Alexander Dallinger1, Kirill Keller1, Harald Fitzek2,3, Francesco Greco1. 1. Institute of Solid State Physics, NAWI Graz, Graz University of Technology, Petersgasse 16, 8010 Graz, Austria. 2. Graz Centre for Electron Microscopy (ZFE), Steyrergasse 17, 8010 Graz, Austria. 3. Institute for Electron Microscopy and Nanoanalysis (FELMI), NAWI Graz, Graz University of Technology, Steyrergasse 17, 8010 Graz, Austria.
Abstract
The conversion of various polymer substrates into laser-induced graphene (LIG) with a CO2 laser in ambient condition is recently emerging as a simple method for obtaining patterned porous graphene conductors, with a myriad of applications in sensing, actuation, and energy. In this paper, a method is presented for embedding porous LIG (LIG-P) or LIG fibers (LIG-F) into a thin (about 50 μm) and soft medical grade polyurethane (MPU) providing excellent conformal adhesion on skin, stretchability, and maximum breathability to boost the development of various unperceivable monitoring systems on skin. The effect of varying laser fluence and geometry of the laser scribing on the LIG micro-nanostructure morphology and on the electrical and electromechanical properties of LIG/MPU composites is investigated. A peculiar and distinct behavior is observed for either LIG-P or LIG-F. Excellent stretchability without permanent impairment of conductive properties is revealed up to 100% strain and retained after hundreds of cycles of stretching tests. A distinct piezoresistive behavior, with an average gauge factor of 40, opens the way to various potential strain/pressure sensing applications. A novel method based on laser scribing is then introduced for providing vertical interconnect access (VIA) into LIG/MPU conformable epidermal sensors. Such VIA enables stable connections to an external measurement device, as this represents a typical weakness of many epidermal devices so far. Three examples of minimally invasive LIG/MPU epidermal sensing proof of concepts are presented: as electrodes for electromyographic recording on limb and as piezoresistive sensors for touch and respiration detection on skin. Long-term wearability and functioning up to several days and under repeated stretching tests is demonstrated.
The conversion of various polymer substrates into laser-induced graphene (LIG) with a CO2 laser in ambient condition is recently emerging as a simple method for obtaining patterned porous grapheneconductors, with a myriad of applications in sensing, actuation, and energy. In this paper, a method is presented for embedding porous LIG (LIG-P) or LIG fibers (LIG-F) into a thin (about 50 μm) and soft medical grade polyurethane (MPU) providing excellent conformal adhesion on skin, stretchability, and maximum breathability to boost the development of various unperceivable monitoring systems on skin. The effect of varying laser fluence and geometry of the laser scribing on the LIG micro-nanostructure morphology and on the electrical and electromechanical properties of LIG/MPU composites is investigated. A peculiar and distinct behavior is observed for either LIG-P or LIG-F. Excellent stretchability without permanent impairment of conductive properties is revealed up to 100% strain and retained after hundreds of cycles of stretching tests. A distinct piezoresistive behavior, with an average gauge factor of 40, opens the way to various potential strain/pressure sensing applications. A novel method based on laser scribing is then introduced for providing vertical interconnect access (VIA) into LIG/MPU conformable epidermal sensors. Such VIA enables stable connections to an external measurement device, as this represents a typicalweakness of many epidermal devices so far. Three examples of minimally invasive LIG/MPU epidermal sensing proof of concepts are presented: as electrodes for electromyographic recording on limb and as piezoresistive sensors for touch and respiration detection on skin. Long-term wearability and functioning up to several days and under repeated stretching tests is demonstrated.
The investigation of materials and processes for obtaining flexible
and stretchable conductors has a long history, driven by both scientific
curiosity and technological needs. Recently, it has been boosted by
the requirements of novel applications in the fields of flexible/stretchable
electronics, wearable sensors/devices, epidermal electronics, biointerfaces,
soft robotics, prosthetics, actuators, and energy harvesting devices.[1−6] In principle, an “optimal” stretchable conductor would
combine the mechanical properties of a typical elastomer material
(such assilicone or natural rubber) with the electrical properties
of a purely ohmic conductor (as a metal). While the combination of
these properties into a single material is very challenging if not
impossible, several attempts have been done to realize material systems
having at least some of the combined electrical/mechanical features:
low tensile modulus, purely elastic behavior up to high values of
tensile strain (typ. >20–100% or even more), minimal viscous
loss, high toughness, high resilience, low electrical resistivity,
minimal or predictable/repeatable change of electrical resistance
upon stretching, minimal/no fatigue, and aging under repeated mechanical
cycles. A variety of approaches have been investigated so far, including
conducting polymers and their composites with cross-linkable elastomers,[7,8] microfabricated serpentine structures of metals,[9] nanofiber/metal flakes composite embedded into a stretchable
polymer,[10,11] and surface microwrinkling of metal thin
films.[12−14] Their design can be set in order to accommodate a
certain preset stretching in the material without failure; however,
complex multistep fabrication procedure is often required. Moreover,
the introduction of large amounts of stiff or brittle conductive fillers
in the soft and stretchable matrix severely changes its mechanical
properties. Alternatively, creation of stretchable conductive nanocomposites
has been investigated by means of metal nanoparticle implantation
into elastomers. Both filtered cathodic vacuum arc metal ion implantation
of gold nanoparticles on PDMS[15] and supersonic
cluster beam implantation of neutralmetal nanoparticles onto ionogels[16] have been demonstrated and applied to fabrication
of actuators for soft robotics. With the aim to avoid the use of expensive
cleanroom techniques or exotic materials and to reduce the overall
fabrication complexity, various strategies for printing of metal nanoparticles
or other inorganic/organic conductors onto elastomers have been proposed.[17−19] Printing is often followed by heat or flash lamp annealing to attain
sintering and thus higher conductivity of printed conductors. Printing
of carbon nanomaterials, such asgraphene sheets and carbon nanotubes,
is one of the most promising strategies. Nevertheless, complex chemical
processing is needed, for example, for graphene exfoliation and for
attaining stable, highly conductive dispersions. In 2014, a novel
method was reported for the conversion of commercialpolymers into
conductive porous graphene by direct laser scribing in ambient atmosphere
with a commercialCO2 infrared laser, creating the so-called
laser-induced graphene (LIG).[20,21] LIG created by means
of such a photothermal process is a 3D porous material exhibiting
very high surface area, excellent conductivity, and high thermal stability.
