Literature DB >> 31340586

Correction: Design and Simulation of a Wireless SAW-Pirani Sensor with Extended Range and Sensitivity.

Sofia Toto1, Pascal Nicolay2, Gian Luca Morini3, Michael Rapp1, Jan G Korvink1, Juergen J Brandner4.   

Abstract

The authors wish to make the following erratum to Reference [...].

Entities:  

Year:  2019        PMID: 31340586      PMCID: PMC6679520          DOI: 10.3390/s19143243

Source DB:  PubMed          Journal:  Sensors (Basel)        ISSN: 1424-8220            Impact factor:   3.576


The authors wish to make the following erratum to Reference [1]: The Table 2 below contained false reference numbers. The references were corrected. The corrected references are also available below.
Table 2

Detection principles and pressure ranges of micro-electro-mechanical system (MEMS) Pirani gauges.

ResearcherType of GaugePressure Range (Pa)
Van Herwaarden and Sarro, 1988 [9]Heated cantilever combined with thermopile0.13–13,300
Völklein and Schnelle, 1991 [10]Heated resistor combined with thermopile0.13–10
Piotto et al., 2016 [11]Heated resistor with thermopile0.3–105
Mastrangelo and Muller, 1991 [12]Microbridge10–10,000
Swart et al., 1994 [13]Microbridge 13–1.33 × 105
Chae et al., 2004 [14]Microbridge2.6–267
Moelders et al., 2004 [15]Microbridge1.33–133
Doms et al., 2005 [16]Microbridge100–105
Stark et al., 2005 [17]Microbridge1.33–106
Mitchell et al., 2008 [18]Microbridge1.33–105
Khosraviani and Leung, 2009 [19]Microbridge13.3–106
Li et al., 2009 [20]Microbridge10.6–26,665
Jiang et al., 2010 [21]Microbridge0.1–1,000
Chen, 2012 [22]Microbridge133–1.33 × 105
Puers et al., 2002 [23]Microbridge100–107
Moutaouekkil et al., 2015 [24]Microbridge1,000–105
Mailly et al., 2009 [25]Microbridge20–20,000
Robinson et al., 1992 [26]Resistor on dielectric membrane10–13,300
Paul et al., 1994 [27]Resistor on dielectric membrane100–105
Weng and Shie, 1994 [5]Resistor on dielectric membrane1.33 × 10−5–133
Shie et al., 1995 [28]Resistor on dielectric membrane13.3–1.33 × 107
De Jong et al., 2003 [29]Resistor on dielectric membrane10–20,000
Zhang et al., 2006 [30]Resistor on dielectric membrane10–105
Völklein et al., 2013 [3]Resistor on dielectric membrane1.33 × 10−4–1332
Grau et al., 2014 [6]Resistor on dielectric membrane0.13–105
Xiao et al., 2011 [7]Resistor on dielectric membrane1–1,000
Takashima et al., 2008 [31]Resistor on dielectric membrane0.002–105
Jeon et al., 2016 [32]Resistor on dielectric membrane0.013–105
Paul and Baltes, 1995 [33]Resistor on dielectric membrane100–106
Wenzel and Bak, 1998 [34]Resistor on diaphragm10–105
Qiu et al., 2009 [35]Metallic wire1–100
Brun et al., 2012 [36]Silicon nanowire50–105
Ghouila-Houri et al., 2017 [37]Microwire10,000–8 × 105
Schelcher et al., 2011 [38]Ni-microbeam3.3–105
Wang et al., 2010 [39]Microplate0.1–105
Santagata et al., 2011 [40]Tube-shaped0.133–1.33 × 105
Mercier et al., 2012 [41]Cr/Au-resistor on LiNbO3-substrate (SAW device)0.001–105
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1.  Design and Simulation of a Wireless SAW-Pirani Sensor with Extended Range and Sensitivity.

Authors:  Sofia Toto; Pascal Nicolay; Gian Luca Morini; Michael Rapp; Jan G Korvink; Juergen J Brandner
Journal:  Sensors (Basel)       Date:  2019-05-27       Impact factor: 3.576

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Review 1.  Overview of the MEMS Pirani Sensors.

Authors:  Shaohang Xu; Na Zhou; Meng Shi; Chenchen Zhang; Dapeng Chen; Haiyang Mao
Journal:  Micromachines (Basel)       Date:  2022-06-14       Impact factor: 3.523

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