Nimrod Harpak1, Ella Borberg1, Adva Raz2, Fernando Patolsky1,2. 1. School of Chemistry, Faculty of Exact Sciences, Tel Aviv University, Tel Aviv69978, Israel. 2. Department of Materials Science and Engineering, the Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv69978, Israel.
Abstract
Protein biomarkers' detection is of utmost importance for preventive medicine and early detection of illnesses. Today, their detection relies entirely on clinical tests consisting of painful, invasive extraction of large volumes of venous blood; time-consuming postextraction sample manipulation procedures; and mostly label-based complex detection approaches. Here, we report on a point-of-care (POC) diagnosis paradigm based on the application of intradermal finger prick-based electronic nanosensors arrays for protein biomarkers' direct detection and quantification down to the sub-pM range, without the need for blood extraction and sample manipulation steps. The nanobioelectronic array performs biomarker sensing by a rapid intradermal prick-based sampling of proteins biomarkers directly from the capillary blood pool accumulating at the site of the microneedle puncture, requiring only 2 min and less than one microliter of a blood sample for a complete analysis. A 1 mm long microneedle element was optimal in allowing for pain-free dermal sampling with a 100% success rate of reaching and rupturing dermis capillaries. Current common micromachining processes and top-down fabrication techniques allow the nanobioelectronic sensor arrays to provide accurate and reliable clinical diagnostic results using multiple sensing elements in each microneedle and all-in-one direct and label-free multiplex biomarkers detection. Preliminary successful clinical studies performed on human volunteers demonstrated the ability of our intradermal, in-skin, blood extraction-free detection platform to accurately detect protein biomarkers as a plausible POC detection for future replacement of today's invasive clinical blood tests. This approach can be readily extended in the future to detect other clinically relevant circulating biomarkers, such as miRNAs, free-DNAs, exosomes, and small metabolites.
Protein biomarkers' detection is of utmost importance for preventive medicine and early detection of illnesses. Today, their detection relies entirely on clinical tests consisting of painful, invasive extraction of large volumes of venous blood; time-consuming postextraction sample manipulation procedures; and mostly label-based complex detection approaches. Here, we report on a point-of-care (POC) diagnosis paradigm based on the application of intradermal finger prick-based electronic nanosensors arrays for protein biomarkers' direct detection and quantification down to the sub-pM range, without the need for blood extraction and sample manipulation steps. The nanobioelectronic array performs biomarker sensing by a rapid intradermal prick-based sampling of proteins biomarkers directly from the capillary blood pool accumulating at the site of the microneedle puncture, requiring only 2 min and less than one microliter of a blood sample for a complete analysis. A 1 mm long microneedle element was optimal in allowing for pain-free dermal sampling with a 100% success rate of reaching and rupturing dermis capillaries. Current common micromachining processes and top-down fabrication techniques allow the nanobioelectronic sensor arrays to provide accurate and reliable clinical diagnostic results using multiple sensing elements in each microneedle and all-in-one direct and label-free multiplex biomarkers detection. Preliminary successful clinical studies performed on human volunteers demonstrated the ability of our intradermal, in-skin, blood extraction-free detection platform to accurately detect protein biomarkers as a plausible POC detection for future replacement of today's invasive clinical blood tests. This approach can be readily extended in the future to detect other clinically relevant circulating biomarkers, such as miRNAs, free-DNAs, exosomes, and small metabolites.
Detection of clinical biomarkers is of
enormous importance, particularly
in the field of medicine, as they can provide critical data regarding
an individual’s medical condition and may assist, by proper
early diagnosis, in managing diseases, and preventing mortalities.
However, modern-day medical diagnosis heavily relies on blood tests
as the primary indicator for human health, as blood contains tens
of thousands of proteins, biomarkers, and other biological species.
Most of today’s processes for reliable detection and quantification
of biomarkers require time-consuming and complex separation methods
of the bodily fluid in order to separate blood cells and other interrupting
constituents.[1−4] Such sample preparation steps often lead to reduced sensitivities
and a lack of reliability in specific assays, along with the incapability
to perform point-of-care (POC) analysis.[5−7]The current widespread
blood tests rely solely on painful and invasive
venous blood extraction of several tens of milliliters in volume.
Despite the fact that it is currently the preferred diagnostic approach,
some of the extracted biosamples are eventually discarded after centrifugation
due to technical factors related to sample handling, transportation,
storage conditions, and postextraction manipulation.[8,9] As the world shifts its attention toward POC medical devices, which
will ultimately result in simpler methods of analysis and diagnosis,
more reliable and accurate methods are required to detect diagnostic
biomarkers. POC testing is defined as medical diagnostic assays at
or near the point of care—that is, at the time and place of
patient care. This contrasts with the historical arrangement in which
testing was wholly confined to central medical laboratories, which
required sending specimens away from the point of care, then waiting
hours or days to reach results, during which time care must continue
without the desired information. Additionally, measuring multiple
bioanalytes simultaneously in the same sample is very desirable, allowing
a rapid, low-cost, and reliable quantification. Thus, multiplexed
POC testing has become critically important for medical diagnostics.
In this context nowadays, capillary blood-based diagnosis approaches
are being vigorously investigated, as they may ultimately offer less
invasive, faster, cheaper, and more straightforward means for POC
diagnosis. However, as many currently developed sensing strategies
attempt to realize successful diagnosis based on capillary blood sample
analysis,[10,11] numerous problems arise from the minimal
volumes needed to be extracted and subsequently required for effective
analysis: uncontrollable detrimental effects experienced by the blood
samples upon extraction and postextraction manipulation steps, normally
occurring before reaching the final sensing phase, such as clotting
and hemolysis;[12,13] substantial limitations of postextraction
sample manipulation steps originating from the tiny volume of extracted
samples, in the range of few microliters, further preventing the application
of centrifugation and additional required procedures; and the final
incapability to perform multiplexed biomarkers analysis on these small
volume samples. All these factors lead to significant analytical artifacts
impeding diagnosis. Hence, a new paradigm is strongly required to
quantitatively sample and analyze multiple clinical biomarkers of
interest directly from the patient’s capillary blood confined
to the intradermal space in vivo, unrestricted to
current diagnostic technologies requirements of blood samples extraction
and postextraction storage, transportation, and manipulation steps.In this regard, microneedle-based systems have been recently shown
to be one of the most appealing concepts for in vivo intradermal applications. Because of their size, these systems were
demonstrated to be minimally invasive easy-to-use platforms, where
no severe tissue damage is observed by their long-term use.[14−17] Most of these systems’ applications have focused on drug
delivery,[18−20] liquid biosamples extraction for ex situ analysis,[21,22] and glucose levels monitoring
in diabetic individuals.[23,24] Currently reported
microneedle-based sensing platforms are based on complex nonscalable
fabrication procedures, often limiting the resulting devices’
reliability, accuracy, and real-world applicability.[25−28] Furthermore, all reported studies focused on the real-time intradermal
detection of small molecular species, mostly glucose. No report exists
on the direct in vivo detection of protein biomarkers
from the intradermal space. Nanowires[29−33] have been shown to be a versatile substrate for the
fabrication of devices in a broad range of applications such as electronics,[34,35] optics,[36] biosciences,[37,38] medical diagnosis,[24] and energy storage.[39−41] More specifically, silicon nanowire-based field-effect transistors
(SiNW-FET) were recognized in the last two decades as plausible candidates
