| Literature DB >> 31963826 |
Mahdi Kiani1, Nan Du1,2,3, Manja Vogel4, Johannes Raff4, Uwe Hübner3, Ilona Skorupa4, Danilo Bürger1, Stefan E Schulz1,5, Oliver G Schmidt6, Daniel Blaschke3,4, Heidemarie Schmidt1,2,3.
Abstract
DeionizedEntities:
Keywords: biochips; biomaterial; biosensing; electrical equivalent circuit; impedance spectroscopy; yeast Saccharomyces cerevisiae
Mesh:
Substances:
Year: 2020 PMID: 31963826 PMCID: PMC7168218 DOI: 10.3390/bios10010007
Source DB: PubMed Journal: Biosensors (Basel) ISSN: 2079-6374
Implantation parameters and annealing conditions of phosphor implanted (phosphorous into Si:B) and boron implanted (boron into Si:P) biochips. The Au ring top electrodes and unstructured Au bottom contacts have been prepared after ion implantation. Different ion species together with ion energy, ion fluence, and annealing conditions have been applied when preparing the six different types of impedance biochips.
| Biochip | Implanted Ion | Ion Energy (MeV) | Ion Fluence (cm−2) | Annealing |
|---|---|---|---|---|
| PS5 | Phosphorous | 1.00 | 3 × 1013 | No |
| BS5 | Boron | 0.45 | 3 × 1013 | No |
| PS6 | Phosphorous | 1.00 | 3 × 1013 | Yes, at 900 °C |
| BS6 | Boron | 0.45 | 3 × 1013 | Yes, at 900 °C |
| PS9 | Phosphorous | 1.00 | 3 × 1015 | No |
| BS9 | Boron | 0.40 | 8 × 1015 | No |
Figure 1Schematic sketch of the p-n junction-based Si biochip with a ring top electrode with (a–c) boron ions (B+) implanted into Si:P or with (d–f) phosphorous (P-) ions implanted into Si:B. BS6 (b) and PS6 (e) are annealed in nitrogen for 2 h. BS9 (c) and PS9 (f) are highly doped biochips. Top and bottom electrodes have been wire bonded to the pins of a TO-5 package (h) and connected to an Agilent 4294 A impedance analyzer. DI water (g) and S. cerevisiae suspension or 10% glucose as medium with S. cerevisiae (i) are added in to the top ring electrode for impedance spectroscopy.
Figure 2Top view optical microscopic images of a section of ring electrode (dark)on glass (bright) with (a) DI water, (e) glucose, S. cerevisiae in (b) DI water, (f) glucose at OD600 0.25, S. cerevisiae in (c) DI water (g) in glucose at OD600 1.00, S. cerevisiae in (d) DI water and (h) in glucose at OD600 2.00 in the ring top electrode region. Here a transparent glass substrate has been used to illuminate the sample with light from the backside. The thickness of the ring top electrodes is 150 nm and is large enough to keep inserted liquid in the ring top electrode.
Figure 3Electrical equivalent circuits used to model impedance spectra of the biochips (a) before (two pairs of constant phase elements (CPEs) and resistors) and (b) after inserting analyte into the ring electrode (3 pairs of CPEs and resistor). The equivalent circuit parameters Ls and Rs represent the interface properties of the circuit wiring.
Figure 4Measurement and modeling results for the (a–c) phosphor-implanted biochips, biochips with 20 μL DI water, biochip with 20 μL S. cerevisiae and (d–f) boron-implanted biochips, biochips with 20 μL DI water, biochip with 20 μL S. cerevisiae. Sensitivity level of the biochip to medium and to yeast S. cerevisiae has been summarized in Table 2. Biochips BS5 and PS5 show strong sensitivity to both medium and yeast.
Sensitivity level for the manufactured biochips to DI water and to yeast. 20 µL DI water and 1 µL S. cerevisiae inserted to the ring top electrode for testing the sensitivity of the biochips to medium and to yeast, respectively.
| Bio-Chip ID | Sensitivity to Medium | Sensitivity to Yeast |
|---|---|---|
| PS5 | Strong | Strong |
| BS5 | Strong | Strong |
| PS6 | Medium | Strong |
| BS6 | Weak | Weak |
| PS9 | Strong | Weak |
| BS9 | Medium | Strong |
Figure 5Experimental and modeled Nyquist plots of the Biochip BS5 with no filling and with DI water (20 µL) and (a) with additional DI water with volume from 1 μL to 5 μL, and (b) with additional S. cerevisiae volume from 1 μL to 5 μL. (c) no filling and with 10% glucose (20 µL) and with additional 10% glucose with volume from 1 μL to 5 μL, and (d) with additional S. cerevisiae volume from 1 μL to 5 μL. (f) biochip PS5 with no filling and with DI water (20 µL) and (a) with additional DI water with volume from 1 μL to 5 μL, and (e) with additional S. cerevisiae volume from 1 μL to 5 μL. (g) no filling and with 10% glucose (20 µL) and with additional 10% glucose with volume from 1–5 μL, and (h) with additional S. cerevisiae volume from 1–5 μL.