Differently from other approaches, the graphene preparation and its
patterning and embedding into a polymer substrate is performed in
just a single and fast step, without the need for subsequent wet chemical
steps. By controlling the laser fluence (i.e., optical energy delivered
per surface area), it is possible to create materials with different
pore size, thickness of porous structure (from few to hundreds of
micrometers), and to control the formation of so-called LIG-forest,
made up of dense bundles of long fiber-like LIG.[22] The peculiar graphene structure was investigated in depth
revealing a few-layered graphene nature, as evidenced by transmission
electron microscopy, Raman, and X-ray diffraction analysis.[20,22] LIG formation from other polymers and even from renewable precursors
such as wood, clothes, and food (e.g., coconut shell, bread, and potato
skin) has been demonstrated.[23] This latter
finding can potentially expand the application of LIG into transient
or edible electronics and further drastically reduce the cost and
environmental footprint of LIG-based devices. It is evident that graphene-based
devices are of a great interest in modern science and technology,
and therefore easy-to-implement techniques are highly demanded for
their production. Recently, a review summarized the progress made
in LIG in the last 5 years.[24] Following
the first reports several applications of LIG were proposed, including
microfluidics, electrocatalysts, strain sensors,[25] and microsupercapacitors. LIG enables the integration of
conductive tracks (sheet resistance down to few Ω/□)
into flexible polymer sheets, providing a suitable and attractive
approach to printed electronics. Moreover, LIG-derived circuits were
transferred onto prestretched elastomers allowing to form complex
2D and 3D hierarchical microarchitectures.[26] In present work, laser-induced pyrolysis of polyimide (PI) sheets,
a common substrate used for circuit and electronic devices, is used
for producing LIG materials. Tuning of LIG material morphology and
properties by different laser processing is investigated through scanning
electron microscopy (SEM) imaging, and their composition is assessed
by means of Raman spectroscopy. In particular, by varying laser system
parameters (i.e., speed, power, focusing of the laser rastering, and
determining the actual laser fluence H), it is possible
to control the morphology of produced LIG from a “flat”
porous graphitic structure (LIG-P) to very long self-aligned carbon
nanofibers (LIG-F). A simple method is then proposed for creating
LIG stretchable and conformable conductors by lamination transfer
of LIG materials from the native PI onto a thin, stretchable, transparent
medical grade polyurethane (MPU) with optimal on-skin adhesion and
breathability (i.e., permeability to moisture produced by skin transpiration).
The influence of laser rastering direction on LIG-P and LIG-F growth
and on the electromechanical properties of LIG/MPU composites is discussed.
Fabricated LIG/MPU composites show stretchability up to 100% as well
as long-term durability in electromechanical tensile tests up to 200
cycles. Three proof of concept epidermal sensing applications of LIG/MPU
are presented. A conformable skin-contact dry electrode is tested
for electromyography (EMG) recording. On the basis of the good stability
under stretching and of the distinct piezoresistive behavior of LIG/MPU
materials, a pressure/touch resistive sensor and a breath monitoring
sensor on skin are demonstrated and tested. A method is implemented
for obtaining vertical interconnect access (VIA) into sensors, as
desired for minimizing typicalrupture problems of epidermal devices
related to external wiring connectors.
Results
and Discussion
With the objective of developing novel epidermal
sensors, we investigated
LIG synthesis and its integration into a stretchable and conformable
carrier, suitable for epidermal applications. Given the requirements
of such application, the choice was to use a commercially available
medicalpolyurethane film (MPU) normally used for wound dressing and
protection. The MPU is composed of a thin medically approved polyurethane
layer coupled with a skin-safe polyacrylate adhesive. An overall MPU
thickness of (54 ± 6) μm (polyurethane + polyacrylate glue)
was estimated by optical microscopy. The commercially available MPU
is laminated between a glassine paper sheet and a release plastic
liner for facilitating storage, handling, and release on skin. Schematics
of MPU layered structure is provided in Figure S1. MPU has numerous features, making it an optimal substrate
for epidermal electronics, which include, among others, reduced thickness,
high transparency, stable long-term and conformal adhesion on skin
(up to 72 h), large stretchability (over 100%), excellent gas permeability,
impermeability to liquid water, off-the-shelf availability in large
area format, and ease of manipulation/transfer on skin. Several important
figures are summarized in Table S1, Supporting Information. As a matter of fact, the MPU film worn on the
skin is barely felt by the user. The mechanical properties of the
MPU were studied with a custom tensile testing setup and showed a
linear elastic behavior at small strain (5%) and only partial elastic
behavior for large (30–100%) strain values (see Supporting Information, Figure S2). Because the
relevant strain range in epidermal applications (i.e., related to
body movement) is typically lower,[27] the
partly non elastic behavior at high strain is not considered a major
issue. An elastic modulus of (8.5 ± 0.3) MPa was estimated in
the 0–30% strain range. Table S1 summarizes the main features and physical properties of MPU. The
process of producing LIG is displayed in Figure . The scribing of LIG conductive patterns
was performed on top of PI sheets with a laser engraver/cutter equipped
with a 30 W CO2 laser source operating in the rastering
mode. PI was chosen because of its known good properties as a precursor
for LIG.[28] Moreover, preliminary investigations
of a different precursor (polyether ether ketone) showed that LIG
produced from this material had inferior electrical and mechanical
properties than PI-derived LIG, namely, higher electrical resistance
and increased brittleness. The process, very simple and scalable in
production, permits the customization of the design and of the processing
parameters. In the current work, LIG lines were patterned down to
a minimum 100 μm width, by scribing with a laser beam having
a nominal diameter of 30 μm. Discrepancy between the beam size
and actual size of scribed patterns is ascribed to the fact that the
actual area affected by local heating (and pyrolysis) is larger than
the irradiated one.[22] By adopting different
laser scribing setup (and mainly using a laser beam with smaller diameter),
further miniaturization of LIG patterns is in principle possible.
