Direct generation of ion beam images with a two-dimensional charge injection device.

The use of a two-dimensional charge injection device (CID) to directly image the spatial profile of impingent positively charged ions is described. By this approach, no prior conversion from an ion beam to a photon image is required. Because of the positive response of the device to plasma photons, ions that emanated from the radiofrequency glow discharge source were diverted around a photon stop and focused onto the CID. The resultant ion images were digitized via an external image processor and corrected for dark current contributions. Two-dimensional ion images and single pixel line profiles are presented.