Figure A1Impedance measured at a test frequency of 40 Hz, 400 Hz and 4000 Hz of biochip (a) BS5 (Table A16) and of biochip (b) PS5 (Table A17) in dependence on the yeast concentration cy in DI water.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS5, with DI water.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (F) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS5 | 4.6 × 10−9 | 1.2 × 104 | 7.5 × 10−15 | 9.4 × 106 | - | - | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 | 4.6 × 10−9 | 1.5 × 104 | 7.5 × 10−15 | 9.4 × 106 | 2.6 × 10−6 | 6.2 × 105 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + W1 | 4.5 × 10−9 | 1.5 × 104 | 7.5 × 10−15 | 9.4 × 106 | 2.9 × 10−6 | 2.1 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + W2 | 4.7 × 10−9 | 1.4 × 104 | 7.5 × 10−15 | 9.4 × 106 | 3.5 × 10−6 | 2.3 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + W3 | 4.8 × 10−9 | 1.3 × 104 | 7.5 × 10−15 | 9.4 × 106 | 3.9 × 10−6 | 2.5 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + W4 | 4.9 × 10−9 | 1.2 × 104 | 7.5 × 10−15 | 9.4 × 106 | 4.2 × 10−6 | 4.3 × 104 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + W5 | 5.0 × 10−9 | 1.1 × 104 | 7.5 × 10−15 | 9.4 × 106 | 4.5 × 10−6 | 5.0 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
W20 = 20 µL DI water, W1 = 1 µL DI Water, W2 = 2 µL DI Water, W3 = 3 µL DI Water, W4 = 4 µL DI Water, W5 = 5 µL DI Water.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS5, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (F) | Rp3 (Ω) | Rs (Ω) | Ls(H) |
|---|---|---|---|---|---|---|---|---|
| BS5 | 4.6 × 10−9 | 1.2 × 104 | 7.5 × 10−15 | 9.4 × 106 | - | - | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 | 4.6 × 10−9 | 1.5 × 104 | 7.5 × 10−15 | 9.4 × 106 | 2.6 × 10−6 | 6.2 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + Y1 | 1.3 × 10−8 | 5.3 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.2 × 10−7 | 1.0 × 104 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + Y2 | 1.4 × 10−8 | 5.0 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.4 × 10−7 | 9.9 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + Y3 | 1.7 × 10−8 | 4.9 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.5 × 10−7 | 9.7 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + Y4 | 1.9 × 10−8 | 4.8 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.8 × 10−7 | 9.5 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 + Y5 | 2.2 × 10−8 | 4.5 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.9 × 10−7 | 9.4 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS5, with 10% glucose.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (F) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS5 | 4.6 × 10−9 | 1.2 × 104 | 7.5 × 10−15 | 9.4 × 106 | - | - | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 | 4.6 × 10−9 | 1.5 × 104 | 7.5 × 10−15 | 9.4 × 106 | 2.6 × 10−6 | 6.2 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + G1 | 4.3 × 10−9 | 1.4 × 104 | 7.5 × 10−15 | 9.4 × 106 | 2.9 × 10−6 | 5.0 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + G2 | 4.4 × 10−9 | 1.3 × 104 | 7.5 × 10−15 | 9.4 × 106 | 3.8 × 10−6 | 4.0 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + G3 | 4.5 × 10−9 | 1.1 × 104 | 7.5 × 10−15 | 9.4 × 106 | 4.1 × 10−6 | 2.2 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + G4 | 4.6 × 10−9 | 1.0 × 104 | 7.5 × 10−15 | 9.4 × 106 | 4.5 × 10−6 | 2.1 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + G5 | 4.7 × 10−9 | 0.9 × 104 | 7.5 × 10−15 | 9.4 × 106 | 4.9 × 10−6 | 1.9 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, G1 = 1 µL 10% Glucose, G2 = 2 µL 10% Glucose, G3 = 3 µL 10% Glucose, G4 = 4 µL 10% Glucose, G5 = 5 µL 10% Glucose.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS5, with 10% glucose as medium and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (F) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS5 | 4.6 × 10−9 | 1.2 × 104 | 7.5 × 10−15 | 9.4 × 106 | - | - | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + W20 | 4.6 × 10−9 | 1.5 × 104 | 7.5 × 10−15 | 9.4 × 106 | 3.0 × 10−6 | 6.2 × 102 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + Y1 | 1.3 × 10−8 | 5.3 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.7 × 10−6 | 1.2 × 104 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + Y2 | 1.4 × 10−8 | 5.0 × 103 | 7.5 × 10−15 | 9.4 × 106 | 2.8 × 10−6 | 1.1 × 104 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + Y3 | 1.7 × 10−8 | 4.9 × 103 | 7.5 × 10−15 | 9.4 × 106 | 3.2 × 10−6 | 1.0 × 104 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + Y4 | 1.9 × 10−8 | 4.8 × 103 | 7.5 × 10−15 | 9.4 × 106 | 3.6 × 10−6 | 9.0 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
