Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS.

Online-laser ablation of solids in liquid (online-LASIL) coupled with ICP-MS detection was used as a new sampling strategy for the analysis of complex metal oxide (CMO) thin films. The in-house built and optimized online-LASIL ablation cell provides the unique possibility to correlate the signal intensities with the spatial origin of the signal at the sample. For that purpose a particle transport with as little particle dispersion as possible is crucial. To demonstrate the 2D imaging capability of this technique, geometrically structured samples with varying composition were prepared by pulsed laser deposition (PLD) and ion beam etching procedures. These thin films with a thickness of 220 nm were spatially resolved analysed. As a result, 2D intensity maps obtained by online-LASIL can be reported for the first time. Additionally a new approach for simultaneous online quantification was developed by adopting the standard addition concept allowing to correct for instrumental drifts of long time measurements.