for label-free, ultrasensitive biosensing devices,[42−46] allowing biomarkers detection in the deep sub-pM
concentration range, thus covering the clinically relevant biofluid
concentrations of most biomarkers of interest. Unfortunately, their
intrinsic low limit of detection is achievable only under low-ionic
strength conditions due to Debye length screening limitations imposed
by the high ionic content of the body fluid under analysis, with ionic
strengths higher than 150 mM and Debye length of ca. 1 nm. This significant
handicapping limitation prohibits any practical applications of SiNW-FET
devices for sensing unprocessed complex biological fluids. In recent
years, successful attempts to overcome the Debye screening length
limitation were presented, utilizing the “delayed-dissociation”
of surface-bound antigen–antibody pairs[47,48] and additional approaches.[49,50] These later studies
allowed the sensing of bioanalytes in postextraction processed whole
blood samples (e.g., serum and plasma), as well as directly from unprocessed
whole plasma samples in the former case, practically without limiting
the analytes that can be quantitatively measured and depending on
the surface-modified antibody of choice. However, while these methods
allow exploitation of the complete intrinsic sensitivity of the SiNW-based
nanoelectronic devices, still, the extraction of blood samples is
required, like in all widespread blood-extraction-based clinical diagnostic
platforms.In light of the above, an appealing concept would
be to implement
and combine SiNW-FET devices with a microneedle-based system. Such
a system would be able to answer the many desires arising for a complete
biosensing apparatus: (i) capability to perform highly sensitive sensing
of biomolecules, down to the sub-pM range, directly from blood; (ii)
minimally invasive probing; (iii) rapid measurement times and reliable
results for a complete POC device; (iv) multiplexed detection of various
biomolecules on the same device; and (v) scalable fabrication. The
microneedle embedded nanosensor arrays are created by conventional
2D fabrication procedures integrated to fabricate a functional intradermal
probing platform. The sensing microneedle probe is capable of impaling
the outer dermal layer down to a depth dictated by the microneedle
length, rupturing capillaries, and forming a blood pool at the puncture
site. A few seconds long intradermal probing of the blood pool by
the nanosensor array at the tip of the microneedle element, followed
by the ex vivo detection step, leads to the accurate
and quantitative relative biomarker of interest.Here, we present
a paradigm of a fully integrated microneedle-embedded
SiNW-FET devices’ array capable of performing POC rapid label-free
sensing of multiple protein biomarkers by a minimally invasive, pain-free
method directly from the intradermal space without the requirement
for blood extraction and manipulation steps. The proposed fabrication
workflow allows for devices’ redundancy and multiplexed detection,
providing reliable results and multibiomarker detection capabilities
by the same sensing platform. We show that by using our multifunctional
sensing microneedle elements, protein biomarkers’ detection
can be successfully performed directly from the intradermal tiny submicroliter
capillary blood pools filling the impalement sites resulting from
the dermal penetration of the microneedle elements. This work demonstrates
diagnosis paradigm, based on the application of microneedle-embedded
nanosensors arrays for the blood extraction-free direct intradermal
capillary detection of protein biomarkers with a sub-pM sensitivity
for all tested species (i.e., below 0.03 ng/mL). This diagnostic platform
holds the future potential to replace the current painful and invasive
diagnostic approaches based on blood extraction and manipulation procedures,
dominating today’s medical blood tests, thus providing a simple
POC device for the intradermal capillary rapid and accurate detection
of protein biomarkers of interest.
Results
Intradermal probing requires careful planning
of the sensing device,
as some crucial elements are required to safeguard the entire device
during skin impalement. Silicon-on-insulator (SOI) based devices have
been on the rise in the past decade as an alternative to the common
bottom-up vapor–liquid–solid (VLS) approach.[51−53] SOI-based devices exhibit greater reproducibility, lower variability
between devices, and can be fabricated using large-scale integration
techniques, which enable complex designs to be executed very simply.[54] The robust fabrication process of the microneedle-embedded
SiNW-FET device is depicted in Figure a. An ultrathin device layer of 75 nm silicon-on-insulator
(SOI) was selected, with a buried oxide (BOX) thickness of 400 nm.
The initial thickness of the dies was 750 μm, in order to maintain
the structural integrity of the whole microneedle-embedded device.
Once the nanowires were patterned and formed, and the electrodes were
fabricated using standard UV lithography and metal evaporation steps,
a SU-8 chemically protecting layer was formed. It should be noted
that once the nanowires are formed, no plasma processes were conducted
in order to prevent the severe ion damage that will substantially
lower the conductivity of the resulting devices.[55] The SU-8 layer, which was patterned to leave open access
to the sensing devices in the form of a 150 μm × 130 μm
pool structure, is of crucial importance to the functional design
of the microneedle-embedded SiNW FET elements. Beyond the potential
contamination faced by the nanowires-based devices when impaling the
skin, scrubbing of the sensing elements by the intradermal layers
will mechanically abrase and remove the covalently attached molecular
biorecognition layer upon impaling into the skin. Therefore, the heightening
of the surface from the nanowires-based devices, by the SU-8 layer,
is an essential and key element in the successful execution of extraction-free,
intradermal protein detection. Once the SU-8 layer is formed, mechanical
thinning of the needle region is conducted. The nanowire elements
based on the SOI device layer are extremely prone to ion damage, which
will ultimately result in loss of conductivity. Therefore, as part
of the elaborate fabrication scheme, the time required to etch the
final structure into the microneedle elements, using deep reactive
ion etching (DRIE), is greatly reduced by the mechanical thinning.
The final microneedle-embedded sensors can be seen in the SEM image
provided in Figure b. The final needle structure possesses a sharp tip, allowing simple
impalement of the skin layers. The final structure is ca. 150 μm
wide and 250 μm thick. The SU-8 layer formed is approximately
5 μm thick, not impairing the ability of the needle to penetrate
the skin. For the purpose of this manuscript, two sensing elements
are fabricated on each needle as can be seen in the insets. In this
context, it should be noted that the amount of sensing elements for
each needle is limited only by the physical size of the desired needle;
therefore, numerous devices can be directly fabricated, allowing higher
sensing redundancy. The robust fabrication scheme is carefully designed
to provide various desired properties in a single on-chip POC device:
(i) independent sensing capabilities for each needle, allowing multiplexed
detection of various analytes through different chemical modifications;
(ii) multiple sensors in each individual needle for redundancy purposes,
allowing reliable and accurate diagnostic results; and (iii) safekeeping
of the sensing region during skin impalement. The ability to fabricate
the whole device using common micromachining and lithography tools
allows the number of needles, devices, length, and shape to be easily
varied.
Figure 1
Fabrication and characterization of the SiNW-FET-based microneedle
array sensor. (a) Schematic illustration of the top-down fabrication
process. (b) SEM images of the fabricated needles; the needles are
150 μm in width and ca. 250 μm in thickness (scale bar:
125 μm). The green inset shows the opening of the SU-8 layer
that forms the device window (scale bar: 25 μm). The blue inset
shows a close-up image on one of the two devices inside the device
window. The source-drain pads lie on pads fabricated from the device
layer for better contact and surface area. The nanowires are a part
of the device layer, laying on the buried oxide, and are 125 nm in
width and 75 nm high (scale bar: 5 μm). (c) Electrical characterization
of a representative device. The source-drain voltage was swept between
−0.4 and 0.15 V, and the gate was kept constant at −0.3
V (black curve), −0.2 V (red curve), −0.1 V (green curve),
0 V (blue curve), and 0.1 V (light blue curve). Inset illustrates
how the measurement was made, mimicking the ex vivo experiments as close as possible. (d) Transconductance measurements
of five individual devices on the same microneedle FET. Vsd was kept
constant on 0.1 V while the gate was swept between (−0.3) V
to 0.4 V.
