Literature DB >> 34131513

Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy.

Min-Ho Rim, Emil Agocs, Ronald Dixson1, Prem Kavuri1, András E Vladár1, Ravi Kiran Attota1.   

Abstract

This paper reports high-throughput, light-based, through-focus scanning optical microscopy (TSOM) for detecting industrially relevant sub-50 nm tall nanoscale contaminants. Measurement parameter optimization to maximize the TSOM signal using optical simulations made it possible to detect the nanoscale contaminants. Atomic force and scanning electron microscopies were used as reference methods for comparison.

Year:  2020        PMID： 34131513      PMCID： PMC8201524          DOI： 10.1116/6.0000352

Source DB:  PubMed          Journal:  J Vac Sci Technol B Nanotechnol Microelectron        ISSN： 2166-2746


  17 in total

1.  Interferometric optical detection and tracking of very small gold nanoparticles at a water-glass interface.

Authors:  Volker Jacobsen; Patrick Stoller; Christian Brunner; Viola Vogel; Vahid Sandoghdar
Journal:  Opt Express       Date:  2006-01-09       Impact factor: 3.894

2.  Does your SEM really tell the truth? How would you know? Part 2.

Authors:  Michael T Postek; András E Vladár; Kavuri P Purushotham
Journal:  Scanning       Date:  2013-10-28       Impact factor: 1.932

3.  Optical signatures of small nanoparticles in a conventional microscope.

Authors:  Eann A Patterson; Maurice P Whelan
Journal:  Small       Date:  2008-10       Impact factor: 13.281

4.  Optimizing noise for defect analysis with through-focus scanning optical microscopy.

Authors:  Ravikiran Attota; John Kramar
Journal:  Proc SPIE Int Soc Opt Eng       Date:  2016-03-08

5.  Motion-free all optical inspection system for nanoscale topology control.

Authors:  Maxim Ryabko; Sergey Koptyaev; Alexander Shcherbakov; Alexey Lantsov; S Y Oh
Journal:  Opt Express       Date:  2014-06-16       Impact factor: 3.894

6.  Parameter optimization for through-focus scanning optical microscopy.

Authors:  Ravi Kiran Attota; Hyeonggon Kang
Journal:  Opt Express       Date:  2016-06-27       Impact factor: 3.894

7.  Step beyond Kohler illumination analysis for far-field quantitative imaging: angular illumination asymmetry (ANILAS) maps.

Authors:  Ravi Kiran Attota
Journal:  Opt Express       Date:  2016-10-03       Impact factor: 3.894

8.  Through-focus scanning optical microscopy with the Fourier modal method.

Authors:  Shin-Woong Park; Gyunam Park; Youngbaek Kim; Joong Hwee Cho; Junho Lee; Hwi Kim
Journal:  Opt Express       Date:  2018-04-30       Impact factor: 3.894

9.  High-resolution interference microscopy with spectral resolution for the characterization of individual particles and self-assembled meta-atoms.

Authors:  Michail Symeonidis; Radius N S Suryadharma; Rossella Grillo; Andreas Vetter; Carsten Rockstuhl; Thomas Bürgi; Toralf Scharf
Journal:  Opt Express       Date:  2019-07-22       Impact factor: 3.894

10.  High-throughput 3D tracking of bacteria on a standard phase contrast microscope.

Authors:  K M Taute; S Gude; S J Tans; T S Shimizu
Journal:  Nat Commun       Date:  2015-11-02       Impact factor: 14.919
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