A new method for selective functionalization of silicon nanowire sensors and Bayesian inversion for its parameters.

In this work, a modification procedure for the functionalization of silicon nanowire (SiNW) is applied in biological field effect transistor (BioFET) system. The proposed method precedes the silanization reaction in a manner that the only SiNW and not its SiO2 substrate is functionalized by (3-Aminopropyl) triethoxysilane (APTES) initiators. This method has an effective role in increasing the sensitivity of BioFET sensors and can be applied in commercial ones. Furthermore, we introduce an efficient computational technique to estimate unknown senor parameters. To that end, Bayesian inversion is used to determine the number of PSA target molecules bound to the receptors in both selective and nonselective SiNWs. The approach is coupled with the Poisson-Boltzmann-drift-diffusion (PBDD) equations to provide a comprehensive system to model all biosensor interactions.