Fabrication and characterization of the SiNW-FET-based microneedle
array sensor. (a) Schematic illustration of the top-down fabrication
process. (b) SEM images of the fabricated needles; the needles are
150 μm in width and ca. 250 μm in thickness (scale bar:
125 μm). The green inset shows the opening of the SU-8 layer
that forms the device window (scale bar: 25 μm). The blue inset
shows a close-up image on one of the two devices inside the device
window. The source-drain pads lie on pads fabricated from the device
layer for better contact and surface area. The nanowires are a part
of the device layer, laying on the buried oxide, and are 125 nm in
width and 75 nm high (scale bar: 5 μm). (c) Electrical characterization
of a representative device. The source-drain voltage was swept between
−0.4 and 0.15 V, and the gate was kept constant at −0.3
V (black curve), −0.2 V (red curve), −0.1 V (green curve),
0 V (blue curve), and 0.1 V (light blue curve). Inset illustrates
how the measurement was made, mimicking the ex vivo experiments as close as possible. (d) Transconductance measurements
of five individual devices on the same microneedle FET. Vsd was kept
constant on 0.1 V while the gate was swept between (−0.3) V
to 0.4 V.Then, the resulting microneedle-embedded SiNW FET
devices were
electrically characterized using a probe station. Electrical I–V measurements are shown in Figure c. Using a top-gate
characterization method, as illustrated in the inset, the device’s
electrical characteristics exhibit a p-type behavior, undamaged by
the DRIE process used to create the final microneedle structure. Transconductance
measurements, depicted in Figure d, show a minor 8.5% variability between different
devices.Monitoring different proteins’ biomarkers can
be crucial
for the early detection of many diseases and medical conditions. What
usually requires an invasive, painful process of drawing a few milliliters
of venous blood for diagnosis can be practically avoided using minimal
amounts of capillary blood via rapid antibody–antigen binding
followed by electrical measuring. We modified the microneedle sensing
surface with an anti-PSA antibody as a proof-of-concept. Elevated
prostate-specific antigen level (PSA) is known to be a biomarker for
prostate cancer, considered healthy up to 4 ng/mL (∼120 pM).[56,57] Therefore, direct detection of blood-PSA can provide a significant
measure for an individual’s health without having to extract
blood in an invasive and painful manner. As illustrated in Figure a, the chemical modification
can be conducted in two ways—either submerging the needles
in 150–200 μL antibody solution or by using a microspotting
system to dispense small volumes of antibody modification solution
on each needle individually, allowing for easy multiplexing of the
device, as illustrated at the bottom of Figure a.
Figure 2
Surface modification process. (a) Illustration
of modification.
Top: microneedles dipped in 150–200 μL, bottom: each
needle drop-cast using a microspotter. (b) Schematic illustration
of the chemical modification process, with XPS results of different
stages of the modification. (c) Schematic illustration of GFP binding
to its antibody to test the modification process. (d) Fluorescence
microscopy images results of GFP binding to needle after chemical
immobilization of GFP-antibody. The needle is shown before (top) and
after (bottom) soaking for 10 min in 60 nM GFP. (e) Fluorescence microscopy
images results of GFP binding to bare needle. The needle is shown
before (top) and after (bottom) soaking for 10 min in 60 nM GFP. (f)
Fluorescence microscopy images of Alexa488 chemically immobilized
to needles without SU-8 window before (top) and after (bottom) insertion
to PDMS. (g) Fluorescence intensity of needles modified before (black)
and after (red) soaking for 10 min in 60 nM GFP. Top: with GFP-antibody,
bottom: bare needle, respectively, correlating to (d) and (e). (h)
Fluorescence intensity of Alexa488 chemically immobilized to needles
before (black) and after (red) insertion to PDMS. Without (top) and
with SU-8 window (bottom).
Surface modification process. (a) Illustration
of modification.
Top: microneedles dipped in 150–200 μL, bottom: each
needle drop-cast using a microspotter. (b) Schematic illustration
of the chemical modification process, with XPS results of different
stages of the modification. (c) Schematic illustration of GFP binding
to its antibody to test the modification process. (d) Fluorescence
microscopy images results of GFP binding to needle after chemical
immobilization of GFP-antibody. The needle is shown before (top) and
after (bottom) soaking for 10 min in 60 nM GFP. (e) Fluorescence microscopy
images results of GFP binding to bare needle. The needle is shown
before (top) and after (bottom) soaking for 10 min in 60 nM GFP. (f)
Fluorescence microscopy images of Alexa488 chemically immobilized
to needles without SU-8 window before (top) and after (bottom) insertion
to PDMS. (g) Fluorescence intensity of needles modified before (black)
and after (red) soaking for 10 min in 60 nM GFP. Top: with GFP-antibody,
bottom: bare needle, respectively, correlating to (d) and (e). (h)
Fluorescence intensity of Alexa488 chemically immobilized to needles
before (black) and after (red) insertion to PDMS. Without (top) and
with SU-8 window (bottom).The modification process is schematically illustrated
in Figure b. First,
3-aminopropyldimethylethoxysilane
(APDMES) was applied in an inert environment by dipping the needles
in the pure silane derivative solution for 1 h, followed by a thorough
wash in toluene and IPA, and placed on a heating plate at 70 °C
for 30 min in order to evaporate the solvents fully. Then, the needles
were dipped in a 200 μL of 10% glutaraldehyde solution in phosphate
buffer containing 50 mg of cyanoborohydride for 1 h and washed thoroughly
in IPA and DIW. The needles were then modified with a 30 μg/mL
anti-PSA solution in phosphate buffer with 50 mg of cyanoborohydride
at 4 °C. The blocking of unreacted aldehyde surface groups was
performed via dipping the needles for 2 h in 200 μL of ethanolamine
solution (150 μL in 20 mL phosphate buffer containing 50 mg
of cyanoborohydride).X-ray photoelectron spectroscopy (XPS)
analysis results of the
different modification steps are shown in Figure b (marked boxes). Once the amino-silane derivative
APDMES is covalently attached, a rise in carbon and nitrogen atomic
content is measured. As expected, a significant increase in carbon
and nitrogen content occurs once the glutaraldehyde and antibody molecules
are attached to the sensing surface. These XPS results demonstrate
the successful modification of the sensing device surface with the
receptor antibody molecules. Full XPS spectra are shown in Figure S2.In order to further verify the
chemical modification, fluorescence
microscopy experiments were conducted. Instead of an anti-PSA antibody,
anti-GFP (Green Fluorescent Protein) was modified onto the surface
of a bare microneedle. The SU-8 protection layer was not used in this
case since the high autofluorescence effect of SU-8 prevents proper
fluorescence measurements. The microneedles were then dipped in a
60 nM GFP solution for 10 min, as illustrated in Figure c, and further washed in phosphate
buffer saline (PBS). It can be clearly seen, Figure d, that a 10 min incubation leads to an apparent
increase in the fluorescence intensity measured as a result of the
specific binding of GFP to the surface of the antibody-modified microneedle
element. Six different areas were tested along the needle length axis,
marked with dots on Figure d, and fluorescence intensity values were normalized using
the average intensity value measured on the chemically unreacted microneedle
(not exposed to GFP). The results are plotted in Figure e, showing a ca. 600% increase
in fluorescence intensity. Therefore, it can be concluded that the
microneedle sensing surface was successfully modified with the antibody
receptor molecules. To further verify the modification process, electrochemical
impedance spectroscopy (EIS) measurements were performed. The results
are shown in Figure S3. The measurements
were performed using a three-electrode system (silicon piece as working
electrode, platinum mesh as counter electrode and Ag/AgCl as a reference
electrode) submerged in 0.01× PBS solution, under 20 mV amplitude
at 0.1 V (this potential was chosen as no redox occurs in this point).
