Literature DB >> 33920933

The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring.

Wenguo Chen1, Rui Wang1, Huiying Wang1, Shulei Sun2.   

Abstract

An omnidirectional inertial switch with rectangular spring is proposed in this paper, and the prototype has been fabricated by surface micromachining technology. To evaluate the threshold consistency and stability of omnidirectional inertia switch, the stiffness of rectangular suspension springs is analyzed. The simulation result shows that the coupling stiffness of the rectangular spring suspension system in the non-sensitive direction is a little more than that in the sensitive direction, which indicated that the omnidirectional switching system's stability is reinforced, attributed to the design of rectangular springs. The dynamic response simulation shows that the threshold of the omnidirectional inertial switch using the rectangular suspension spring has high consistency in the horizontal direction. The prototype of an inertial switch is fabricated and tested successfully. The testing results indicate even threshold distribution in the horizontal direction. The threshold acceleration of the designed inertial switch is about 58 g in the X direction and 37 g in the Z direction; the contact time is about 18 μs.

Entities:  

Keywords:  MEMS; contact time; inertial micro-switch; rectangular suspension spring; surface micromachining

Year:  2021        PMID: 33920933     DOI: 10.3390/mi12040440

Source DB:  PubMed          Journal:  Micromachines (Basel)        ISSN: 2072-666X            Impact factor:   2.891


  1 in total

Review 1.  Research Progress of MEMS Inertial Switches.

Authors:  Min Liu; Xinyang Wu; Yanxu Niu; Haotian Yang; Yingmin Zhu; Weidong Wang
Journal:  Micromachines (Basel)       Date:  2022-02-24       Impact factor: 2.891

  1 in total

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