| Literature DB >> 36073302 |
Albert Santoso1, Afke Damen1, J Ruud van Ommen1, Volkert van Steijn1.
Abstract
We explore three variants of atomic layer deposition (ALD) to deposit titanium oxide on the soft polymer polydimethylsiloxane (PDMS). We show that the organic solvent resistance of PDMS is increased by two orders of magnitude compared to uncoated PDMS for ALD performed at atmospheric pressure, which results in a unique surface-subsurface coating of PDMS.Entities:
Year: 2022 PMID: 36073302 PMCID: PMC9514010 DOI: 10.1039/d2cc02402k
Source DB: PubMed Journal: Chem Commun (Camb) ISSN: 1359-7345 Impact factor: 6.065