However, the lateral resolution of the laser scribing adopted here
is deemed suitable for the envisioned applications. It is moreover
convenient in terms of throughput, an important aspect in view of
future scaling up of manufacturing. The composition and surface morphology
of LIG materials can be varied by adjusting the laser rastering parameters
(resulting in a change of laser fluence H), as detailed
in Experimental Section and evidenced in SEM
images (Figure ).
Two sets of laser engraver parameters have been selected and used
in this study. The first one, corresponding to H =
25 J/cm2, yields a flat porous graphene structure (LIG-P).
Another, corresponding to H = 50 J/cm2, yields a fiber structure (LIG-F). These optimized H values were set after a preliminary investigation on how the laser
scribing parameters influenced LIG formation. To this aim a “map”
with different fluence values was created (Figure S3): each point of the map corresponds to a certain set of
power and speed of laser rastering; the latter are related to fluence H through eq S1, Supporting Information. In the map, it was possible to distinguish roughly three transitions:
one from no or non uniform LIG formation to formation of LIG-P (blue
line, H ≈ 25 J/cm2), one from LIG-P
to LIG-F (green line, H ≈ 45 J/cm2), and one from LIG-F to destruction of the PI because of too high
fluence H (red line, H ≈
80 J/cm2). Measurements showed that conductivity and thickness
of produced LIG increased with increasing H, in agreement
with previous findings.[28] On the other
hand, the scribed material became increasingly more brittle. Therefore,
a tradeoff between conductivity and mechanical stability was made,
setting the aforementioned parameters. The composition of the various
LIG structures on PI was investigated by means of Raman spectroscopy.
The Raman spectra displayed in Figure b show a LIG-P (red) and a LIG-F (light blue) sample.
Three main features are evidenced: the D band at approximately 1345
cm–1 which is associated with disorder and defects
in carbon materials, the G band at approximately 1585 cm–1, and the 2D band at approximately 2685 cm–1. The
spectrum is clearly evidencing the presence of graphitic carbon for
both samples and difference with respect to amorphous carbon.[29] The ID/IG intensity ratio is slightly higher for the LIG-P sample,
which means that the LIG-F sample has a higher degree of crystallinity
(graphitization) than the LIG-P sample.[29] A table with detailed parameters of the Raman bands can be found
in the Supporting Information (Table S2).
The results for both samples are in agreement with previous findings
about similar materials.[22] In addition
to providing stable adhesion on skin, the adhesive coating of MPU
endowed us with an easy strategy for transfer and embedding of LIG
materials, as detailed in the following. In Figure c–e, the transfer process with the
masked MPU and LIG is shown. The MPU film was laminated onto the scribed
LIG patterns, allowing the polyacrylate adhesive stick onto it. By
applying different pressures onto the MPU, the LIG paths were then
simply transferred onto the MPU carrier when the latter was peeled
off. For LIG-P samples, the whole bulk was transferred onto the MPU,
while for the LIG-F, only the surface fibers were detached from the
PI precursor, leaving behind the bottommost porous structure. Investigations
of the morphology of LIG with an electron microscope show small features
for the LIG-P (Figure a) and fiber cones consisting of bundles of fibers for LIG-F (Figure b). These fibers
have an average diameter of around 50–70 nm and a typical length
of around 100–200 μm. The morphology of the transferred
LIG/MPU is changed (as evidenced in Figure c,f) because the bottommost produced LIG
is exposed as the topmost. For this reason, the transferred LIG-P
surfaces feature a structure with larger pores (detailed view in Figure d), whereas in LIG-F,
it is shown that during the transfer the fiber cones were not completely
destroyed and an interconnected network of fibers/fiber bundles has
been produced. Images of cross-sections (Figure e,h) taken at the edge of LIG patterns clearly
show that the transferred LIG is not completely embedded into the
adhesive layer of the MPU. This is important for some applications
where a direct contact between skin and LIG is required. The sheet
resistance of the transferred LIG-P, which had a thickness of (8.7
± 1.4) μm before the transfer, is (100 ± 10) Ω,
which is 10 times larger than that before the transfer. This indicates
that the structure of the porous graphene gets partly destroyed during
the transfer process, despite this could not be seen in the SEM images.
The transferred LIG-F has a sheet resistance of (800 ± 100) Ω.
Because the non transferred LIG-Falso consists of a porous bulk part
which is the main conductor, a comparison of the transferred and non
transferred LIG-F would not be meaningful. With regard to LIG-F, it
is somehow difficult to provide an estimate of thickness because of
the complex morphology of the fibers (e.g. their bending, density,
partial alignment) and of the rough surface of the sticky MPU side.
In the laser rastering used for production of LIG, the precursor surface
is irradiated line by line along the x axis, leading
to conversion of the PI into LIG through a photothermal process. Thus,
it is reasonable to assume that orientation of the pattern will affect
the formed LIG morphology and topography and in turn its mechanical
and electrical properties as a stretchable conductor. For this reason,
we investigated how the orientation of the produced LIG lines with
respect to the stretching direction (i.e., angle ϕ between the
rastering direction and the stretching direction, Figure e, perpendicular (⊥)
ϕ = 90°, parallel (∥) ϕ = 0°) affected
the LIG and LIG/MPU composites. SEM investigations show that the scribing
direction affected the morphology of the produced LIG, as shown in Figure a. This effect is
more present in the LIG-P because of its bulky nature.
