| Literature DB >> 25951141 |
Lei Yong Lee1, Michael Boon Chong Khoo1, Sin Yin Teh2, Ming Ha Lee3.
Abstract
The usual practice of using a control chart to monitor a process is to take samples from the process with fixed sampling interval (FSI). In this paper, a synthetic X control chart with the variable sampling interval (VSI) feature is proposed for monitoring changes in the process mean. The VSI synthetic X chart integrates the VSI X chart and the VSI conforming run length (CRL) chart. The proposed VSI synthetic X chart is evaluated using the average time to signal (ATS) criterion. The optimal charting parameters of the proposed chart are obtained by minimizing the out-of-control ATS for a desired shift. Comparisons between the VSI synthetic X chart and the existing X, synthetic X, VSI X and EWMA X charts, in terms of ATS, are made. The ATS results show that the VSI synthetic X chart outperforms the other X type charts for detecting moderate and large shifts. An illustrative example is also presented to explain the application of the VSI synthetic X chart.Entities:
Mesh:
Year: 2015 PMID: 25951141 PMCID: PMC4423939 DOI: 10.1371/journal.pone.0126331
Source DB: PubMed Journal: PLoS One ISSN: 1932-6203 Impact factor: 3.240
Fig 1Conforming run length.
The CRL value represents the number of inspected samples between two consecutive non-conforming samples in the CRL chart. The conforming and non-conforming samples are represented by the hollow and solid dots on the CRL chart, respectively.
Fig 2The VSI chart when m = 2.
The VSI chart is illustrated when two sampling intervals are considered in a process. These sampling intervals are known as the short and long sampling intervals.
Fig 3A graphical illustration of the VSI synthetic chart.
The VSI synthetic chart consists of the sub-chart and the CRL sub-chart. The short and long sampling intervals are used in the sub-chart and the CRL sub-chart.
Optimal parameters (L 1,L 2,k,w,d 4) and the corresponding ATS 1(δopt) for VSI synthetic chart, for sample sizes, n = 3, 5, 7 and 9, and ATS 0 = 370 when d 1, d 2 and d 3 are set as 0.5, 1.5 and 0.5, respectively.
