| Literature DB >> 31340586 |
Sofia Toto1, Pascal Nicolay2, Gian Luca Morini3, Michael Rapp1, Jan G Korvink1, Juergen J Brandner4.
Abstract
The authors wish to make the following erratum to Reference [...].Entities:
Year: 2019 PMID: 31340586 PMCID: PMC6679520 DOI: 10.3390/s19143243
Source DB: PubMed Journal: Sensors (Basel) ISSN: 1424-8220 Impact factor: 3.576
Detection principles and pressure ranges of micro-electro-mechanical system (MEMS) Pirani gauges.
| Researcher | Type of Gauge | Pressure Range (Pa) |
|---|---|---|
| Van Herwaarden and Sarro, 1988 [9] | Heated cantilever combined with thermopile | 0.13–13,300 |
| Völklein and Schnelle, 1991 [10] | Heated resistor combined with thermopile | 0.13–10 |
| Piotto et al., 2016 [11] | Heated resistor with thermopile | 0.3–105 |
| Mastrangelo and Muller, 1991 [12] | Microbridge | 10–10,000 |
| Swart et al., 1994 [13] | Microbridge | 13–1.33 × 105 |
| Chae et al., 2004 [14] | Microbridge | 2.6–267 |
| Moelders et al., 2004 [15] | Microbridge | 1.33–133 |
| Doms et al., 2005 [16] | Microbridge | 100–105 |
| Stark et al., 2005 [17] | Microbridge | 1.33–106 |
| Mitchell et al., 2008 [18] | Microbridge | 1.33–105 |
| Khosraviani and Leung, 2009 [19] | Microbridge | 13.3–106 |
| Li et al., 2009 [20] | Microbridge | 10.6–26,665 |
| Jiang et al., 2010 [21] | Microbridge | 0.1–1,000 |
| Chen, 2012 [22] | Microbridge | 133–1.33 × 105 |
| Puers et al., 2002 [23] | Microbridge | 100–107 |
| Moutaouekkil et al., 2015 [24] | Microbridge | 1,000–105 |
| Mailly et al., 2009 [25] | Microbridge | 20–20,000 |
| Robinson et al., 1992 [26] | Resistor on dielectric membrane | 10–13,300 |
| Paul et al., 1994 [27] | Resistor on dielectric membrane | 100–105 |
| Weng and Shie, 1994 [5] | Resistor on dielectric membrane | 1.33 × 10−5–133 |
| Shie et al., 1995 [28] | Resistor on dielectric membrane | 13.3–1.33 × 107 |
| De Jong et al., 2003 [29] | Resistor on dielectric membrane | 10–20,000 |
| Zhang et al., 2006 [30] | Resistor on dielectric membrane | 10–105 |
| Völklein et al., 2013 [3] | Resistor on dielectric membrane | 1.33 × 10−4–1332 |
| Grau et al., 2014 [6] | Resistor on dielectric membrane | 0.13–105 |
| Xiao et al., 2011 [7] | Resistor on dielectric membrane | 1–1,000 |
| Takashima et al., 2008 [31] | Resistor on dielectric membrane | 0.002–105 |
| Jeon et al., 2016 [32] | Resistor on dielectric membrane | 0.013–105 |
| Paul and Baltes, 1995 [33] | Resistor on dielectric membrane | 100–106 |
| Wenzel and Bak, 1998 [34] | Resistor on diaphragm | 10–105 |
| Qiu et al., 2009 [35] | Metallic wire | 1–100 |
| Brun et al., 2012 [36] | Silicon nanowire | 50–105 |
| Ghouila-Houri et al., 2017 [37] | Microwire | 10,000–8 × 105 |
| Schelcher et al., 2011 [38] | Ni-microbeam | 3.3–105 |
| Wang et al., 2010 [39] | Microplate | 0.1–105 |
| Santagata et al., 2011 [40] | Tube-shaped | 0.133–1.33 × 105 |
| Mercier et al., 2012 [41] | Cr/Au-resistor on LiNbO3-substrate (SAW device) | 0.001–105 |