As the modification process continues, a clear increase in the charge
transfer resistance is seen. Furthermore, once incubated in protein
for 10 min after antibody modification, a major increase in the charge
transfer is observed.[58]The fundamental
importance of the SU-8 protective layer integrated
into the core design of the microneedle-embedded sensors is shown
in Figure f. A needle
chemically modified with the fluorophore Alexa-488 is shown before
(top) and after (bottom) its mechanical insertion into a polydimethylsiloxane
(PDMS) skin-mimicking slab. The absence of a SU-8 protection layer
leads to complete removal of the antibody biorecognition layer upon
insertion of the microneedle elements into this slab and will not
further allow the desired successful application of the chemically
modified microneedle devices in the intradermal detection of biomarkers.
Notably, no measurable difference was measured when performing the
same experiment with chemically modified microneedle elements containing
the SU-8 protective layer, as shown in Figure g. These results can also be verified using
EIS spectroscopy as shown in Figure S3.
After insertion of the silicon to PDMS (after incubation in protein),
a major decrease in the charge transfer resistance can be seen. These
results highlight the critical importance of the SU-8 chemistry-protective
layer, which allows for microneedle transdermal penetration without
compromising either the electronic devices’ performance or
their chemical modification integrity.In order to prepare for in vivo sensing experiments,
where protein biomarkers in capillary blood are captured directly
at the nanosensors sites, without the requirement of extraction of
bodily fluids, the proper length of microneedle elements should be
chosen. Microneedles in the length of 300–500 μm were
previously shown to enable in vivo transdermal monitoring
of glucose levels in interstitial fluid (ISF); however, this insertion
depth range does not allow microneedle elements to reach and rupture
intradermal blood capillaries networks.[24] Therefore, longer microneedles are needed to fully penetrate and
rupture the dermal layers and reach capillary depth for the subsequent
capillary blood protein biomarkers detection. Figure a shows a comparison of different needles–a
27G needle used in common venous blood extraction procedures, and
representative 400 μm-long and 1 mm-long microneedle-embedded
SiNW-FET arrays. In today’s phlebotomy practices, a needle
is inserted up to a few millimeters for the purpose of drawing blood
from a vein in the arm. Successful execution of protein biomarkers
sensing by our microneedle-based system would reduce the need for
such invasive procedures and would hold the potential to eventually
replace these invasive diagnosis means by a minimally invasive and
unpainful procedure. Figure b shows a schematic illustration of the difference between
400 μm and 1 mm microneedle apparatus. The subcutaneous capillary
layer in the forearm and fingers’ tip is found to be approximately
0.6–1.5 mm in depth,[59] while the
epidermis layer is a few hundred micrometers thick.[60] Therefore, a 1 mm needle is expected to penetrate the dermal
layer and rupture blood capillaries smoothly in a nonpainful way.[61] Diagnostically, capillary blood protein biomarkers’
levels have been shown to correlate well with those of venous blood,[62] meaning that our minimally invasive, pain-free
procedure by the microneedle-embedded nanosensors platform could represent
a promising alternative to the currently widespread venous blood extraction-based
diagnostics approaches.
Figure 3
Microneedle array dimensions and blood contact.
(a) Optical image
of comparison in size between common 27G needle for venous blood extraction
and the proposed microneedle array sensors. Two types of fabricated
microneedles length are shown −400 μm and 1 mm. Scale
bar: 5 mm. (b) Schematic illustration of microneedle insertion to
the forearm. 1 mm microneedle should reach the blood capillaries in
the dermis, while 400 μm needles will not reach as effectively.
(c) Optical images showing the microneedle before (top) and after
(bottom) a blood droplet was placed on the microneedle. Orange inset
shows blood is clearly able to enter the SU-8 window. (d) Optical
image showing the microneedle after insertion to the skin. (e) Schematic
illustration of a different possible location for protein detection
in the blood. The microneedle array can be used in the finger without
or with prior pricking.
Microneedle array dimensions and blood contact.
(a) Optical image
of comparison in size between common 27G needle for venous blood extraction
and the proposed microneedle array sensors. Two types of fabricated
microneedles length are shown −400 μm and 1 mm. Scale
bar: 5 mm. (b) Schematic illustration of microneedle insertion to
the forearm. 1 mm microneedle should reach the blood capillaries in
the dermis, while 400 μm needles will not reach as effectively.
(c) Optical images showing the microneedle before (top) and after
(bottom) a blood droplet was placed on the microneedle. Orange inset
shows blood is clearly able to enter the SU-8 window. (d) Optical
image showing the microneedle after insertion to the skin. (e) Schematic
illustration of a different possible location for protein detection
in the blood. The microneedle array can be used in the finger without
or with prior pricking.Figure c shows
optical microscope images of a microneedle element before and after
its contact with a blood droplet. As seen in the inset, the blood
droplet, as evidenced by the presence of red blood cells, clearly
and rapidly fills the nanosensor device’s protective window
formed by SU-8. Thus, it demonstrates that this SU-8 protective window
does not prevent the blood-to-device free interaction, further allowing
the analyte biomarkers detection and quantification. Additionally, Figure d shows an optical
image of a 1 mm microneedle element after skin impalement into the
forearm of a volunteer, exhibiting little visual residues along the
entire length of the microneedle, indicating full penetration of the
needle and reaching the required capillary depth.Another possible
location for in vivo analysis
of protein biomarkers directly from capillary blood is illustrated
in Figure e. In recent
years, POC diagnostic devices research and development have tried
to boost the use of capillary blood instead of venous blood since
these tests would be more comfortable for patients and will provide
a significant boost in quality-of-life and simplicity of the measurements.
Finger pricking has been the method of choice for noncontinuous glucose
measurements for diabetic individuals. While some research has been
conducted on protein biomarkers detection from extracted whole capillary
blood samples, these tests require manipulating the small volumes
of extracted capillary blood and taking tens of minutes to hours to
achieve results.[63,64] However, these results show that
PSA and many other protein biomarkers concentrations in capillary
blood correlate well with their respective concentration in venous
blood. Therefore, finger pricking can provide proper and straightforward
means for direct in vivo diagnosis measurements when
combined with methods for protein detection in nonmanipulated whole
capillary blood specimens.[47] Past investigations
have shown that healthy individuals possess a capillary density higher
than 60–200 capillaries per mm2.[65−69] Thus, the transdermal penetration of our developed
sensing microneedle elements, down to the required capillary depth,
will lead to the rupture of capillary elements and the formation of
a tiny capillary blood “pool” in the site of microneedle
puncture. This formed capillary blood “pool” surrounding
the sensing microneedle elements will lead to the surface capture
of the protein biomarkers of interest to the electrical nanosensors
devices and their subsequent quantitative detection.Representative
optical images of the microneedle insertion process
through the skin in the forearm could be found in Figure a. The needles are shown to
penetrate smoothly, with the entire microneedle array inserted in
its total length. The chip’s handle is used as a self-limiting
component for the entry depth and allows only the microneedle elements
to be inserted into the dermal layer. Mechanical tests for quantifying
the force needed for skin penetration were previously conducted using
a pigs’ skin model,[24] where different
skin stiffness was mimicked by using a PDMS support for higher stiffness.
Without the PDMS support, 1N force was required to penetrate the skin,
and 0.2N was needed with higher stiffness. These results comply with
previous microneedle skin penetration experiments.[24,70,71] Notably, the needles did not break even
after a 5N of applied force, thus proving mechanical robustness and
safety.