Figure 1
(a) Laser scribing on
the PI sheet for LIG creation, inset: LIG
scribed into PI representing the logo of our Institute of Solid State
Physics, TU Graz (scale bar: 2 mm); (b) Raman spectra of the LIG-P
(red) and LIG-F (light blue) samples showing the characteristic D,
G, and 2D bands; and (c–e) schematics of LIG transfer on MPU
and definition of angle ϕ between laser scan and stretching
directions.
Figure 2
Scheme and SEM images of LIG on PI (top panel)
and LIG/MPU (bottom
panel): (a) LIG porous (LIG-P) and (b) LIG fibers (LIG-F) on PI; (c,d)
morphology and (e) cross-section of LIG-P/MPU; and (f,g) morphology
and (h) cross-section of LIG-F/MPU. All SEM images are top view (sample
tilt angle θ = 0), except for (e,h) which are tilted views (θ
= 50°).
(a) Laser scribing on
the PI sheet for LIG creation, inset: LIG
scribed into PI representing the logo of our Institute of Solid State
Physics, TU Graz (scale bar: 2 mm); (b) Raman spectra of the LIG-P
(red) and LIG-F (light blue) samples showing the characteristic D,
G, and 2D bands; and (c–e) schematics of LIG transfer on MPU
and definition of angle ϕ between laser scan and stretching
directions.Scheme and SEM images of LIG on PI (top panel)
and LIG/MPU (bottom
panel): (a) LIG porous (LIG-P) and (b) LIG fibers (LIG-F) on PI; (c,d)
morphology and (e) cross-section of LIG-P/MPU; and (f,g) morphology
and (h) cross-section of LIG-F/MPU. All SEM images are top view (sample
tilt angle θ = 0), except for (e,h) which are tilted views (θ
= 50°).The electromechanical behavior
of the LIG/MPU composites was investigated
in depth with a custom setup, which enabled a simultaneous tensile
testing and resistance measurement of stretchable conductors. The
same tensile test protocol was performed on all the samples: 5 cycles
of stretch/relax for each preset level of maximum strain. Maximum
strain was set at ϵ = 5, 10, and 30%, followed by a final single
stretch at ϵ = 100% LIG-P/MPU and LIG-F/MPU samples with parallel
and perpendicular orientation tested and their behavior compared (Figure b–d). An example
of a typical experiment (10% strain stretching, repeated 5 times)
is reported in Figure a for the sample LIG-P ⊥/MPU. The corresponding trend of force
versus strain for repeated cycles did not differ from the one of the
bare MPU, as provided in Figure S2. In
these measurements, R0 was defined as
the initial resistance of the sample before imposing a stretching
at a certain strain level. Rmax was defined
as the resistance value at maximum strain for each strain level imposed. Rrelax was defined as the resistance value obtained
upon relaxation (ϵ = 0%) from a set strain value. An example
of these quantities is provided in labels in Figure a. The values of initial resistance R0 measured before tensile testing for the different
sample types are reported in Table .
Figure 3
(a) Typical tensile test cycles at 30% strain for LIG-P
⊥/MPU,
with definition of Rmax, Rrelax, and R0 and (b) GF,
(c) Rrelax/R0, and (d) Rmax/R0 and their variation vs strain for all tested LIG/MPU composites.
Table 1
Initial Resistance R0 for the Different LIG/MPU Sample Types before First
Measurement Averaged over at Least Three Samples (Sample Geometry:
30 × 5 mm2 Stripes)
sample type
R0/kΩ
LIG-P ⊥/MPU
3.1 ± 0.2
LIG-P ∥/MPU
0.9 ± 0.1
LIG-F ⊥/MPU
16.2 ± 6.2
LIG-F ∥/MPU
12.6 ± 6.5
(a) Typical tensile test cycles at 30% strain for LIG-P
⊥/MPU,
with definition of Rmax, Rrelax, and R0 and (b) GF,
(c) Rrelax/R0, and (d) Rmax/R0 and their variation vs strain for all tested LIG/MPU composites.The overall higher
resistance of LIG-F compared to the LIG-P was
caused by the different thickness of the two LIG variants as well
as the very different morphologies establishing different percolative
paths. The lowest resistance among samples is measured with LIG-P
∥, due to the alignment of the produced LIG-P lines along the
stretching (and electrical measurement) direction. The laser process
produces lines of LIG-P which are very conductive in the direction
of rastering. These lines are separated by a less conductive variant
of LIG,[23] resulting in anisotropic conductivity.
Indeed, higher resistance was measured along a direction perpendicular
to the laser rastering in LIG-P. The laser rastering direction was
found to have a less important role in LIG-F/MPU materials: LIG-F
∥ and LIG-F ⊥ showed a smaller relative difference in R0 (Table ) and similar change of resistance upon applied strain (Figure d). Indeed, even
though the partial alignment of as-produced nanofibers on PI could
suggest for a stronger orientation effect (Figure d), this alignment is lost during the transfer
onto MPU (Figure e).
The relative resistance Rmax/R0 for the stretched state for each set strain value shows
that LIG-P/MPU has a larger response to strain than the LIG-F/MPU
(Figure d) over the
whole investigated strain range. Stretching LIG-P/MPU to high strain
values (up to ϵ = 100%) results in a sudden breakdown at around
ϵ = 60% over which the material is not conductive anymore (Figure S4). Nevertheless, upon strain relaxation,
a recovery of functionality is observed, despite a partial irreversible
loss of conductivity. On the other hand, a continuous increase in
resistance with strain is observed for LIG-F/MPU, with no evidence
of rupture or breakdown up to ϵ = 100% (Figure S5). This can be explained by differences in the morphology
of the two species. LIG-F is composed of individual nanofibers which
interconnect with each other and form a percolative conductive network.