| δopt |
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| 0.1 | 29965 | 103 | 2.75 | 0.67 | 4.1×1076 | 298.94 | 17806 | 95 | 2.74 | 0.67 | 8×1046 | 262.74 | 12908 | 89 | 2.73 | 0.67 | 6.7×1034 | 232.83 | 9851 | 83 | 2.72 | 0.67 | 1.9×1027 | 207.80 |
| 0.2 | 7175 | 75 | 2.71 | 0.67 | 4.4×1020 | 177.26 | 4091 | 60 | 2.68 | 0.67 | 6.5×1012 | 122.45 | 2729 | 50 | 2.65 | 0.67 | 1.4×109 | 89.66 | 1979 | 42 | 2.62 | 0.67 | 1.2×107 | 68.47 |
| 0.3 | 2850 | 51 | 2.65 | 0.67 | 3.1×109 | 92.99 | 1517 | 36 | 2.60 | 0.67 | 582673.04 | 52.49 | 971 | 28 | 2.56 | 0.67 | 10857.71 | 33.64 | 698 | 22 | 2.52 | 0.67 | 1505.24 | 23.38 |
| 0.4 | 1393 | 34 | 2.59 | 0.67 | 259093.10 | 48.39 | 713 | 23 | 2.53 | 0.67 | 1501.67 | 23.82 | 452 | 17 | 2.48 | 0.66 | 168.79 | 14.18 | 311 | 13 | 2.43 | 0.66 | 46.78 | 9.48 |
| 0.5 | 782 | 24 | 2.53 | 0.67 | 2779.96 | 26.20 | 385 | 15 | 2.45 | 0.66 | 95.95 | 11.90 | 238 | 11 | 2.40 | 0.66 | 21.46 | 6.92 | 163 | 8 | 2.35 | 0.66 | 10.28 | 4.65 |
| 0.6 | 471 | 17 | 2.48 | 0.66 | 217.49 | 15.02 | 232 | 11 | 2.40 | 0.66 | 19.49 | 6.61 | 143 | 8 | 2.35 | 0.66 | 7.16 | 3.91 | 98 | 6 | 2.29 | 0.66 | 4.30 | 2.73 |
| 0.7 | 304 | 13 | 2.43 | 0.66 | 42.11 | 9.17 | 146 | 8 | 2.35 | 0.66 | 7.56 | 4.08 | 91 | 6 | 2.29 | 0.66 | 3.76 | 2.54 | 61 | 4 | 2.22 | 0.65 | 2.81 | 1.89 |
| 0.8 | 208 | 10 | 2.38 | 0.66 | 15.65 | 5.96 | 98 | 6 | 2.29 | 0.66 | 4.30 | 2.78 | 60 | 4 | 2.22 | 0.65 | 2.75 | 1.85 | 42 | 3 | 2.16 | 0.65 | 2.17 | 1.47 |
| 0.9 | 147 | 8 | 2.35 | 0.66 | 7.69 | 4.13 | 71 | 5 | 2.26 | 0.66 | 2.95 | 2.07 | 42 | 3 | 2.16 | 0.65 | 2.17 | 1.49 | 30 | 3 | 2.16 | 0.65 | 1.65 | 1.26 |
| 1 | 107 | 6 | 2.29 | 0.66 | 5.14 | 3.04 | 52 | 4 | 2.22 | 0.65 | 2.32 | 1.66 | 32 | 3 | 2.16 | 0.65 | 1.73 | 1.29 | 22 | 2 | 2.08 | 0.65 | 1.57 | 1.14 |
| 1.1 | 81 | 5 | 2.26 | 0.66 | 3.62 | 2.36 | 39 | 3 | 2.16 | 0.65 | 2.02 | 1.42 | 25 | 3 | 2.16 | 0.65 | 1.49 | 1.17 | 17 | 2 | 2.08 | 0.65 | 1.38 | 1.07 |
| 1.2 | 63 | 4 | 2.22 | 0.65 | 2.94 | 1.93 | 31 | 3 | 2.16 | 0.65 | 1.69 | 1.27 | 19 | 2 | 2.08 | 0.65 | 1.45 | 1.10 | 14 | 2 | 2.08 | 0.65 | 1.29 | 1.04 |
