Literature DB >> 20070116

Advances in patterning materials for 193 nm immersion lithography.

Daniel P Sanders1.   

Abstract

Year:  2010        PMID： 20070116     DOI： 10.1021/cr900244n

Source DB:  PubMed          Journal:  Chem Rev        ISSN： 0009-2665            Impact factor:   60.622


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  19 in total

1.  Drops on soft surfaces learn the hard way.

Authors:  Todd M Squires
Journal:  Proc Natl Acad Sci U S A       Date:  2013-07-19       Impact factor: 11.205

Review 2.  No time to lose--high throughput screening to assess nanomaterial safety.

Authors:  R Damoiseaux; S George; M Li; S Pokhrel; Z Ji; B France; T Xia; E Suarez; R Rallo; L Mädler; Y Cohen; E M V Hoek; A Nel
Journal:  Nanoscale       Date:  2011-02-07       Impact factor: 7.790

3.  Lithography Technology for Micro- and Nanofabrication.

Authors:  Dahee Baek; Sang Hun Lee; Bong-Hyun Jun; Seung Hwan Lee
Journal:  Adv Exp Med Biol       Date:  2021       Impact factor: 2.622

4.  Advancing X-ray scattering metrology using inverse genetic algorithms.

Authors:  Adam F Hannon; Daniel F Sunday; Donald Windover; R Joseph Kline
Journal:  J Micro Nanolithogr MEMS MOEMS       Date:  2016-07-07       Impact factor: 1.220

Review 5.  Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective.

Authors:  Eleanor Mullen; Michael A Morris
Journal:  Nanomaterials (Basel)       Date:  2021-04-22       Impact factor: 5.076

6.  Contact Photolithography at Sub-Micrometer Scale Using a Soft Photomask.

Authors:  Chun-Ying Wu; Heng Hsieh; Yung-Chun Lee
Journal:  Micromachines (Basel)       Date:  2019-08-18       Impact factor: 2.891

7.  Polymer Composites with 0.98 Transparencies and Small Optical Energy Band Gap Using a Promising Green Methodology: Structural and Optical Properties.

Authors:  Muaffaq M Nofal; Shujahadeen B Aziz; Jihad M Hadi; Wrya O Karim; Elham M A Dannoun; Ahang M Hussein; Sarkawt A Hussen
Journal:  Polymers (Basel)       Date:  2021-05-19       Impact factor: 4.329

8.  Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist.

Authors:  Subrata Ghosh; V S V Satyanarayana; Bulti Pramanick; Satinder K Sharma; Chullikkattil P Pradeep; Israel Morales-Reyes; Nikola Batina; Kenneth E Gonsalves
Journal:  Sci Rep       Date:  2016-03-15       Impact factor: 4.379

9.  Highly tunable refractive index visible-light metasurface from block copolymer self-assembly.

Authors:  Ju Young Kim; Hyowook Kim; Bong Hoon Kim; Taeyong Chang; Joonwon Lim; Hyeong Min Jin; Jeong Ho Mun; Young Joo Choi; Kyungjae Chung; Jonghwa Shin; Shanhui Fan; Sang Ouk Kim
Journal:  Nat Commun       Date:  2016-09-29       Impact factor: 14.919

10.  Photochemical Fragmentation of Irgacure PAG 103.

Authors:  M John Plater; William T A Harrison; Andrea Raab
Journal:  ACS Omega       Date:  2019-11-12
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