When this network is exposed to stress, it is not destroyed but has
fewer points of overlapping, as shown in Figure a,b. LIG-P is instead a bulk of porous graphene
which, when under stress, starts to form cracks. Comparing the two
species ∥ (Figure c) and ⊥ (Figure d) with each other, it is evident that more cracks
are formed in LIG-P ∥ due to the alignment of the pattern along
the stretching direction. The second row in Figure displays the MPU composites after 30% strain
cycles repeated 200 times. For the LIG-P/MPU composite, it is evident
that more cracks were formed but are mostly closed after relaxing.
For LIG-F, no evidence for destruction can be found. The differences
among LIG-P with different orientations and LIG-F composites are emerging
even more clearly when the gauge factor (GF) is considered (Figure b), which is defined
aswhere ΔR = Rmax – R0 is
the change in resistance measured for a set strain ϵ = ΔL/L0, with ΔL = Lmax – L0 being the change in length of a sample having a relaxed length L0. The difference in the GF for LIG-P ∥
and ⊥ is very evident and is in good agreement with the observation
of the SEM images in Figure . LIG-P/MPU showed a GF around two times larger than LIG-F/MPU,
which increases with increasing strain. The observed maximum value
70 for the GF makes this material an interesting candidate for developing
strain sensors. On the other hand, the GF of LIG-F/MPU decreases with
increasing strain, probably due to the effect of a partial alignment
of fibers along the stretching direction upon repeated tensile exercise.
This effect leads in turn into lower sensitivity to strain (see also
long-term behavior description in the following). It is important
to notice that typically Rrelax is larger
than R0 (Figure c) as it reflects the instantaneous response
of the stretchable conductor. Actually, Rrelax could become lower and lower and eventually almost recover the initial R0 value when the sample wasallowed to fully
relax (i.e., waiting for several tens of seconds at the relaxed position,
e.g. Figure S6). This phenomenon can be
rationalized by taking into account the aforementioned viscoelastic
behavior of the MPU, as evidenced in tensile testing experiments (Figure S2). In order to prove that the viscoelasticity
of MPU is responsible for the observed resistance change, a dedicated
experiment was carried out. A sample was stretched up to 60% strain
and then relaxed to 0% strain, while the resistance (and the force)
were monitored on a longer timescale with respect to the aforementioned
electromechanical tests, allowing for full stress relaxation. An exponential
decrease of resistance R over time to the initial R0 was observed, while a simultaneous decrease
in force was detected due to stress relaxation, a typical feature
of viscoelastic materials. An exponential fit permitted to estimate
a time constant τ = (18.5 ± 2.8) s for both the force and
resistance, evidencing the correlation of resistance change with the
stress relaxation of the MPU (Figure S7a–c). Thus, R0 should be rather seen as
the equilibrium resistance value, describing a proper fully relaxed
state, instead of Rrelax. The evolution
of R0 with increasing strain levels is
shown in Figure S8. A small irreversible
variation of R0 is observed, much smaller
than the one assessed in a short time scale measurement by means of
the quantity Rrelax. The relative resistance R/R0 for the relaxed state in Figure c shows that the
LIG-F/MPU have a higher variation and value for small strain values.
Comparing this with the initial resistance R0 opens the question why Figure S8 shows nearly no variation of R0 over
strain. An electromechanical testing over 200 cycles at 30% strain
was carried out to investigate the long-term behavior of LIG-F/MPU
and LIG-P/MPU composites. Figure S9 Supporting Information displays the relative resistance in the stretched
(Rmax/R0)
and relaxed states (Rrelax/R0). The results suggest that the LIG-F/MPU samples do
not get degraded but rather show an enhancement of conductivity upon
exercising, possibly due to alignment of nanofibers along the stretching
direction upon repeated tensile testing. However, the LIG-P/MPU samples
showed an increase in resistance with increasing strain cycle number
at an imposed max strain of 30%. This is related to the crack formation
shown in Figure .
Regarding the mechanical properties of the MPU, no change in behavior
compared to the initial testing could be observed (Figure S10).
Figure 4
Effect of stress on LIG/MPU. SEM images of samples under
stretching:
(a) LIG-F ∥, (b) LIG-F ⊥, (c) LIG-P ∥, and (d)
LIG-P ⊥. (e–h) Corresponding images of relaxed samples
after 200 cycles of 30% strain. Scale bar: 100 μm.
Effect of stress on LIG/MPU. SEM images of samples under
stretching:
(a) LIG-F ∥, (b) LIG-F ⊥, (c) LIG-P ∥, and (d)
LIG-P ⊥. (e–h) Corresponding images of relaxed samples
after 200 cycles of 30% strain. Scale bar: 100 μm.A notable remark about our findings on LIG/MPU composites
is that
the presence of LIG (either LIG-P or LIG-F and irrespective of orientation)
is not noticeably affecting the mechanical properties of the composites.
Namely, modulus extracted by stress/strain curves of LIG/MPU (Figure S11) are identical to MPU (Figure S12) over the whole studied strain range.
Thus, differently by other approaches to stretchable conductors,[30−32] the introduction of conductive functionality is not impairing the
stretchability and softness of the polymer matrix substrate, with
obvious benefits toward the development of soft epidermal devices.