| 1.3 | 52 | 4 | 2.22 | 0.65 | 2.32 | 1.64 | 25 | 3 | 2.16 | 0.65 | 1.49 | 1.17 | 15 | 2 | 2.08 | 0.65 | 1.32 | 1.06 | 11 | 2 | 2.08 | 0.65 | 1.20 | 1.02 |
| 1.4 | 40 | 3 | 2.16 | 0.65 | 2.07 | 1.45 | 20 | 2 | 2.08 | 0.65 | 1.49 | 1.11 | 13 | 2 | 2.08 | 0.65 | 1.26 | 1.03 | 9 | 2 | 2.08 | 0.65 | 1.15 | 1.01 |
| 1.5 | 33 | 3 | 2.16 | 0.65 | 1.77 | 1.32 | 17 | 2 | 2.08 | 0.65 | 1.38 | 1.07 | 11 | 2 | 2.08 | 0.65 | 1.20 | 1.02 | 8 | 2 | 2.08 | 0.65 | 1.13 | 1.00 |
| 1.6 | 28 | 3 | 2.16 | 0.65 | 1.58 | 1.22 | 14 | 2 | 2.08 | 0.65 | 1.29 | 1.04 | 9 | 2 | 2.08 | 0.65 | 1.15 | 1.01 | 8 | 2 | 2.08 | 0.65 | 1.13 | 1.00 |
| 1.7 | 23 | 2 | 2.08 | 0.65 | 1.61 | 1.16 | 12 | 2 | 2.08 | 0.65 | 1.23 | 1.02 | 8 | 2 | 2.08 | 0.65 | 1.13 | 1.00 | 6 | 2 | 2.08 | 0.65 | 1.08 | 1.00 |
| 1.8 | 20 | 2 | 2.08 | 0.65 | 1.49 | 1.11 | 10 | 2 | 2.08 | 0.65 | 1.18 | 1.01 | 7 | 2 | 2.08 | 0.65 | 1.10 | 1.00 | 5 | 2 | 2.08 | 0.65 | 1.06 | 1.00 |
| 1.9 | 17 | 2 | 2.08 | 0.65 | 1.38 | 1.08 | 9 | 2 | 2.08 | 0.65 | 1.15 | 1.01 | 6 | 2 | 2.08 | 0.65 | 1.08 | 1.00 | 5 | 2 | 2.08 | 0.65 | 1.06 | 1.00 |
| 2 | 15 | 2 | 2.08 | 0.65 | 1.32 | 1.05 | 8 | 2 | 2.08 | 0.65 | 1.13 | 1.00 | 5 | 2 | 2.08 | 0.65 | 1.06 | 1.00 | 4 | 2 | 2.08 | 0.65 | 1.04 | 1.00 |
| 2.2 | 12 | 2 | 2.08 | 0.65 | 1.23 | 1.02 | 6 | 2 | 2.08 | 0.65 | 1.08 | 1.00 | 5 | 2 | 2.08 | 0.65 | 1.06 | 1.00 | 4 | 2 | 2.08 | 0.65 | 1.04 | 1.00 |
| 2.4 | 10 | 2 | 2.08 | 0.65 | 1.18 | 1.01 | 6 | 2 | 2.08 | 0.65 | 1.08 | 1.00 | 4 | 2 | 2.08 | 0.65 | 1.04 | 1.00 | 3 | 1 | 1.94 | 0.63 | 1.06 | 1.00 |
| 2.6 | 8 | 2 | 2.08 | 0.65 | 1.13 | 1.00 | 4 | 2 | 2.08 | 0.65 | 1.04 | 1.00 | 3 | 1 | 1.94 | 0.63 | 1.06 | 1.00 | 2 | 1 | 1.94 | 0.63 | 1.03 | 1.00 |
| 2.8 | 7 | 2 | 2.08 | 0.65 | 1.10 | 1.00 | 4 | 2 | 2.08 | 0.65 | 1.04 | 1.00 | 3 | 1 | 1.94 | 0.63 | 1.06 | 1.00 | 2 | 1 | 1.94 | 0.63 | 1.03 | 1.00 |
| 3 | 6 | 2 | 2.08 | 0.65 | 1.08 | 1.00 | 3 | 2 | 2.08 | 0.65 | 1.02 | 1.00 | 3 | 1 | 1.94 | 0.63 | 1.06 | 1.00 | 2 | 1 | 1.94 | 0.63 | 1.03 | 1.00 |
Optimal parameters for synthetic , VSI and EWMA charts to minimize ATS 1(δopt) when n = 3, 5, 7 and 9, and ATS0 = 370.