Figure 4
Skin insertion and contact with blood vessels. (a) Images of the
insertion process of the microneedle array sensors into the forearm.
(b) Images showing several insertion experiments of 1 mm microneedle
array (left) and 0.4 mm microneedle array (right) to the forearm.
(c) Summarized results of blood drawing from insertion experiments
of 1 mm microneedle array (red) and 0.4 mm microneedle array (green)
to the forearm. (d) Statistical distribution of blood drawing success
percentage from 50 insertion experiments of 1 mm microneedle array
(black) and 0.4 mm microneedle array (red) to the forearm.
Skin insertion and contact with blood vessels. (a) Images of the
insertion process of the microneedle array sensors into the forearm.
(b) Images showing several insertion experiments of 1 mm microneedle
array (left) and 0.4 mm microneedle array (right) to the forearm.
(c) Summarized results of blood drawing from insertion experiments
of 1 mm microneedle array (red) and 0.4 mm microneedle array (green)
to the forearm. (d) Statistical distribution of blood drawing success
percentage from 50 insertion experiments of 1 mm microneedle array
(black) and 0.4 mm microneedle array (red) to the forearm.Figure b displays
results from three different healthy volunteers after applying 1 mm
(left) and 400 μm (right) microneedle elements to penetrate
their skin, while the resulting puncture sites were photographed postextraction.
During insertion, minimal to no pain was reported by all volunteers.
Notably, each penetration attempt using 1 mm microneedle elements
resulted in the formation of a small drop of capillary blood for all
three healthy volunteers tested, indicating that the 1 mm microneedle
is sufficient for efficient protein biomarkers measuring purposes
directly from capillary blood. Statistics of intradermal capillary
blood “pool” formation experiments comparing the two
needles lengths are shown in Figure c,d. A considerably higher success rate for the formation
of capillary blood intradermal “pools” is achieved using
the longer 1 mm microneedle chips, with almost 100% of all incidents
leading to capillary blood pool formation.Most of the SiNW-FET
sensing devices in the published literature
rely on the use of microfluidics for fluid exchange and sensing assays.
To simplify in vivo sensing experiments, and due
to the shape of our microneedles, no reliance on external microfluidics
is required in our platform. Figure S5a depicts a representative bare nanodevice’s response to different
pH media. The other pH solutions were made from 10 mM potassium phosphate
monobasic and dibasic species to ensure identical ionic strength,
thus eliminating the effects of different ionic strengths on the sensor’s
signal. Each pH was measured twice by putting the microneedle sensor
in the pH solution using a micromanipulator, removing the device,
and reinserting it in order to see if any changes occurred. Once the
device had reached the first plateau and stabilized, no further difference
was seen between each insertion. All the SiNW elements in this work
were coated with a two nm-thick alumina layer by atomic layer deposition.
The coating allowed long and stable experiments to be conducted,[72] although it is not a strict requirement for
our current sensing experiments. The bare nanodevices exhibit a strong
dependence on pH, as shown in Figure S5b. Additionally, the response variability of the nanodevices is negligible
once the signal has stabilized, reaching up to 1% of the total averaged
value (average over five cycles measured at the highest point).Prior to in vivo intradermal measurements in capillary
blood, an in vitro test was conducted to see the
device’s sensitivity toward the protein biomarker PSA. The
test was separated into two regimes–specific association and
dissociation. The association occurred at 1× phosphate buffer
saline (PBS) solution spiked with different PSA concentrations. At
the same time, the dissociation step was performed using a low ionic
strength sensing buffer SB solution (0.01× of 10 mM phosphate
buffer) with 5% added ethylene glycol (EG). Prior results using this
method have shown the advantage of using EG as a dissociation inhibitor
at a concentration of 50%.[47]Figure a shows the result of the in vitro experiments, where the PSA dissociation step was
performed using a 1:1 SB:EG solution. The results demonstrate the
fast plateau reached after several seconds of PSA association, where
an apparent signal differentiation was achieved within 60 s. Therefore,
the halted transdermal insertion of the microneedle array for only
several tens of seconds would be sufficient for diagnostic purposes.
Also, a 1:1 SB:EG ratio was chosen to be suitable for the dissociation
period, giving slower dissociation rates of the specific biomarker
molecules from the surface-confined antibody receptor units, all the
while letting nonspecific bound moieties dissociate quicker from the
sensing area. Therefore, the overall sensing measurement time is fast,
with results that can be achieved in less than 3 min, significantly
surpassing the time required for today’s biomarkers measurements
via conventional blood tests.
Figure 5
In vivo results of different
measurements using
the microneedle array. (a) Stabilization curves of PSA association
at 10 pM (red curve) and 100 pM (blue curve) spiked-PBS solutions.
The results indicate that the sensor requires approximately 60 s to
achieve a differentiable signal. (b) One cycle close-up view taken
once dissociation stabilization is achieved for PSA-spiked PBS buffer.
(c) One cycle close-up view taken once dissociation stabilization
is achieved for PSA-spiked serum. (d) Normalized response linear curves
derived from (a) and (b). The dissociation phase was conducted in
5% EG in 100 μM phosphate buffer solution. Normalized reaction
is in comparison to nonspiked buffer or serum, respectively. Pink
data relates to nonspecific normalized response to 22 ng/mL cTnI and
21 ng/mL GFP. (e) In vivo intradermal capillary PSA
concentrations were measured in four subjects using the microneedle
array (green bars) compared to ELISA measurements of PSA concentration
in venous blood (blue dots). (f) Multiplex experiment results of normalized
response to PSA-spiked buffer from a device modified with PSA-specific
antibody (αPSA, black curve) and a device modified with cTnI-specific
antibody (αcTnI, red curve). (g) Multiplex experiment results
of normalized response to cTnI-spiked buffer from a device modified
with PSA-specific antibody (αPSA, black curve) and a device
modified with cTnI-specific antibody (αcTnI, red curve). (i)
Top: Deviation measurements performed on a single device via multiple
entries to (100 pM spiked serum solution). Bottom: Variance measurements
were performed between different devices via normalized response against
a 100 pM spiked serum.
In vivo results of different
measurements using
the microneedle array. (a) Stabilization curves of PSA association
at 10 pM (red curve) and 100 pM (blue curve) spiked-PBS solutions.
The results indicate that the sensor requires approximately 60 s to
achieve a differentiable signal. (b) One cycle close-up view taken
once dissociation stabilization is achieved for PSA-spiked PBS buffer.
(c) One cycle close-up view taken once dissociation stabilization
is achieved for PSA-spiked serum. (d) Normalized response linear curves
derived from (a) and (b). The dissociation phase was conducted in
5% EG in 100 μM phosphate buffer solution. Normalized reaction
is in comparison to nonspiked buffer or serum, respectively. Pink
data relates to nonspecific normalized response to 22 ng/mL cTnI and
21 ng/mL GFP. (e) In vivo intradermal capillary PSA
concentrations were measured in four subjects using the microneedle
array (green bars) compared to ELISA measurements of PSA concentration
in venous blood (blue dots). (f) Multiplex experiment results of normalized
response to PSA-spiked buffer from a device modified with PSA-specific
antibody (αPSA, black curve) and a device modified with cTnI-specific
antibody (αcTnI, red curve). (g) Multiplex experiment results
of normalized response to cTnI-spiked buffer from a device modified
with PSA-specific antibody (αPSA, black curve) and a device
modified with cTnI-specific antibody (αcTnI, red curve). (i)
Top: Deviation measurements performed on a single device via multiple
entries to (100 pM spiked serum solution). Bottom: Variance measurements
were performed between different devices via normalized response against
a 100 pM spiked serum.Figure b depicts
one cycle of an in vitro measurement as described
above. The signal normalization was performed against the “clean”
signal, measured in a 1× PBS solution without any spiked PSA.