| BS5 + G20 + Y5 | 2.2 × 10−8 | 4.5 × 103 | 7.5 × 10−15 | 9.4 × 106 | 3.7 × 10−6 | 8.0 × 103 | 2.1 × 10−9 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS5, with added DI water.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS5 | 8.5 × 10−9 | 6.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | - | - | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 | 8.1 × 10−9 | 8.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.4 × 10−7 | 2.8 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + W1 | 7.8 × 10−9 | 8.7 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.6 × 10−7 | 3.7 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + W2 | 7.6 × 10−9 | 8.6 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.5 × 10−7 | 4.2 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + W3 | 7.5 × 10−9 | 8.4 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.6 × 10−7 | 4.3 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + W4 | 7.4 × 10−9 | 8.3 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.7 × 10−7 | 4.4 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + W5 | 7.3 × 10−9 | 8.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.8 × 10−7 | 4.5 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
W20 = 20 µL DI water, W1 = 1 µL DI Water, W2 = 2 µL DI Water, W3 = 3 µL DI Water, W4 = 4 µL DI Water, W5 = 5 µL DI Water.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS5, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS5 | 8.5 × 10−9 | 6.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | - | - | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 | 8.1 × 10−9 | 8.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.4 × 10−7 | 2.8 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + Y1 | 2.1 × 10−9 | 7.8 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.6 × 10−7 | 6.3 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + Y2 | 2.2 × 10−9 | 7.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | 3.5 × 10−7 | 6.1 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + Y3 | 2.4 × 10−9 | 7.3 × 102 | 5.1 × 10−15 | 9.4 × 106 | 6.3 × 10−7 | 5.2 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + Y4 | 2.5 × 10−9 | 6.9 × 102 | 5.1 × 10−15 | 9.4 × 106 | 8.4 × 10−7 | 5.1 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + W20 + Y5 | 2.7 × 10−9 | 6.7 × 102 | 5.1 × 10−15 | 9.4 × 106 | 9.0 × 10−7 | 4.2 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip pS5, with 10% glucose.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS5 | 8.5 × 10−9 | 6.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | - | - | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 | 8.1 × 10−9 | 8.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.4 × 10−6 | 2.8 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + G1 | 8.1 × 10−9 | 9.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 2.1 × 10−6 | 3.7 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + G2 | 7.9 × 10−9 | 8.9 × 102 | 5.1 × 10−15 | 9.4 × 106 | 2.0 × 10−6 | 4.8 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + G3 | 7.8 × 10−9 | 8.8 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.8 × 10−6 | 4.5 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + G4 | 7.7 × 10−9 | 8.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.7 × 10−6 | 4.3 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + G5 | 7.6 × 10−9 | 8.3 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.6 × 10−6 | 4.1 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, G1 = 1 µL 10% Glucose, G2 = 2 µL 10% Glucose, G3 = 3 µL 10% Glucose, G4 = 4 µL 10% Glucose, G5 = 5 µL 10% Glucose.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS5, with 10% glucose as medium and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS5 | 8.5 × 10−9 | 6.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | - | - | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 | 8.1 × 10−9 | 8.1 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.6 × 10−7 | 1.9 × 102 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + Y1 | 2.1 × 10−9 | 7.8 × 102 | 5.1 × 10−15 | 9.4 × 106 | 1.7 × 10−7 | 6.3 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + Y2 | 2.2 × 10−9 | 7.5 × 102 | 5.1 × 10−15 | 9.4 × 106 | 2.5 × 10−7 | 6.0 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + Y3 | 2.4 × 10−9 | 7.3 × 102 | 5.1 × 10−15 | 9.4 × 106 | 3.3 × 10−7 | 5.6 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + Y4 | 2.5 × 10−9 | 6.9 × 102 | 5.1 × 10−15 | 9.4 × 106 | 6.0 × 10−7 | 4.6 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
| PS5 + G20 + Y5 | 2.7 × 10−9 | 6.7 × 102 | 5.1 × 10−15 | 9.4 × 106 | 6.8 × 10−7 | 4.2 × 103 | 3.6 × 10−8 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS6, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3(Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS6 | 1.2 × 10−8 | 1.9 × 102 | 1.3 × 10−10 | 1.5 × 102 | - | - | 4.7 × 10−8 | 2.4 × 10−15 |