| δopt |
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| Synthetic |
| EWMA | Synthetic |
| EWMA | Synthetic |
| EWMA | Synthetic |
| EWMA | |
| 0.1 | (103, 2.753) | (3, 0.672) | (0.031, 0.167) | (95, 2.741) | (3, 0.672) | (0.015, 0.077) | (89, 2.732) | (3, 0.672) | (0.019, 0.079) | (83, 2.722) | (3, 0.672) | (0.022, 0.077) |
| 0.2 | (75, 2.708) | (3, 0.672) | (0.031, 0.167) | (60, 2.675) | (3, 0.672) | (0.042, 0.159) | (50, 2.648) | (3, 0.672) | (0.054, 0.159) | (42, 2.622) | (3, 0.672) | (0.066, 0.159) |
| 0.3 | (51, 2.651) | (3, 0.672) | (0.053, 0.241) | (36, 2.598) | (3, 0.672) | (0.081, 0.244) | (28, 2.558) | (3, 0.672) | (0.101, 0.236) | (22, 2.519) | (3, 0.672) | (0.122, 0.234) |
| 0.4 | (34, 2.589) | (3, 0.672) | (0.082, 0.316) | (23, 2.526) | (3, 0.672) | (0.120, 0.310) | (17, 2.476) | (3, 0.672) | (0.154, 0.306) | (13, 2.430) | (3, 0.672) | (0.185, 0.302) |
| 0.5 | (24, 2.533) | (3, 0.672) | (0.114, 0.388) | (15, 2.455) | (3, 0.672) | (0.166, 0.380) | (11, 2.402) | (3, 0.672) | (0.213, 0.375) | (8, 2.346) | (3, 0.672) | (0.256, 0.370) |
| 0.6 | (17, 2.476) | (3, 0.672) | (0.150, 0.461) | (11, 2.402) | (3, 0.672) | (0.217, 0.448) | (8, 2.346) | (3, 0.672) | (0.276, 0.440) | (6, 2.294) | (3, 0.672) | (0.330, 0.435) |
| 0.7 | (13, 2.430) | (3, 0.672) | (0.187, 0.528) | (8, 2.346) | (3, 0.672) | (0.270, 0.515) | (6, 2.294) | (3, 0.672) | (0.342, 0.505) | (4, 2.219) | (3, 0.672) | (0.411, 0.502) |
| 0.8 | (10, 2.385) | (3, 0.672) | (0.227, 0.596) | (6, 2.294) | (3, 0.672) | (0.326, 0.580) | (4, 2.219) | (3, 0.672) | (0.418, 0.576) | (3, 2.164) | (3, 0.672) | (0.510, 0.581) |
| 0.9 | (8, 2.346) | (3, 0.672) | (0.269, 0.663) | (5, 2.260) | (3, 0.672) | (0.387, 0.647) | (3, 2.164) | (3, 0.672) | (0.502, 0.652) | (3, 2.164) | (3, 0.672) | (0.608, 0.658) |
| 1 | (6, 2.294) | (3, 0.672) | (0.312, 0.727) | (4, 2.219) | (3, 0.672) | (0.455, 0.721) | (3, 2.164) | (3, 0.672) | (0.591, 0.731) | (2, 2.085) | (3, 0.672) | (0.698, 0.731) |
| 1.1 | (5, 2.260) | (3, 0.672) | (0.357, 0.793) | (3, 2.164) | (3, 0.672) | (0.529, 0.799) | (3, 2.164) | (3, 0.672) | (0.675, 0.808) | (2, 2.085) | (3, 0.672) | (0.772, 0.792) |
| 1.2 | (4, 2.219) | (3, 0.672) | (0.405, 0.861) | (3, 2.164) | (3, 0.672) | (0.603, 0.878) | (2, 2.085) | (3, 0.672) | (0.746, 0.873) | (2, 2.085) | (3, 0.672) | (0.834, 0.845) |