Similarly, Figure c represents one current cycle of in vitro measurements
serum spiked with rising PSA concentrations. Signal normalization
was performed against “clean” unspiked serum. The presented
concentration measurements were normalized poststabilization in relation
to the association regime plateau using the formation formula:where Ip is the
current received from PSA-containing PBS solutions, and Ic is the current received from clean PSA-free PBS solution.
Once calculated, the dissociation regimes were normalized using the
resulting signal response percentages. The association regime plateau
was used for the calibration since dealing with high ionic strength
screens the electrical signals originating from protein association
due to the short Debye screening length at these conditions. The results
corresponding to each concentration were taken in relation to the
stabilization of the “clean” solution’s signal.A clear concentration-dependent sensing behavior is observed at
increasing PSA concentrations, Figure d, which shows the linear curves of normalized response
to different PSA concentrations in spiked PBS buffer (black curve)
and in spiked serum (blue curve). The normalized response is taken
as an average value measured after five consecutive cycles of dissociation
regime. Specificity tests of the response of the microneedle-embedded
SiNW array were conducted by measurements in the presence of high
concentrations of nonspecific proteins. The anti-PSA modified array
showed near-zero response to 22 ng/mL of cardiac troponin I (cTnI)
and 21 ng/mL green fluorescent protein (GFP). Figure S6b compares one cycle of PSA measurement in the presence
of 100-fold higher concentrations of GFP and cTnI. These results indicate
the high specificity of our sensing microneedle devices for the specific
detection of the desired biomarker antigens. Importantly, these results
indicate low sensitivity to varying interferents, since measurements
were performed in untreated serum.Following in vitro calibration of the sensing
devices, in vivo intradermal sensing measurements
through finger pricking, through the 30−60 s-delayed insertion
of the microneedle elements into the intradermal space (microneedle
impalement is followed by a waiting period of 30−60 s before
final removal followed by ex-vivo dissociation measurement)
of human volunteers were performed, shown in Figure e (green columns); 4 subjects were tested:
Subject 1 is a healthy 30-year-old male, Subject 2 is a healthy 50-year-old
male, Subject 3 is a healthy 30-year-old male triathlete (cycling
over 20 km weekly), and Subject 4 is a healthy 30-year-old female.
The results show that subjects’ PSA levels are within the normal
healthy range for male Subjects 1 and 2 and are slightly higher for
male Subject 3, as was expected since long-distance daily bicycling
routines are well-known to cause high PSA levels.[73,74] Very low PSA levels were also expected for the female Subject 4
since normal PSA levels in healthy females are about 0–0.52
ng/mL.[75] The PSA levels from in
vivo microneedle sensing trials were further validated by
performing a gold-standard PSA-specific enzyme-linked immunosorbent
assay (ELISA) using venous blood from the same volunteers, Figure e (blue dots). ELISA
results show that the in vivo capillary blood direct
sensing performed by our microneedle arrays has the capability to
measure the target PSA protein biomarker accurately and falls within
the error range of the gold standard ELISA measurements. Additionally,
the comodification of both total-PSA and free-PSA antibody receptors
on different microneedle elements on a single sensing chip further
could allow the ratiometric clinical assessment of the PSAtotal/PSAfree ratio. This ratio is clinically well-known to
provide more sensitive and specific information for the diagnosis
of prostate cancer.The microneedle-embedded nanosensors array
presented here poses
multiple advantages for future POC medical diagnosis applications.
First and foremost, the lack of need to invasively extract and manipulate
blood samples by the direct intradermal capillary blood-based detection
of proteins biomarkers provides a great leap in the field of medical
diagnosis. This type of sensing platform can also be used in clinical
situations where the amount of available blood is inherently small,
such as in newborn infants, without the need to prick heels or fingers
to extract blood samples for further ex vivo analysis.
Second, the simple fabrication process allows redundancy in the number
of active sensors, providing reliable results and a small margin of
clinical errors.A large number of functional microneedle elements
also allows the
multiplexed detection of various protein biomarkers in a single-prick.
Each needle can be readily modified with a different antibody or bioreceptor,
as illustrated in Figure a. Depending on the multiplexing level required, many antibodies
can be modified upon a single microneedle element. This allows multiple
biomarkers to be detected using a single-prick single-sensor microneedles-based
platform. Results from a multiplexed experiment are shown in Figure f,g, where one needle
out of a microneedle array has been modified with a PSA-specific antibody
(αPSA) and the adjacent needle was modified with a cTnI-specific
antibody (αcTnI). Both needles were exposed to varying concentrations
of PSA and cTnI. The needle modified with αPSA showed a clear
linear response to PSA, while the needle modified with αcTnI
showed no meaningful response, Figure f, and when exposed to cTnI concentrations both the
opposite response was exhibited by both needles, Figure g. An additional response curve
to cTnI in blood could be found in Figure S9.The response from the sensing microneedle array is shown
to be
highly accurate and reliable, Figure h, making it a potential candidate as a future POC
diagnostic tool. Figure S10, which is derived
from Figure h, shows
the variation between each needle. Additionally, measurements of PSA-spiked
serum and buffer by the same device produce near-identical curves, Figure S11. Therefore, the microneedles arrays
are highly reliable and produce an extremely reproducible protein
response. The difference between curves of different dies is expected
to diminish with mass-production and process scale-up.Figure depicts
a laboratory-scale 3D-printed prototype for the real-world application
of the microneedle-based sensing platform for the finger-prick blood
extraction-free intradermal protein biomarkers detection. The 3D-printed
device allows for the subject to safely and comfortably prick his
own finger, followed by the performance of the rapid and straightforward
ex-dermal dissociation-based detection and quantification of the protein
biomarkers of interest.
Figure 6
Laboratory-scale 3D-printed mount. (a) Illustration
of the mount
that enables the microneedle-based sensor operation. The mount chip
is held for the user to prick his finger using the microneedles, followed
by capping of the mount and consecutive washing in the appropriate
buffer solution. (b) Optical images show the 3D-printed mount and
the laboratory-scale system. (c) Optical image illustrating finger
pricking using the 3D-printed mount.
Laboratory-scale 3D-printed mount. (a) Illustration
of the mount
that enables the microneedle-based sensor operation. The mount chip
is held for the user to prick his finger using the microneedles, followed
by capping of the mount and consecutive washing in the appropriate
buffer solution. (b) Optical images show the 3D-printed mount and
the laboratory-scale system. (c) Optical image illustrating finger
pricking using the 3D-printed mount.The presented blood extraction-free microneedle
sensing platform
provides an enormous conceptual leap in the field of medical diagnosis
in general and POC medical diagnosis in particular. These fields are
currently dominated by time-consuming invasive and extensive high-volume
blood extraction and manipulation steps, performed mainly by professional
medical staff at centralized facilities. Our presented diagnosis paradigm,
based on the application of microneedle-embedded chemically modified
nanosensors array devices, allows the simultaneous intradermal penetration
and in-skin capillary blood-based biomarkers quantitative
sampling and detection. This ultimate POC platform combines prominently
advantageous attributes such as minimal invasiveness, not requiring
a blood sample, manipulation-free requirements for samples, clinically
relevant high sensitivity and specificity, sensing accuracy, rapid
detection turnover of under 3 min, and multiplexing capabilities for
the detection of multiple protein biomarkers based on a single-prick
single-chip direct approach.