| BS6 + varing analyte | 1.2 × 10−8 | 1.9 × 102 | 1.3 × 10−10 | 1.5 × 102 | - | - | 4.7 × 10−8 | 2.4 × 10−15 |
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS6, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS6 | 6.2 × 10−9 | 1.7 × 103 | 8.1 × 10−9 | 6.3 × 102 | - | - | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 | 7.2 × 10−9 | 2.9 × 103 | 8.1 × 10−9 | 6.3 × 102 | 7.2 × 10−5 | 2.6 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 + Y1 | 3.4 × 10−9 | 9.9 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.4 × 10−5 | 6.1 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 + Y2 | 3.6 × 10−9 | 9.6 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.5 × 10−5 | 6.0 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 + Y3 | 3.8 × 10−9 | 9.5 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.6 × 10−5 | 5.8 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 + Y4 | 4.0 × 10−9 | 9.3 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.8 × 10−5 | 5.7 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + W20 + Y5 | 4.1 × 10−9 | 9.2 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.9 × 10−5 | 5.5 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS6, with 10% glucose as medium and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS6 | 6.2 × 10−9 | 1.7 × 103 | 8.1 × 10−9 | 6.3 × 102 | - | - | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 | 7.4 × 10−9 | 3.1 × 103 | 8.1 × 10−9 | 6.3 × 102 | 7.5 × 10−5 | 2.9 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 + Y1 | 3.4 × 10−9 | 9.9 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.6 × 10−5 | 6.7 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 + Y2 | 3.6 × 10−9 | 9.6 × 102 | 8.1 × 10−9 | 6.3 × 102 | 8.9 × 10−5 | 6.4 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 + Y3 | 3.8 × 10−9 | 9.5 × 102 | 8.1 × 10−9 | 6.3 × 102 | 9.0 × 10−5 | 6.0 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 + Y4 | 4.0 × 10−9 | 9.3 × 102 | 8.1 × 10−9 | 6.3 × 102 | 9.1 × 10−5 | 5.9 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
| PS6 + G20 + Y5 | 4.1 × 10−9 | 9.2 × 102 | 8.1 × 10−9 | 6.3 × 102 | 9.4 × 10−5 | 5.8 × 101 | 2.7 × 10−8 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS9, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS9 | 5.5 × 10−9 | 1.7 × 104 | 1.0 × 10−9 | 2.8 × 102 | - | - | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 | 4.1 × 10−9 | 2.4 × 104 | 1.0 × 10−9 | 2.8 × 102 | 3.7 × 10−5 | 4.6 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 + Y1 | 2.4 × 10−8 | 1.9 × 103 | 1.0 × 10−9 | 2.8 × 102 | 8.8 × 10−5 | 7.0 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 + Y2 | 2.6 × 10−8 | 1.8 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.1 × 10−5 | 6.8 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 + Y3 | 2.7 × 10−8 | 1.7 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.3 × 10−5 | 6.7 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 + Y4 | 2.8 × 10−8 | 1.5 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.4 × 10−5 | 6.5 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
| BS9 + W20 + Y5 | 2.9 × 10−8 | 1.3 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.5 × 10−5 | 6.3 × 101 | 3.6 × 10−8 | 2.4 × 10−15 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip BS9, with 10% glucose as medium and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| BS9 | 5.5 × 10−9 | 1.7 × 104 | 1.0 × 10−9 | 2.8 × 102 | - | - | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 | 4.2 × 10−9 | 2.5 × 104 | 1.0 × 10−9 | 2.8 × 102 | 4.8 × 10−5 | 5.2 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 + Y1 | 2.6 × 10−9 | 2.1 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.1 × 10−5 | 8.0 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 + Y2 | 2.8 × 10−9 | 2.0 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.3 × 10−5 | 7.8 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 + Y3 | 2.9 × 10−9 | 1.8 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.4 × 10−5 | 7.7 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 + Y4 | 3.0 × 10−9 | 1.7 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.6 × 10−5 | 7.5 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
| BS9 + G20 + Y5 | 3.1 × 10−9 | 1.5 × 103 | 1.0 × 10−9 | 2.8 × 102 | 9.7 × 10−5 | 7.4 × 101 | 3.0 × 10−8 | 2.4 × 10−15 |
G20 = 20 µL 10% Glucose, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS9, with DI water and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS9 | 6.2 × 10−9 | 1.8 × 103 | 5.6 × 10−9 | 4.7 × 102 | - | - | 4.4 × 10−8 | 2.4 × 10−15 |
| PS9 + varing analyte | 4.1 × 10−8 | 7.9 × 103 | 5.6 × 10−9 | 4.7 × 102 | 1.8 × 10−5 | 2.5 × 101 | 4.4 × 10−8 | 2.4 × 10−15 |
Modeled impedance parameters Cp1, Rp1, Cp2, Rp2, Cp3, Rp3, Rs, and Ls of biochip PS9, with 10% glucose as medium and S. cerevisiae.