| 1.3 | (4, 2.219) | (3, 0.672) | (0.460, 0.938) | (3, 2.164) | (3, 0.672) | (0.672, 0.952) | (2, 2.085) | (3, 0.672) | (0.804, 0.929) | (2, 2.085) | (3, 0.672) | (0.882, 0.888) |
| 1.4 | (3, 2.164) | (3, 0.672) | (0.517, 1.015) | (2, 2.085) | (3, 0.672) | (0.732, 1.018) | (2, 2.085) | (3, 0.672) | (0.854, 0.978) | (2, 2.085) | (3, 0.672) | (0.922, 0.924) |
| 1.5 | (3, 2.164) | (3, 0.672) | (0.576, 1.097) | (2, 2.085) | (3, 0.672) | (0.783, 1.075) | (2, 2.085) | (3, 0.672) | (0.893, 1.018) | (2, 2.085) | (3, 0.672) | (0.952, 0.953) |
| 1.6 | (3, 2.164) | (3, 0.672) | (0.632, 1.173) | (2, 2.085) | (3, 0.672) | (0.830, 1.129) | (2, 2.085) | (3, 0.672) | (0.925, 1.052) | (2, 2.085) | (3, 0.672) | (0.972, 0.972) |
| 1.7 | (2, 2.085) | (3, 0.672) | (0.683, 1.245) | (2, 2.085) | (3, 0.672) | (0.868, 1.174) | (2, 2.085) | (3, 0.672) | (0.951, 1.080) | (2, 2.085) | (3, 0.672) | (0.985, 0.985) |
| 1.8 | (2, 2.085) | (3, 0.672) | (0.730, 1.311) | (2, 2.085) | (3, 0.672) | (0.902, 1.215) | (2, 2.085) | (3, 0.672) | (0.973, 1.104) | (2, 2.085) | (3, 0.672) | (0.994, 0.994) |
| 1.9 | (2, 2.085) | (3, 0.672) | (0.770, 1.369) | (2, 2.085) | (3, 0.672) | (0.928, 1.248) | (2, 2.085) | (3, 0.672) | (0.983, 1.115) | (2, 2.085) | (3, 0.672) | (0.999, 0.999) |
| 2 | (2, 2.085) | (3, 0.672) | (0.808, 1.425) | (2, 2.085) | (3, 0.672) | (0.950, 1.276) | (2, 2.085) | (3, 0.672) | (0.988, 1.121) | (2, 2.085) | (3, 0.672) | (0.999, 0.999) |
| 2.2 | (2, 2.085) | (3, 0.672) | (0.869, 1.518) | (2, 2.085) | (3, 0.672) | (0.978, 1.313) | (2, 2.085) | (3, 0.672) | (0.999, 1.133) | (2, 2.085) | (3, 0.672) | (0.999, 0.999) |
| 2.4 | (2, 2.085) | (3, 0.672) | (0.918, 1.595) | (2, 2.085) | (3, 0.672) | (0.991, 1.330) | (2, 2.085) | (3, 0.672) | (0.999, 1.133) | (1, 1.943) | (3, 0.672) | (0.999, 0.999) |
| 2.6 | (2, 2.085) | (3, 0.672) | (0.953, 1.652) | (2, 2.085) | (3, 0.672) | (0.997, 1.338) | (1, 1.943) | (3, 0.672) | (0.999, 1.133) | (1, 1.943) | (3, 0.672) | (0.999, 0.999) |
| 2.8 | (2, 2.085) | (3, 0.672) | (0.975, 1.689) | (2, 2.085) | (3, 0.672) | (0.998, 1.340) | (1, 1.943) | (3, 0.672) | (0.999, 1.133) | (1, 1.943) | (3, 0.672) | (0.999, 0.999) |
| 3 | (2, 2.085) | (3, 0.672) | (0.988, 1.711) | (2, 2.085) | (3, 0.672) | (0.998, 1.340) | (1, 1.943) | (3, 0.672) | (0.999, 1.133) | (1, 1.943) | (3, 0.672) | (0.999, 0.999) |
ATS 1(δopt) for the , EWMA , VSI , synthetic and VSI synthetic charts when n = 3, 5, 7 and 9, and ATS0 = 370.