Conclusions
We have introduced a microneedle-embedded
nano electrical sensors
array platform for the intradermal, minimally invasive, and blood
extraction-free platform for the clinical POC multiplexed detection
of proteins biomarkers. This proposed diagnosis paradigm requires
no extraction and ex-body manipulation procedures of large-volume
venous blood samples, which is currently ordinary in all diagnostic
tests. Our miniature on-chip platform allows the direct intradermal
probing of the prick-triggered capillary blood ’pool’
formed by the microneedle in the puncture site, only a few hundreds
of nanoliters in volume, and the concomitant in-skin quantitative capturing of the protein biomarkers of interest, followed
by the microneedle removal and ex vivo biomarkers
levels quantification. The microneedle length required to effectively
and smoothly breach the skin layers down to the required capillary
depth was experimentally determined as ≥1 mm, with a nearly
100% success rate of reaching blood capillaries’ required depth
after each insertion event. Also, an approach for the physical protection
of the molecular recognition layer was developed by creating a SU-8-based
open window structure. This micrometers-high SU-8 protecting window
allows the microneedles’ skin penetration without the “wiping
off” effect of the antibody recognition layer on the active
sensing area. Still, this open window lets the fast and complete wetting
of the sensing area when surrounded by the pricking-triggered capillary
blood “pool”, thus allowing the free in-skin interaction of the embedded nanodevices sensing array with the surrounding
blood sample. The microneedles’ array has shown a detection
sensitivity in the sub-pM range and has been preliminary applied clinically
for the intradermal direct in vivo blood extraction-free
detection of PSA on healthy human volunteers. These detection results
directly correlate with values measured from venous blood extracted
samples by gold-standard ELISA analysis. Furthermore, the top-down
process presented in this work, based on common fabrication techniques,
allows multiple vital advantages, such as high device redundancy for
reliable results, ease of integration with future drug delivery applications,
scalable and cost-effective process, and, most importantly, multiplex
detection of multiple biomarkers in a single-prick single-chip device.
We believe our absolute POC diagnostics paradigm method could in the
future eliminate the need for currently well-established venous blood
extraction and sample manipulation-based clinical approaches for disease
diagnosis.
Methods
Materials and Chemicals
For this investigation, the
following materials and chemicals were obtained: an 8-in. SOI wafer
(Silicon Valley Microelectronics), acetone (9005-68, J.T. Baker),
isopropanol (9079-05, J.T. Baker), deionized water (18 MΩ·cm),
phosphate buffer (PB, 10 mM, pH 8.5), phosphate buffer (SB, 155 μM,
∼ pH 8.0), phosphate buffer saline (PBS, 10 mM, pH 7.4, with
2.7 mM KCl and 137 mM NaCl), glutaraldehyde solution (50 wt % in H2O, G7651, Sigma-Aldrich), (3-aminopropyl)-dimethyl-ethoxysilane
(APDMES, SIA0603.0–5g, Gelest), human PSA protein (ABCAM, ab78528)
PSA antibody (ABCAM, ab75684), cardiac troponin I protein (cTnI, ABCAM,
ab207624), cardiac troponin I antibody (ABCAM, ab38210), GFP protein
(ABCAM, ab84191), GFP antibody (ABCAM, ab1218) Alexa-488 NHS (A20000,
Thermo Fisher), PDMS (Sylgard), LOR5A (Kayaku Advanced Materials),
LOR7A (Kayaku Advanced Materials), LOR10A (Kayaku Advanced Materials),
SU8 2000.5 (Kayaku Advanced Materials), SU8 3005 (Kayaku Advanced
Materials), AZ1505 (MicroChemicals), AZ4562 (MicroChemicals), PMGI
SF15 (Kayaku Advanced Materials), buffered oxide etchant 6:1 (BOE,
Transene), gold etchant TFE (Transene), chromium cermet etchant (Transene), N-methyl-2-pyrrolidone (NMP, J.T. Baker), hydrogen peroxide
(30% in water, Bio-Lab), sulfuric acid (95–98%, Bio-Lab), methyl
methacrylate (MMA, EL6, Kayaku Advanced Materials), poly(methyl methacrylate)
(PMMA, A4, Kayaku Advanced Materials), AZ726 (MicroChemicals), methyl
isobutyl ketone (MIBK 1:3, Kayaku Advanced Materials), hydrofluoric
acid (48%, Sigma-Aldrich), tetramethylammonium hydroxide (10% in water,
Sigma-Aldrich), AZ400 K (MicroChemicals).
Nanowire Fabrication
First, 30 mm × 30 mm SOI
dies were thoroughly cleaned using acetone, IPA, and DIW and were
dipped in a 1:3 H2O2:H2SO4 piranha solution for 2 min. Following a 2 min 60W O2 plasma,
the dies were dipped in a 6:1 BOE to remove the native oxide and were
thoroughly washed with DIW. LOR5A and AZ1505 were spin-coated on the
dies using 500 rpm for 5 s, followed by 4000 rpm for 45 s. The dies
were baked at 180 °C for 5 min following the LOR5A spin coat
and were baked at 100 °C for 1 min following the AZ1505 spin
coat process. E-beam markers were exposed using UV lithography and
were developed for 1 min in AZ726 (MicroChemicals), followed by a
thorough wash in DIW. The markers were evaporated with 5 nm Cr and
30 nm Au and put in NMP to resist lift-off.Once done, the dies
were coated with MMA EL6 and PMMA A4, using 500 rpm for 3 s and 5000
rpm for 60 s. The die was baked at 180 °C for 3 and 1 min, respectively.
E-beam lithography (Raith 150) with 10 kV was used to expose the PMMA
layer, with the wires exposed using 10 μm aperture and 140 μC/cm2 and the pads exposed using 60 μm aperture and 120 μC/cm2. Development took place using 1:3 MIBK (methyl isobutyl ketone):
IPA solution for 1 min, followed by a thorough rinse in IPA. The exposed
wire pattern was evaporated with 5 nm Cr and 30 nm Au and was placed
in acetone for lift-off.The dies were cleaned in IPA and DIW
and were put in 60W O2 plasma for 2 min. The native oxide
was removed using a 1:9
diluted 48% HF solution for 10 s and was directly placed, without
rinsing, in a 10% TMAH solution heated to 75 °C. After approximately
30 s, the die changed its color, indicating the dissolution of the
device layer, and was rinsed in DIW. The Au and Cr were removed using
appropriate etchants for 2 min each while thoroughly washing in DIW
in between etchants.
Electrodes’ Fabrication
The dies were spin-coated
with LOR5A and AZ1505 as described above. Outer pads were exposed
and developed in AZ726 for 1 min, followed by a thorough rinse in
DIW. The outer pads were evaporated with 5 nm Cr and 60 nm Au and
were placed in warm NMP for lift-off. The dies were then washed in
acetone, IPA, and DIW and were placed in an ozone generator for 3
min. LOR7A and AZ1505 were spin-coated as described above. Inner pads
were exposed and developed as the outer pads. The inner pads were
evaporated using 10 nm Ti, 90 nm Pd, and 5 nm Ti and were placed for
the passivation process prior to lift off. The passivation took place
via approximately 80 nm SiO2 deposition using 200W ICP,
30W Bias, 95 mTorr, 80 °C, 140 sccm N2O, and 14 sccm
2% SiH4/Ar for 20 min in a plasma-enhanced chemical vapor
deposition (PECVD, Axis Benchmark 800 ICP) system. The dies were then
placed in warm NMP for lift-off. Once the process was done, rapid
thermal processing (RTP, AnnealSys) was used to create ohmic contacts
between the Ti/Si interface. The dies were heated to 450 °C in
5 s and remained for an extra 20 s in a forming gas environment (2%
H2 in N2).