| Circuit Element | Cp1 (F) | Rp1 (Ω) | Cp2 (F) | Rp2 (Ω) | Cp3 (Ω) | Rp3 (Ω) | Rs (Ω) | Ls (H) |
|---|---|---|---|---|---|---|---|---|
| PS9 | 6.2 × 10−9 | 1.8 × 103 | 5.6 × 10−9 | 4.7 × 102 | - | - | 4.4 × 10−8 | 2.4 × 10−15 |
| PS9 + varing analyte | 3.6 × 10−8 | 7.3 × 103 | 5.6 × 10−9 | 4.7 × 102 | 2.9x × 10−5 | 3.2 × 101 | 4.4 × 10−8 | 2.4 × 10−15 |
Figure 6Modeled equivalent circuit parameters (dots) and linear fitting curve (red lines) for (a,e,i,m) Rp1, and Cp1 and for (b,f,j,n) Rp3 and CP3 of the biochip BS5,PS5,PS6,BS9 in dependence on the concentration yeast cy in units of 107 cells/mL in DI water and for (c,g,k,o) Rp1 and Cp1 and for (d,h,l,p) Rp3 and CP3 of the biochip BS5, PS5, PS6, BS9 in dependence on the concentration yeast cy in units of 107 cells/mL in the medium with 10% glucose.
Figure 7Equivalent circuit models of biochip without analyte (a) based on the physiochemical structure of biochip and (b) based on the associated RC pairs. The parallel capacitor C2 and resistor R2 are transferred from Cdep and Rss. Equivalent circuit models of biochip with analyte (c) in Maxwell fashion and in (d) Voigt fashion. The Voigt fashion can be transferred into Maxwell fashion while using Equations (1)–(3).
The impedance amplitude for boron doped biochip BS5 with the analyte at 40 Hz, 400 Hz, and 4 kHz (Figure A1).
| |Z|(Ω) @ 40 Hz | |Z|(Ω) @ 400 Hz | |Z|(Ω) @ 4000 Hz | |
|---|---|---|---|
| BS5 + W20 + Y1 | 17945 | 14039 | 8009 |
| BS5 + W20 + Y2 | 16287 | 13138 | 7853 |
| BS5 + W20 + Y3 | 15927 | 12093 | 7466 |
| BS5 + W20 + Y4 | 15690 | 11563 | 7248 |
| BS5 + W20 + Y5 | 15463 | 10920 | 6952 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.
The impedance amplitude for the biochip PS5 with the analyte at 40 Hz, 400 Hz and 4 kHz. (Figure A1).
| |Z|(Ω) @ 40 Hz | |Z|(Ω) @ 400 Hz | |Z|(Ω) @ 4000 Hz | |
|---|---|---|---|
| PS5 + W20 + Y1 | 891 | 881 | 831 |
| PS5 + W20 + Y2 | 885 | 877 | 826 |
| PS5 + W20 + Y3 | 881 | 870 | 815 |
| PS5 + W20 + Y4 | 876 | 864 | 806 |
| PS5 + W20 + Y5 | 871 | 859 | 798 |
W20 = 20 µL DI water, Y1 = 1 µL yeast Saccharomyces, Y2 = 2 µL yeast Saccharomyces, Y3 = 3 µL yeast Saccharomyces, Y4 = 4 µL yeast Saccharomyces, Y5 = 5 µL yeast Saccharomyces.