| δopt |
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| EWMA |
| Synthetic | VSI Synthetic |
| EWMA |
| Synthetic | VSI Synthetic |
| EWMA |
| Synthetic | VSI Synthetic |
| EWMA |
| Synthetic | VSI Synthetic | |
| 0.1 | 321.76 |
| 319.77 | 301.24 | 298.94 | 295.45 |
| 292.42 | 265.86 | 262.74 | 272.71 |
| 268.82 | 236.55 | 232.83 | 252.88 |
| 248.26 | 211.98 | 207.80 |
| 0.2 | 227.49 |
| 221.99 | 181.92 | 177.26 | 177.56 |
| 170.54 | 127.65 | 122.45 | 143.79 |
| 135.98 | 94.89 | 89.66 | 119.56 |
| 111.36 | 73.52 | 68.47 |
| 0.3 | 147.40 |
| 139.65 | 98.22 | 92.99 | 99.46 |
| 91.11 | 57.25 | 52.49 | 72.63 |
| 64.44 | 37.78 | 33.64 | 55.78 |
| 48.03 | 26.97 | 23.38 |
| 0.4 | 93.96 |
| 85.61 | 53.05 | 48.39 | 56.55 |
| 48.77 | 27.43 | 23.82 | 38.27 |
| 31.42 | 17.01 | 14.18 | 27.80 |
| 21.86 | 11.75 | 9.48 |
| 0.5 | 60.64 |
| 52.72 | 29.97 | 26.2 | 33.38 |
| 26.91 | 14.48 | 11.90 | 21.37 |
| 16.20 | 8.78 | 6.92 | 14.96 | 5.18 | 10.81 | 6.05 |
|
| 0.6 | 40.00 |
| 33.04 | 17.94 | 15.02 | 20.55 |
| 15.49 | 8.42 | 6.61 | 12.67 | 4.75 | 8.96 | 5.13 |
| 8.69 | 3.92 | 5.91 | 3.60 |
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| 0.7 | 27.05 |
| 21.19 | 11.39 | 9.17 | 13.21 | 4.85 | 9.39 | 5.34 |
| 7.96 | 3.76 | 5.38 | 3.34 |
| 5.43 | 3.11 | 3.62 | 2.43 |
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| 0.8 | 18.77 |
| 13.98 | 7.65 | 5.96 | 8.85 | 3.96 | 6.03 | 3.67 |
| 5.30 | 3.07 | 3.53 | 2.38 |
| 3.64 | 2.54 | 2.47 | 1.81 |
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| 0.9 | 13.37 | 4.88 | 9.52 | 5.41 |
| 6.18 | 3.32 | 4.13 | 2.69 |
| 3.73 | 2.57 | 2.52 | 1.84 |
| 2.62 | 2.11 | 1.86 | 1.46 |
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| 1 | 9.76 | 4.16 | 6.71 | 4.01 |
| 4.49 | 2.83 | 3.00 | 2.10 |
| 2.76 | 2.18 | 1.95 | 1.51 |
| 2.00 | 1.78 | 1.52 | 1.26 |
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| 1.1 | 7.31 | 3.60 | 4.91 | 3.10 |
| 3.39 | 2.44 | 2.32 | 1.72 |
| 2.15 | 1.87 | 1.60 | 1.31 |
| 1.62 | 1.53 | 1.32 | 1.14 |
|
| 1.2 | 5.60 | 3.16 | 3.73 | 2.49 |
| 2.66 | 2.13 | 1.89 | 1.47 |
| 1.76 | 1.63 | 1.39 | 1.18 |
| 1.38 | 1.35 | 1.19 | 1.07 |
|
| 1.3 | 4.40 | 2.80 | 2.94 | 2.06 |
| 2.16 | 1.87 | 1.61 | 1.31 |
| 1.49 | 1.44 | 1.25 | 1.10 |
| 1.23 | 1.22 | 1.11 | 1.04 |
|
| 1.4 | 3.54 | 2.50 | 2.41 | 1.77 |
| 1.81 | 1.66 | 1.42 | 1.20 |
| 1.32 | 1.30 | 1.16 | 1.06 |
| 1.13 | 1.13 | 1.07 | 1.02 |
|
| 1.5 | 2.91 | 2.24 | 2.03 | 1.55 |
| 1.57 | 1.49 | 1.29 | 1.13 |
| 1.20 | 1.19 | 1.10 | 1.03 |
| 1.07 | 1.07 | 1.04 | 1.01 |
|
| 1.6 | 2.44 | 2.02 | 1.76 | 1.40 |
| 1.39 | 1.36 | 1.20 | 1.08 |