Interconnectivity through VIAs in LIG/MPU
Composites
Once the electromechanical behavior of LIG/MPU
composites was characterized, we focused our attention onto developing
epidermal sensors out of these stretchable conductors. One of the
main challenges related to epidermal sensors for personal monitoring
based on thin, conformal, stretchable materials is related to their
wiring to devices for signal processing (either worn on skin or standard
benchtop equipment). Indeed, wiring connections in thin films are
prone to failure (rupture) or to unstable and noisy electrical connections
when devices are worn on skin. The latter can be due to relative displacement
caused by skin stretching or to movements of the subject, giving rise
to so-called movement artifacts in the recorded biosignals.[33] These issues are due to intrinsic limitations
of material properties (e.g. mismatch of thickness and stiffness at
the interface between thin film and wires) and in processing. A possible
strategy to overcome these issues is the establishment of VIA through
the thin films used. VIAs can also provide further opportunities for
multilayer processing to increase the density of integrated electronics
and circuits into a small patch-like device on skin. To this purpose,
we developed a strategy for VIAs into LIG/MPU composites to electrically
connect different layers and enable accessing through the whole MPU
down to the lower lying (i.e. skin-contact) layer. The schematics
of layers in the VIAs is displayed in Figure a. Small holes (diameter ≈ 100 μm, Figure b) are laser-cut
into areas where a VIA connection should be. These holes are small
enough to not interfere with the transfer process or drastically change
the robustness and stretchability of the MPU. Further miniaturization
of holes for VIAs in future applications could be feasible by adopting
smaller laser beam size. Once the LIG is transferred onto the MPU
with holes, a connection back layer of MPU is laminated onto it with
an adhesive part facing topward. The purpose of the back layer is
to provide encapsulation of LIG and VIA connector and to avoid subsequent
sticking on the skin of this part. The holes are then filled with
silver ink and dried. Because of the open and porous structure of
LIG (having a good wettability), the silver ink spreads into the LIG
layer, forming a LIG/Ag composite and ensuring a good connection.[34] With this approach, we were able to create a
soft VIA connector design which is only two times thicker than the
electrode itself (2 layers of MPU ≈ 100 μm) and has a
minor and localized effect in increasing stiffness, and it is robust
at the same time. This VIA connector design enabled wiring from the
top of the composite (Figure c) and not from the bottom, a common configuration in other
epidermal devices that introduces several stability issues. This VIA
design was used for wiring a zero insertion force (ZIF) connector
to all our sensors and always ensured a good electrical connection.
The soft VIA connector also sustained a high number of connecting
and disconnecting procedures to the ZIF connector without any breakdowns
or detachment of the sensor from skin during all our measurements,
over several days of use on skin.
Figure 5
(a) VIA scheme with ZIF-connector for
wiring, (b) SEM image of
laser-cut holes in the top layer of MPU, and (c) photo of a finished
connector with silver ink-filled VIAs.
(a) VIA scheme with ZIF-connector for
wiring, (b) SEM image of
laser-cut holes in the top layer of MPU, and (c) photo of a finished
connector with silver ink-filled VIAs.
Epidermal Sensors
Three kinds of
epidermal sensing with LIG/MPU composites were tested to provide a
proof of concept demonstration of applications: (a) an electrophysiology
skin-contact dry electrode for surface EMG;[35] (b) a skin-worn piezoresistive sensor for touch/pressure detection;
and (c) an epidermal piezoresistive strain sensor for breath monitoring.
Other LIG based strain sensors have been proposed recently and showed
very interesting performances, such as high GF and long-term stability
after repeated deformation. Nevertheless, most of them were relatively
thick (several hundreds of μm) and/or stiff; as a consequence,
they were not truly conformable to the skin surface and unperceivable
for the user, as required for epidermal applications.[36,37] We demonstrated self-adhering electrodes and sensors with an integrated
connector terminal with a thickness of under 100 μm which were
not only breathable and skin-friendly but also were water-repellent.
EMG Sensor
The LIG/MPU composite
could be used as a surface EMG electrode because of its electrical
conductivity. This made it possible to detect a change in electrical
potential generated by muscle activation at the epidermis surface.
An important aspect here was that movement artifacts and change in
resistance were kept to a minimum. Based on the electromechanical
characterization of LIG/MPU, the material of choice for developing
an EMG sensor wasLIG-F. The lower GF, the lower thickness, and higher
strain tolerance are indeed well-suited for this application. Because
the orientation of the fibers (scribing direction) does not have a
great impact on the properties of the electrode, it was manufactured
with only one rastering direction. The sensor was composed of a couple
of circular electrodes, connecting lines, and VIAs for external wiring.
It was attached on the forearm of a subject without any skin preparation
procedure (e.g., scrubbing and alcohol cleaning) as instead required
in other epidermal sensors. It was tested on the skin in combination
with a gel-based standard electrode (Ag/AgCl gelled electrode, see
details in Experimental Section) used as the
reference in EMG recording. The recordings in Figure b show the EMG signal recorded from the forearm
and related to clenching the fist for 5 s. The electrode placement
on the forearm is displayed in Figure a. The signal obtained had a good signal-to-noise-ratio
(ranging from 10 to 30, see Experimental Section for calculation) and recording stability compared to recording with
standard Ag/AgCl electrodes. The electrode was worn for three consecutive
days during which the subject had normal daily activities including
working in the lab, practicing sports, showering, and sleeping. A
small variation in signal quality could be observed over time but
only consisted of an increased 50 Hz noise level which was filtered
out. After 72 h, an increase in movement noise and decrease in signal
reliability could be observed which marked the end of the experiment.
During the test period, the electrode was connected and disconnected
several times to a monitoring apparatus through the ZIF connector:
the soft VIA connector showed no visible signs of degradation or ruptures.
The electrode was hardly noticed by the volunteer during the test
period because of its thickness, softness, and gas permeability. After
removal of the electrode, no skin irritation or allergic reaction
was observed.
Figure 6
Demonstrations of application of LIG/MPU as epidermal
sensors.
