| Literature DB >> 31616031 |
Pei-Wen Yen1, Shiang-Chi Lin2, Yi-Chun Huang1, Yu-Jie Huang2, Yi-Chung Tung3, Shey-Shi Lu2, Chih-Ting Lin4,5.
Abstract
Microfluidic pump is an essential component in lab-on-chip applications. It is of importance to develop an active microfluidic pump with low-power and low-cost characteristics for portable and miniaturized diagnostic systems. Taking advantages of CMOS technologies, in this work, we report a low-power microfluidic pump based on travelling-wave electroosmosis (TWEO). Utilizing an integrated driving circuit, this monolithic CMOS microfluidic pump can be operated at 1.5 V driving voltage with a power consumption of 1.74 mW. The integrated driving circuit consist of a resistor-capacitor (RC) oscillator, a 90-degrees phase-shift square wave generator, and buffer amplifiers. Moreover, capabilities of the developed CMOS TWEO pump to drive diluted human serum are characterized. The flow rate of diluted human serum with dilution ratio of 1:1000 can achieve 51 μm/s. This is the first time demonstrating an in-situ CMOS-based microfluidic pump to drive the clinical diluted serum sample. As a consequence, this work demonstrates an essential component of CMOS biotechnologies for potential applications of portable in vitro diagnosis (IVD) systems.Entities:
Year: 2019 PMID: 31616031 PMCID: PMC6794323 DOI: 10.1038/s41598-019-51464-7
Source DB: PubMed Journal: Sci Rep ISSN: 2045-2322 Impact factor: 4.379
Figure 1A schematic of the developed monolithically integrated CMOS TWEO microfluidic chip, and the inset is the enlarged schematic of pumping region.
Figure 2The numerical simulation results of the developed CMOS TWEO microfluidic pump. (a) The distribution of the TWEO flow velocity; (b) The TWEO pumping velocity as a function of the applied frequency with different driving waveforms.
Figure 3The travelling-wave built-in driving circuit. (a) The schematic architecture of implemented travelling-wave built-in driving circuit. (b) The tuned clock frequency of built-in ring oscillator clock is operated at 24.08 kHz. (c) The experimental output of 90-degreeds phase shift waveform measured under designed clock frequency. Δx and Δy are represented a period and amplitude of the output frequency of channel 1 with phase term is 0°, 1/Δx is measured as 2.985 kHz and Δy is the 1.5 V peak to peak voltage of the on-chip circuit driving output.
Figure 4(a) The snapshot of the monolithically integrated CMOS TWEO microfluidic chip with bright field illumination. (b) The on-chip fluid pumping of diluted serum samples in time sequence.
The summary table illustrates the measured osmotic flow velocity and conductivity of diluted serums with different dilution ratio.
| Serum Dilution Ratio | 1000 | 100 | 10 |
|---|---|---|---|
Conductance (mS/m) | 1.6 ± 0.1 | 16.7 ± 0.2 | 163.5 ± 1 |
Flow Velocity (μm/s) @2.5 kHz, Vpp = 1.5 V | 51.75 | 9.96 | ~0 |
Figure 5(a) The schematic diagram of the contents layers of 0.35 μm CMOS Bio-MEMS process. In this schematic, metal layers (M1-M4) are the layers for electronic circuit layout routing, Via1-Via3 are the interconnection between adjacent metal layers, and inter-metal dielectric layers (IMD1-IMD3) are the dielectric layers used to electrically insulate interconnect lines. (b) The images of the fabricated chip and the SEM picture of the fabricated electrodes and interconnections array. The yellow dash square represents the double –size width designed of contact points between Ti/Au and M4 layers.