| 1.12 | 1.12 | 1.06 | 1.02 |
| 1.04 | 1.04 | 1.02 | 1.00 | 1.00 |
| 1.7 | 2.09 | 1.84 | 1.57 | 1.29 |
| 1.27 | 1.25 | 1.14 | 1.05 |
| 1.07 | 1.07 | 1.04 | 1.01 |
| 1.02 | 1.02 | 1.01 | 1.00 | 1.00 |
| 1.8 | 1.83 | 1.67 | 1.43 | 1.20 |
| 1.18 | 1.17 | 1.09 | 1.03 |
| 1.04 | 1.04 | 1.02 | 1.00 | 1.00 | 1.01 | 1.01 | 1.00 | 1.00 | 1.00 |
| 1.9 | 1.63 | 1.54 | 1.32 | 1.14 |
| 1.12 | 1.12 | 1.06 | 1.02 |
| 1.02 | 1.02 | 1.01 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 2 | 1.47 | 1.42 | 1.24 | 1.10 |
| 1.08 | 1.08 | 1.04 | 1.01 |
| 1.01 | 1.01 | 1.01 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 2.2 | 1.26 | 1.25 | 1.13 | 1.05 |
| 1.03 | 1.03 | 1.01 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 2.4 | 1.14 | 1.14 | 1.07 | 1.02 |
| 1.01 | 1.01 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 2.6 | 1.07 | 1.07 | 1.04 | 1.01 |
| 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 2.8 | 1.03 | 1.03 | 1.02 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
| 3 | 1.01 | 1.01 | 1.01 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 |
Flow width measurements (μm) for the hard-bake process.
| Sample number, | Wafers |
| Cumulative time |
| ||||
|---|---|---|---|---|---|---|---|---|
| 1 | 2 | 3 | 4 | 5 | ||||
| 1 | 1.4483 | 1.5458 | 1.4538 | 1.4303 | 1.6206 | 1.4998 | 1.0 | |
| 2 | 1.5435 | 1.6899 | 1.5830 | 1.3358 | 1.4187 | 1.5142 | 2.5 | |
| 3 | 1.5175 | 1.3446 | 1.4723 | 1.6657 | 1.6661 | 1.5332 | 4.0 | |
| 4 | 1.5454 | 1.0931 | 1.4072 | 1.5039 | 1.5264 | 1.4152 | 5.5 | |
| 5 | 1.4418 | 1.5059 | 1.5124 | 1.4620 | 1.6263 | 1.5097 | 6.0 | |
| 6 | 1.4301 | 1.2725 | 1.5945 | 1.5397 | 1.5252 | 1.4724 | 7.5 | |
| 7 | 1.4981 | 1.4506 | 1.6174 | 1.5837 | 1.4962 | 1.5292 | 9.0 | |
| 8 | 1.3009 | 1.5060 | 1.6231 | 1.5831 | 1.6454 | 1.5317 | 10.5 | |
| 9 | 1.4132 | 1.4603 | 1.5808 | 1.7111 | 1.7313 | 1.5793 | 12.0 | |
| 10 | 1.3817 | 1.3135 | 1.4953 | 1.4894 | 1.4596 | 1.4279 | 12.5 | |
| 11 | 1.5765 | 1.7014 | 1.4026 | 1.2773 | 1.4541 | 1.4824 | 13.0 | |
| 12 | 1.4936 | 1.4373 | 1.5139 | 1.4808 | 1.5293 | 1.4910 | 14.5 | |
| 13 | 1.5729 | 1.6738 | 1.5048 | 1.5651 | 1.7473 | 1.6128 | 16.0 | |
| 14 | 1.8089 | 1.5513 | 1.8250 | 1.4389 | 1.6558 | 1.6560 | 16.5 | 14 |
| 15 | 1.6236 | 1.5393 | 1.6738 | 1.8698 | 1.5036 | 1.6420 | 17.0 | 1 |
Fig 4The VSI synthetic chart for the flow width measurements.
This chart is used to monitor the flow width measurements (in micrometres, μm) for the hard-bake process. The chart signals an out-of-control at the 15th sample which corresponds to the 17th hour from the start of the process.