Literature DB >> 27698147

Designing steep, sharp patterns on uniformly ion-bombarded surfaces.

Joy C Perkinson1, Michael J Aziz1, Michael P Brenner1, Miranda Holmes-Cerfon2.   

Abstract

We propose and experimentally test a method to fabricate patterns of steep, sharp features on surfaces, by exploiting the nonlinear dynamics of uniformly ion-bombarded surfaces. We show via theory, simulation, and experiment that the steepest parts of the surface evolve as one-dimensional curves that move in the normal direction at constant velocity. The curves are a special solution to the nonlinear equations that arises spontaneously whenever the initial patterning on the surface contains slopes larger than a critical value; mathematically they are traveling waves (shocks) that have the special property of being undercompressive. We derive the evolution equation for the curves by considering long-wavelength perturbations to the one-dimensional traveling wave, using the unusual boundary conditions required for an undercompressive shock, and we show this equation accurately describes the evolution of shapes on surfaces, both in simulations and in experiments. Because evolving a collection of one-dimensional curves is fast, this equation gives a computationally efficient and intuitive method for solving the inverse problem of finding the initial surface so the evolution leads to a desired target pattern. We illustrate this method by solving for the initial surface that will produce a lattice of diamonds connected by steep, sharp ridges, and we experimentally demonstrate the evolution of the initial surface into the target pattern.

Keywords:  FIB; ion bombardment; shock wave; simulations; steep structure design

Year:  2016        PMID: 27698147      PMCID: PMC5068262          DOI: 10.1073/pnas.1609315113

Source DB:  PubMed          Journal:  Proc Natl Acad Sci U S A        ISSN: 0027-8424            Impact factor:   11.205


  16 in total

1.  Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering.

Authors: 
Journal:  Science       Date:  1999-09-03       Impact factor: 47.728

2.  Ion-beam sculpting at nanometre length scales.

Authors:  J Li; D Stein; C McMullan; D Branton; M J Aziz; J A Golovchenko
Journal:  Nature       Date:  2001-07-12       Impact factor: 49.962

3.  Order, disorder, and phase turbulence.

Authors: 
Journal:  Phys Rev Lett       Date:  1986-07-21       Impact factor: 9.161

4.  Observation and modeling of interrupted pattern coarsening: surface nanostructuring by ion erosion.

Authors:  Javier Muñoz-García; Raúl Gago; Luis Vázquez; José Angel Sánchez-García; Rodolfo Cuerno
Journal:  Phys Rev Lett       Date:  2010-01-12       Impact factor: 9.161

5.  Shocks in ion sputtering sharpen steep surface features.

Authors:  H Henry Chen; Omar A Urquidez; Stefan Ichim; L Humberto Rodriquez; Michael P Brenner; Michael J Aziz
Journal:  Science       Date:  2005-10-14       Impact factor: 47.728

6.  Strategies for fabricating atom probe specimens with a dual beam FIB.

Authors:  M K Miller; K F Russell; G B Thompson
Journal:  Ultramicroscopy       Date:  2005-03       Impact factor: 2.689

7.  Self-organized ordering of nanostructures produced by ion-beam sputtering.

Authors:  Mario Castro; Rodolfo Cuerno; Luis Vázquez; Raúl Gago
Journal:  Phys Rev Lett       Date:  2005-01-03       Impact factor: 9.161

8.  On the reinterpretation of resonances in split-ring-resonators at normal incidence.

Authors:  Carsten Rockstuhl; Falk Lederer; Christoph Etrich; Thomas Zentgraf; Jürgen Kuhl; Harald Giessen
Journal:  Opt Express       Date:  2006-09-18       Impact factor: 3.894

9.  Mass redistribution causes the structural richness of ion-irradiated surfaces.

Authors:  Charbel S Madi; Eitan Anzenberg; Karl F Ludwig; Michael J Aziz
Journal:  Phys Rev Lett       Date:  2011-02-08       Impact factor: 9.161

10.  Linear dynamics of ion sputtered surfaces: instability, stability and bifurcations.

Authors:  Benny Davidovitch; Michael J Aziz; Michael P Brenner
Journal:  J Phys Condens Matter       Date:  2009-05-12       Impact factor: 2.333

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  1 in total

1.  Designer shocks for carving out microscale surface morphologies.

Authors:  Andrea L Bertozzi
Journal:  Proc Natl Acad Sci U S A       Date:  2016-10-04       Impact factor: 11.205

  1 in total

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