Literature DB >> 31510185

High-resolution interference microscopy with spectral resolution for the characterization of individual particles and self-assembled meta-atoms.

Michail Symeonidis, Radius N S Suryadharma, Rossella Grillo, Andreas Vetter, Carsten Rockstuhl, Thomas Bürgi, Toralf Scharf.   

Abstract

We apply a high-resolution interference microscope with spectral resolution to investigate the scattering response of isolated meta-atoms in real space. The final meta-atoms consist of core-shell clusters that are fabricated using a bottom-up approach. The meta-atoms are investigated with an increasing complexity. We start by studying silica and gold spheres and conclude with the investigation of the meta-atom, which consists of a silica core sphere onto which gold nanospheres are attached. Numerical simulations entirely verify the measured data. The measuring process involves recording the intensity and phase of the total field emerging from the scattering process of an incident light at the particle in the transmitted half-space with spectral and high spatial resolution. We show that spectrally resolved high-resolution interference microscopy can be used to differentiate between nanoparticles and characterize single meta-atoms, something that is rarely accomplished.

Entities:  

Year:  2019        PMID: 31510185     DOI: 10.1364/OE.27.020990

Source DB:  PubMed          Journal:  Opt Express        ISSN: 1094-4087            Impact factor:   3.894


  1 in total

1.  Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy.

Authors:  Min-Ho Rim; Emil Agocs; Ronald Dixson; Prem Kavuri; András E Vladár; Ravi Kiran Attota
Journal:  J Vac Sci Technol B Nanotechnol Microelectron       Date:  2020
  1 in total

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