(a,b) EMG electrodes on forearm and corresponding EMG recordings over
72 h (fist clenching), (c,d) piezoresistive tactile sensor: 1, 2,
3, and 4 pushing onto the button with a finger for switching of a
LED, and (e,f) piezoresistive strain/respiration sensor placed on
lower left rib cage: A deep inhaling and B holding breath. Video showing
the operation of an epidermal tactile sensor is available in Supporting Information.
Demonstrations of application of LIG/MPUas epidermal
sensors.
(a,b) EMG electrodes on forearm and corresponding EMG recordings over
72 h (fist clenching), (c,d) piezoresistive tactile sensor: 1, 2,
3, and 4 pushing onto the button with a finger for switching of a
LED, and (e,f) piezoresistive strain/respiration sensor placed on
lower left rib cage: A deep inhaling and B holding breath. Video showing
the operation of an epidermal tactile sensor is available in Supporting Information.
Tactile Sensing
A second application
of LIG/MPU materials can be tactile sensing because of their piezoresistive
behavior. The LIG/MPU can be thus used as a sensing device for robotic
skins[38] or as an input touch-sensitive
device for on-skin electronics, among others. We demonstrated this
concept by developing a simple on-skin button which was used to switch
a light-emitting diode (LED). An applied pressure onto the piezoresistive
LIG/MPU imposed a change in resistance which could be easily detected.
The LIG-P was patterned as a connected shape resistor which was used
as an on-skin button for demonstration (Figure c). The sensor consisted of the LIG-P pattern
sandwiched between two MPU layers, so that it was isolated with respect
to both the underlying skin and the touching finger. The MPU native
adhesive layer provided stable adhesion onto skin. The manufacturing
process and connection of the touch sensor was the same as that for
the EMG electrode. Optimal wearability was retained, similar to the
case of bare MPU. The resistance change was measured and processed
by a microcontroller, once a push was detected, an LED was switched.
A video of this demonstration can be found in the Supporting Information. The resistance response against tactile
inputs (i.e., 4 consecutive contacts by a finger touching the sensor
surface) is plotted in Figure d and shows very prominent peaks and fast response. The subsequent
superimposed exponential decrease wasascribable to the viscoelastic
behavior of the MPU, namely, stress relaxation occurring over several
seconds (Figures S6 and S7). Although this
behavior was not ideal, it could be easily dealt with post processing
such as filtering. This could be done because the time scales of the
push on the button and the stress relaxation were different. While
the latter was actually impairing a fast switching off and recovery
of stable R value, as needed for fast and more time
resolved touch sensing, the obtained result can enable to envision
several applications in electronic skins and wearable devices.
Respiration Sensor
Using the information
gained in electromechanical testing of composites, we were able to
design a soft and unperceivable epidermal sensor for the detection
of the breathing rate (Figure e) through strain sensing. For this sensor, LIG-P ∥
was chosen because of its high GF. Similar to the touch sensor, the
LIG is sandwiched between two layers of MPU. It was adhered to skin
with the native MPU adhesive layer and embedded a VIA soft connector.
The sensing principle was based on the expansion in the chest area
when breathing; therefore a strain was imposed on a skin-worn conformable
sensor.[39] Regular breathing imposed a cyclic
tensile strain/relaxation onto the sample resulting in detectable
resistance variation in the form of a series of peaks (Figure f). By performing simple algorithms
like filtering, counting of peaks, and fast Fourier transformation
of the electrical signal, it could be possible to extract the information
about the respiration rate and filter out movement artefacts (i.e.,
variation of base resistance level).[40] From
the electromechanical testing results (GF of the selected material),
we could estimate the strain induced by breathing in the selected
body location. The average strain at maximum chest expansion was around
5–7% for which we observed a change of resistance of around Rmax/R0 = 2, in very
good agreement with biomechanical data available in the literature.[41,42]
Conclusions
In this
study, we investigated LIG-based stretchable materials
produced with an IR laser rastering on top of flexible PI sheets and
subsequent LIG transfer onto a medical grade and highly breathable
polyurethane (MPU). Either porous (LIG-P) or nanofiber (LIG-F) materials
were prepared by changing laser rastering parameters, and their morphology
and composition were characterized. A simple strategy for preparing
soft, stretchable, skin-mountable LIG/MPU conductive materials is
presented. MPU was selected given its excellent properties to act
as a skin-contact patch and its excellent mechanical properties. A
complete electromechanical characterization of the materials was provided
correlating changes in morphology and design of LIGconductors with
the observed electromechanical behavior. These stretchable conductors
showed quite good conductivity and retained functional properties
upon stretching up to 100%. While the mechanical properties of the
soft MPU were not altered by LIG, distinct differences in the electromechanical
properties of LIG-P/MPU and LIG-F/MPU were evidenced, permitting to
envision future applications in a variety of epidermal sensing scenarios.
A simple strategy for providing VIA connectors to LIG/MPU was implemented
by means of combined laser cutting and lamination. Three proof of
concept demonstrators of skin-mountable sensors based on LIG/MPU were
finally discussed. Current findings can open new possibilities toward
the development of stretchable nanostructured conductors and epidermal
devices through a simple, cheap, and high throughput method, making
use of off-the-shelf available materials.
Experimental Section
Laser
Scribing Parameters
A 10.6
μm CO2 laser cutter (Universal Laser Systems VLS
2.30, power Pmax = 30 W) equipped with
an HPDFO beam collimator (nominal beam size: 30 μm) was used
to create conductive patterns of LIG onto PI (Kapton HN sheets, DuPont,
thickness = 50 μm). The laser processing for LIG production
was operated in ambient condition, with PI sheets attached onto an
Al plate by means of a double-sided adhesive tape. The laser cutter
was operated in the raster mode through its native software (Universal
Laser System Interface). Two settings of laser rastering parameters
were employed for producing LIG-P or LIG-F materials. LIG-P: power
= 10%, speed = 10%; LIG-F: power = 20%, speed = 10%. In both cases,
settings had a raster resolution of 500 PPI, an image density of 5
(arbitrary scale, defining a spacing between consecutive rastered
lines of 280 μm), a positive defocusing of 1 mm. The corresponding
laser fluence H was calculated as described in the Supporting Information.
