Design and experimental tests of a dual-servo piezoelectric nanopositioning stage for rotary motion.

A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this article. A piezoelectric actuator is employed to achieve both the coarse motion and fine motion. By the coarse motion and fine motion, the designed dual-servo nanopositioning stage can obtain large-range rotary motion and high resolution simultaneously. The configuration and motion principle of the dual-servo nanopositioning stage were illustrated and discussed. A prototype was fabricated to test the working performance and the results demonstrate that the maximum speed of the presented dual-servo nanopositioning stage is 32,000 μrad/s and the rotary resolution is about 1.54 μrad. The working performance confirms the feasibility of the dual-servo nanopositioning stage.