| Literature DB >> 28772471 |
Handy Chandra1, Spencer W Allen2, Shane W Oberloier3, Nupur Bihari4, Jephias Gwamuri5, Joshua M Pearce6,7.
Abstract
Scientists have begun using self-replicating rapid prototyper (RepRap) 3-D printers to manufacture open source digital designs of scientific equipment. This approach is refined here to develop a novel instrument capable of performing automated large-area four-point probe measurements. The designs for conversion of a RepRap 3-D printer to a 2-D open source four-point probe (OS4PP) measurement device are detailed for the mechanical and electrical systems. Free and open source software and firmware are developed to operate the tool. The OS4PP was validated against a wide range of discrete resistors and indium tin oxide (ITO) samples of different thicknesses both pre- and post-annealing. The OS4PP was then compared to two commercial proprietary systems. Results of resistors from 10 to 1 MΩ show errors of less than 1% for the OS4PP. The 3-D mapping of sheet resistance of ITO samples successfully demonstrated the automated capability to measure non-uniformities in large-area samples. The results indicate that all measured values are within the same order of magnitude when compared to two proprietary measurement systems. In conclusion, the OS4PP system, which costs less than 70% of manual proprietary systems, is comparable electrically while offering automated 100 micron positional accuracy for measuring sheet resistance over larger areas.Entities:
Keywords: 3-D platform; ITO; TCO; conductivity; four-point probe; indium tin oxide; libre hardware; open source hardware; sheet resistance; transparent conducting oxide
Year: 2017 PMID: 28772471 PMCID: PMC5459207 DOI: 10.3390/ma10020110
Source DB: PubMed Journal: Materials (Basel) ISSN: 1996-1944 Impact factor: 3.623
Figure 1Measurement process flowchart.
Figure 2Printed four-point probe holder showing mounted four-point probe head.
Figure 3OpenSCAD images showing: (a) Probe holder top part; (b) Carriage part x-axis mount.
Figure 43-D printer bed fixed with springs and a pair of printed specimen clips (white).
Figure 5Current source circuit.
Figure 6Parasitic resistance and leakage of current source circuit.
Figure 7Instrumentation amplifier circuit.
Figure 8Assembled open source printed circuit board for four-point probe measurements.
Figure 9The graphical user interface (GUI) for open source four-point probe (OS4PP) software.
Figure 10Discrete resistor measurement circuit.
Figure 11Modified 3-D printer with custom measurement circuit for OS4PP measurements.
Figure 12Comparison of measurement results on discrete resistor.
Measurement results of several indium tin oxide (ITO) samples on different equipment.
| Sample | OS4PP | Jandel | Keithley | |||
|---|---|---|---|---|---|---|
| Rsh (Ω/sq) | Std Dev | Rsh (Ω/sq) | Std Dev | Rsh (Ω/sq) | Std Dev | |
| R. Reference Sample | 13.308 | 0.49 | 13.09 | 0.85 | 13.304 | 0.27 |
| A. 50 nm ITO annealed 10 min | 171.86 | 11.79 | 182.36 | 15.21 | 176.08 | 8.4 |
| B. 50 nm ITO annealed 20 min | 110.76 | 7.33 | 113.42 | 9.18 | 111.8 | 5.83 |
| C. 50 nm ITO annealed 30 min | 142.84 | 27.76 | 177.52 | 42.79 | 159.07 | 15.9 |
Figure 13Results of automated sheet resistance measurement (Ω/sq) using OS4PP: (a) Reference sample; (b) 50 nm ITO annealed 10 min; (c) 50 nm ITO annealed 20 min; (d) 50 nm ITO annealed 30 min.
Comparison of commercial proprietary machine with OS4PP.
| Component | Commercial Machine | Open-Source OS4PP |
|---|---|---|
| Probe | Jandel macor probe head | Jandel cylindrical four-point probe head |
| Measurement Unit | RM3 test unit | Custom measurement circuit |
| Mounting Stand | Lucas labs S–302−4 | RepRap Prusa Mendel i1 with custom probe holder |
| Source | Closed source | Reprap project + osf.io |
| Cost | $1600 probe head + $3200 RM3 + $2500 S–302−4 = $7300 | $1600 probe head + $130 circuit + $250 RepRap = $1980 |
| Maximum Wafer Size | 4” circular | 8” × 8” square |
| Accuracy | 0.3% (high sensitivity mode) | 1% (<1 MΩ sheet resistances) |
| Positioning Resolution | Manual sample placement by hand | 100 microns X-Y accuracy |
| Multiple Measurement | Manual | Automatic |