Characterization
The thickness of
the MPU was measured with an Leica Wild M3B optical microscope. The
imaging of LIG was performed with a JEOL JSM-6490LV scanning electrode
microscope, operating at 5–20 kV acceleration voltage. The
electromechanical properties were measured with a custom setup shown
in Figure S13. Samples with a dimension
of 30 mm × 5 mm were used to measure the resistance response
to the imposed strain. Because of the mounting mechanism, the real
sample length varied at around 20(2) mm. The electromechanical tensile
testing setup was composed of a Load Cell Futek LRF400 and an Amplifier
Futek IAA100; the load value was read out with an Arduino microcontroller.
The resistance measurement was done with a Keithley 2601B Source Meter
sourcing 10 mA. Controlled strain was imposed on samples by means
of a NEMA 17 stepper motor controlled by the Arduino microcontroller.
A custom C# software was used to send commands to the Arduino and
record measurements. The thickness for LIG-P was measured with an
AlphaStep D-500 Profilometer from KLA-Tencor. The thickness was estimated
to be the same as the missing material in the PI leftover trenches
whose depths were measured. Sheet resistance was measured with a custom
4-point probe setup consisting of a Keithley 2602B source meter and
four linearly arranged measurement tips with a distance of dprobes
= 1.5 mm. Measurements were carried out on square samples with a length
of 10 mm. Values reported are averaged over 9 measurements and at
least 3 samples. The sheet resistance Rs was calculated with the following equation.where is the
correction factor for a finite thin
square.The Raman spectra were measured using a LabRam HR800
combined with an Olympus BX 41 microscope. The laser wavelength was
352 nm (5 mW); an integration time of 4 s × 4 accumulations,
a slit/hole size of 200 μm, a 300 lines/mm grating, and an ×50
LMPlanFLN (NA = 0.5) objective were used. The shown spectra are the
average of several spectra taken at different positions on the sample,
they have been background corrected, and the intensity of the G-band
has been normalized.
Transfer of LIG onto a
Stretchable Substrate
The LIG was transferred onto a commercially
available MPU (Fixomull
transparent, BSN Medical). The MPU, comprising a PU layer and a polyacrylate
layer, has two protection liners; the polyacrylate glue side (bottom)
is covered with a glassine paper and the top PU side is covered with
a plastic support/release liner (See schematics in Figure S1, Supporting Information). For the transfer, the
polyacrylate glue on the MPU was masked to match the form of the produced
LIG. This was done by cutting the silicon paper with the laser cutter
(power = 2.2%, speed = 9%, PPI = 500, ID = 5, defocus of 1 mm) and
removing the desired parts. Then, the MPU wasput onto the scribed
PI, and a pressure (20 g for only fiber transfer and at least 100
g for bulk transfer) was applied with the help of a cotton tip to
transfer the LIG.
Sensor Fabrication
The sensors were
made from an electrode body (MPU) and a sensing area (LIG). The LIG
was transferred as explained in transfer of LIG onto a stretchable
substrate.
VIAs Fabrication
Once the LIG was
transferred, VIAs were fabricated for the external wiring connector.
A second layer of MPU was applied to the electrode (leaving out the
sensing area in case of the EMG electrode). To establish a connection
to the LIG sandwiched between two layers of MPU, small holes with
a diameter of around 100 μm were lasered into the upper layer.
Holes were then filled with silver conductive paint (Leitsilber 200)
to form a connection to the upper layer. The silver paint on top of
the holes wasalso used as a connection point for a ZIF connector.
The silver paint was dried for 30 min at 80 °C. When applying
the sensor to the skin, the silicon paper liner must be removed and
placed onto the skin. Once the sensor is adhered to the skin, the
plastic liner can be removed.
Signal
Recording
The EMG signal was
recorded with an Olimex ECG shield, consisting of amplifiers and filters
and an Arduino microcontroller to record the data. A commercially
available pregelled Ag/AgCl electrode (Covidien H124SG, sensing area:
1 cm2) was placed on the elbow and used as the reference
electrode. A single LIG/MPU sensor containing two circle-shaped electrodes
(1 cm2; Figure a) was used to record the EMG signal on the forearm while
flexing and relaxing the muscles during repeated fist clench maneuver.
The resistance measurements for the tactile and respiration sensors
were done with a Keithley 2601B Source Meter sourcing 10 mA and a
simple voltage divider setup.
EMG-Signal
Processing
The recorded
EMG-signal was processed with a 4th order bandstop IIR filter to filter
out the 50 Hz noise and its harmonics. Because there is no standard
to evaluate EMG signal (S) quality, the calculation
of the signal-to-noise ratio (SNR) was in the following way. The EMG
feature was separated from the noise by calculating the moving average
(MA) over 100 data points and calculating the difference (D) between the (MA) and the signal. The difference was squared,
and a threshold value for the feature detection was set. The SNR was
calculated by dividing the mean difference of the signal by the mean
difference of the noise.
Authors: Benjamin C-K Tee; Alex Chortos; Andre Berndt; Amanda Kim Nguyen; Ariane Tom; Allister McGuire; Ziliang Carter Lin; Kevin Tien; Won-Gyu Bae; Huiliang Wang; Ping Mei; Ho-Hsiu Chou; Bianxiao Cui; Karl Deisseroth; Tse Nga Ng; Zhenan Bao Journal: Science Date: 2015-10-16 Impact factor: 47.728
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