| Literature DB >> 15601102 |
H F Wilson1, O Warschkow, N A Marks, S R Schofield, N J Curson, P V Smith, M W Radny, D R McKenzie, M Y Simmons.
Abstract
Density functional calculations are performed to identify features observed in STM experiments after phosphine (PH3) dosing of the Si(001) surface. On the basis of a comprehensive survey of possible structures, energetics, and simulated STM images, three prominent STM features are assigned to structures containing surface bound PH2, PH, and P, respectively. Collectively, the assigned features outline for the first time a detailed mechanism of PH3 dissociation and P incorporation on Si(001).Entities:
Year: 2004 PMID： 15601102 DOI： 10.1103/PhysRevLett.93.226102
Source DB: PubMed Journal: Phys Rev Lett ISSN： 0031-9007 Impact factor: 9.161