reducing growth temperature
enough, propagation of the defect could be kinetically hindered such
that it stays at the interface between the NWs, which then would retain
their initial structure. However, since growth temperature in this
study is high enough to ensure reasonable growth rates, we assume
that the defect propagation is not kinetically hindered. Assuming
equal probability for the dislocation to propagate in either NW, a
combinatorial approach gives the probabilities of different structures.
Statistical Estimate on Final Structure Using Combinatorics
Assuming that a dislocation can propagate with the same probability
into either NW as two NWs merge, each merging bilayer gives rise to
two equally likely outcomes. For merging of two NWs with 10 bilayers
each there will be 210 possible outcomes. If we involve
a third 10 bilayer NW in the merging process, there will be (210)2 outcomes. To estimate the amount of 3C, 2H,
and 4H in each outcome, we define a 3C segment to be of at least six
bilayers (two unit cells), 2H as six bilayers (three unit cells) and
4H as eight bilayers (two unit cells). If the 10 bilayer long segment
does not include any of the above segments, it is considered to be
a mixed structure. Using a simple MatLab script, we simulate the merging
of two, three, and four 2H NWs with each 10 bilayers (where the 10
bilayer limit is chosen to limit computation time). A schematic view
on the merging process is found in Supporting Information, Figure S6. The simulations shows that the merging
of just two NWs gives a mixed fraction of around 80%—that is,
most of the possible outcomes have only segments consisting of less
than six bilayers of any considered polytype. 2H is still the most
common polytype, with 15–16%, depending on the initial stacking
sequences of the NWS and how many NWs merge. Both 3C and 4H show up
with lower amounts (3–6% and 0.3–0.5%, respectively;
see Supporting Information, Figure S7).
This result fits well with our experimental observation: the most
likely structure for radially merged 2H NWs is a mixture between 2H
and 3C. The increase in twinned 3C seen in the XRD measurements comes
not only from the NWs, but also from the parasitic substrate growth,
and the 3–6% of 3C found in the NWs in our combinatorial model
is not the major contribution to the signal. For a structure with
very short segments of 2H and 3C sandwiched, streaking between the
XRD peaks is expected, and this is also what we observe in our RSMs;
see Figure b and Supporting
Information Figure S4. Using this simple
combinatorial approach, we are able to describe the main features
of the merging process.
2H and 4H Lattice Parameters
The
lattice parameter
for 2HGaAs has been reported previously, both using XRD[34] and electron diffraction[35] on NWs and on 2H in GaAs powder obtained at high pressure.[9] However, the 2H lattice parameters in the former
report were measured from NWs with a mixed crystal structure, consisting
of 2H segments sandwiched between 3C, and most likely strained by
the 3C segments. For our structures, the very few SFs in the pure
2H before any merging process are not likely to influence the overall
2H structure, and the 2H crystal is fully relaxed. Using the sample
with 60 min radial overgrowth, we measured the 2H and 4H unit cell
parameters on the sample with the largest volume of pure 2H. The results
are summarized in Table . With a larger lattice plane spacing along the c-axis in 2H as compared to the 3C counterpart and a smaller in-plane
distance, the c/a ratio is measured
to be 1.649, which is 0.98% higher than the ideal 1.633 for hexagonal
close-packed structures with perfect tetrahedral coordination. The
value found is in good agreement to theoretical values of 1.646–1.651.[15,36,37] Similarly, we found a c/a ratio of 3.282 for 4H, which is 0.49%
higher than ideal. The measured GaAs4H lattice parameters reported
here are to the authors’ best knowledge the first experimental
report on GaAs4H lattice parameters. The higher c/a ratio compared to the ideal is typical for metastable
hexagonal structures[15,29,30,36,38,39] and gives bonding slightly distorted from an ideal
tetrahedron. For 4H, the deviation from the ideal close-packing is
smaller than for 2H, suggesting 4H to be the more stable structure,
but still with 3C as the most stable one. Hence, the cohesive energy
for 2H should be lower than for 3C, with 4H in between the two. The
difference in cohesive energy gives a higher nucleation barrier for
2H compared to 4H or 3C in GaAs, which should result in a higher probability
of 4H than 2H during growth. However, the surface energies of the
nucleus and its surroundings play a crucial role in determining the
structure formed during NW growth. Common in models explaining polytypes
in III–V NWs is the assumption that the surface energies of
2H are considerably lower than those of 3C, which overcomes the difference
in cohesive energy.[16] Assuming surface
energies of 2H to be considerably lower than those of 4H as well explains
why observations of 4H grown in NWs are very few, and mostly only
occur in a transition region between 2H and 3C.[40,41]
Conclusion
In this work, we studied the crystal structure
of radially overgrown
GaAswurtzite (2H) NWs, especially the resulting crystal structure
as NWs progressively grow into each other and merge. We characterized
the grown structure by high resolution XRD and TEM with diffraction
analysis. We observed that the free-standing GaAs NWs retain the pure
2H structure until they merge with each other, at which point the
merged segments transform progressively from pure 2H structure to
a mixture between zinc blende (3C) structure with twins and 2H. We
also found sections with the 4H crystal structure in the merged NWs
and determined lattice parameters of both 2H and 4HGaAs. The phase
transformation continues as long as the merging process proceeds,
driven by a dislocation formed between adjacent NWs due to lateral
mismatch of As in the (1̅1̅1̅)/(000.1̅) plane.
Using a combinatorial approach, we estimated the probability of the
resulting structure after radial merging of 2H NWs, which shows that
a heavily mixed structure is the most probably outcome, in agreement
with our XRD and TEM measurements.
Authors: Sepideh Gorji Ghalamestani; Magnus Heurlin; Lars-Erik Wernersson; Sebastian Lehmann; Kimberly A Dick Journal: Nanotechnology Date: 2012-06-21 Impact factor: 3.874
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