Crevice Fabrication and Thinning of Needles
In order
to create the opening for the sensing area, SU8 was used. SU8 2000.5
was spin-coated using 300 rpm for 5 s, following 3000 rpm for 30 s.
The die was baked for 5 min at 95 °C. After UV exposure, the
dies were baked for 1 min at 95 °C. The dies were developed in
a designated SU8 developer for 1 min, followed by an IPA rinse. Consecutively,
SU8 3005 was coated using the same program as above. The die was baked
for 1 min at 65 °C, following 10 min at 95 °C. After exposure,
the dies were baked for 4 min at 95 °C and developed as above.LOR10A was dispensed to protect the nanowire region from the dicing
operation, as the dicing is done on the backside. The dies were thinned
using automatic dicer (Disco DAD 3350) via lowering the saw up to
a depth that leaves approximately 250 μm thickness (around 500
μm) and moving laterally in steps smaller than the total width
of the saw (e.g., if the saw was 200 μm thick, the steps were
set to 90 μm). Once done, LOR10A was removed in NMP.
Formation of Needles
Prior to the deep silicon etching
step, the BOX layer was removed. PMGI SF-15 was spin-coated at 500
rpm for 5 s and 1500 rpm for 45 s and was baked at 180 °C for
5 min. AZ4562 photoresist was spin-coated using the same parameters
and baked at 115 °C for 1.5 min. The etch mask was exposed five
consecutive times with 25 s stops in between. The dies were placed
in DIW for 4 min following the exposure and developed in 1:2.5 diluted
AZ400 K developer for 4 min. The oxide layer was removed using reactive
ion etching (RIE, Oerlikon) using 200W forward bias, 40 sccm CF4, 5 sccm O2, and 6 sccm Ar for 23 min at room temperature.
The complete removal of the oxide was determined via an interferometer.
The resists were removed in NMP.In order to protect the fabricated
SiNW from possible ion damage, the thick resist was applied before
deep reactive ion etching (DRIE, Deep RIE Versaline DSE). PMGI SF-15
was spin-coated, as discussed above. Two layers of AZ4562 were spin-coated
using the same spin parameters as above. The first layer was baked
at 90 °C for 3 min, and the second layer was baked at 115 °C
for 2.5 min. Once the etch mask was exposed, as discussed above, the
dies were placed in DIW for 5 min and were developed in 1:2.5 diluted
AZ400 K developer for 8 min. After development, the dies were subjected
to flood exposure of 400 mJ/cm2. The dies were placed in
the DRIE using heatsink grease (Dow Corning 340 Heat Sink Compound
Grease) and were etched using a 3-step process for 300 loops. Once
done, the dies were diced and separated into individual microneedle
array sensors, and the remaining resists were removed in warm NMP.
Antibody Modification
Prior to the modification process,
the microneedle array sensor was mounted on a 3D-printed holder (Form3
printer, Fromlabs) and was wire bonded to a flexible PCB. The mounted
sensor was then placed in the ozone generator for 7 min to generate
silanol groups on the SiNWs surface. The mounted array was placed
in 200 μL of 95% APDMES solution for 1 h in an Ar-filled glovebox.
The sensor was then placed in 150 μL of toluene to wash the
remaining APDMES solution and was thoroughly rinsed with IPA and placed
at 100 °C for 30 min to evaporate the remaining solvents completely.Phosphate buffer (PB) was prepared by mixing 10 mM potassium phosphate
monobasic solution and 10 mM potassium phosphate dibasic solution
to pH 8.5. Then 1 ml of a 50% Glutaraldehyde solution (Sigma-Aldrich)
was diluted in 5 mL of prepared PB with 50 mg of added NaCNBH3. The microneedle array sensor was dipped in 200 μL
of the above solution for 1 h and was consecutively rinsed with DIW,
IPA, and DIW again.Antihuman PSA in 0.030 mg/mL concentration
was used for the modification.
The antibody was first centrifuged in a desalting column to clean
and purify the protein properly. The anti-PSA was diluted to 30 μg/mL
for the modification using a prepared solution of 5 mL of PB and 50
mg of NaCNBH3. The microneedle array was dipped in 200
μL of the antibody solution and was placed at 4 °C overnight.Blocking solution was prepared using 150 μL of ethanolamine
in 20 mL PB with 50 mg NaCNBH3, which was titrated back
to pH 8.5 using HCl. Then 200 μL of the above solution was used
for 2 h to block all unreacted aldehyde groups. The microneedle array
was then thoroughly washed in PB by placing the sensor in a 200 μL
solution of clean PB for 10 min. This process was repeated a total
of three times before sensing experiments.Anti-GFP and anti-cTnI
were modified using the same method and
the same concentrations to verify the viability of the modification
properly.
Array Cleaning Prior to Skin Insertion
The microneedle
arrays were washed well in autoclaved PB; the insertion area was sterilized
by rubbing ethanol.
In Vitro and In Vivo Electrical
Measurements
Electrical measurements were performed by varying
the gate voltage in order to choose the gate voltage in which the
most significant change in current was measured as a factor of concentration
changes. The gate voltage was varied between −0.7 V and 0.3
V, and the source-drain voltage was constantly applied using 0.2 V.
The in vitro measurements took place either in 1×
phosphate buffer saline (PBS) or as-received bovine serum. The microneedle
array sensor was placed inside an Eppendorf containing a 2 mL solution
of either unspiked (“clean”) or PSA-spiked solutions
in different concentrations until stabilization (approximately 8 min).
The desorption took place in a 5% EG solution in sensing buffer (phosphate
buffer diluted by a factor of 100) using 2 mL solutions as well, until
stabilization (approximately 10 min). In vivo measurements
in capillary blood were performed by full penetration of the microneedle
array into the volunteer’s skin (arm or fingertip), with the
microneedle probing allowed to occur for 1 min before final microneedle
removal, followed by the final quantitative sensing analysis.
Material Characterization
XPS measurements were performed
using the 5600 Multi-Technique System (PHI, U.S.A.). SEM images were
taken using Environmental SEM (Quanta 200FEG, Jeol Co.).
ELISA Measurements
ELISA kit to quantify total PSA
was purchased from ABCAM (ab113327). The measurement protocol is as
follows:A 96-well plate coated with an antibody specific for
Human PSA was used. Next, 100 μL of standard solutions and samples
(see elaborated below) were pipetted into the wells. The wells were
washed thoroughly, and a 100 μL of biotinylated secondary antibody
to human PSA was added. The wells were washed thoroughly again; then
100 μL of HRP-conjugated streptavidin was added to each well.
The wells were again washed, and 100 μL of TMB substrate solution
was added, developing a blue color in proportion to the amount of
PSA bound. Adding 50 μL of Stop Solution changes the color from
blue to yellow, and the intensity of the color is measured at 450
nm.Approximately 5 mL of venous blood was extracted and centrifuged
to coagulate and remove the red blood cells. The test was performed
directly on the separated plasma fluid remaining after 2-fold dilution
in Assay Diluent B provided in the kit.A standard PSA solution
of 50 000 pg/mL was diluted in Assay
Diluent B to perform calibration curve measurements of 10.24–2500
pg/mL (see Figure S8).
Authors: Simon R Corrie; Germain J P Fernando; Michael L Crichton; Marion E G Brunck; Chris D Anderson; Mark A F Kendall Journal: Lab Chip Date: 2010-08-31 Impact factor: 6.799
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