Strategies for fabricating atom probe specimens with a dual beam FIB.

A FIB-based lift-out method for preparing atom probe specimens at site specific locations such as coarse precipitates, grain boundaries, interphase interfaces, denuded zones, heat affected zones, implanted, near surface and subsurface regions, shear bands, etc. has been developed. FIB-based methods for the fabrication of atom probe specimens from thin ribbons, sheet stock, and powders have been developed.