We present metallic nanohole arrays fabricated on suspended membranes as an optofluidic substrate. Millimeter-sized suspended nanohole arrays were fabricated using nanoimprint lithography. We demonstrate refractive-index-based tuning of the optical spectra using a sucrose solution for the optimization of SERS signal intensity, leading to a Raman enhancement factor of 107. Furthermore, compared to dead-ended nanohole arrays, suspended nanohole arrays capable of flow-through detection increased the measured SERS signal intensity by 50 times. For directed transport of analytes, we present a novel methodology utilizing surface tension to generate spontaneous flow through the nanoholes with flow rates of 1 μL/min, obviating the need for external pumps or microfluidic interconnects. Using this method for SERS, we obtained a 50 times higher signal as compared to diffusion-limited transport and could detect 100 pM 4-mercaptopyridine. The suspended nanohole substrates presented herein possess a uniform and reproducible geometry and show the potential for improved analyte transport and SERS detection.
We present metallic nanohole arrays fabricated on suspended membranes as an optofluidic substrate. Millimeter-sized suspended nanohole arrays were fabricated using nanoimprint lithography. We demonstrate refractive-index-based tuning of the optical spectra using a sucrose solution for the optimization of SERS signal intensity, leading to a Raman enhancement factor of 107. Furthermore, compared to dead-ended nanohole arrays, suspended nanohole arrays capable of flow-through detection increased the measured SERS signal intensity by 50 times. For directed transport of analytes, we present a novel methodology utilizing surface tension to generate spontaneous flow through the nanoholes with flow rates of 1 μL/min, obviating the need for external pumps or microfluidic interconnects. Using this method for SERS, we obtained a 50 times higher signal as compared to diffusion-limited transport and could detect 100 pM 4-mercaptopyridine. The suspended nanohole substrates presented herein possess a uniform and reproducible geometry and show the potential for improved analyte transport and SERS detection.
The
emerging field of optofluidics explores new possibilities to
combine optical detection techniques with micro- and nanofluidics[1−3] to develop miniaturized optical sensors with improved performance.
The analytical techniques commonly used include surface plasmon resonance
(SPR), surface-enhanced Raman spectroscopy (SERS), and fluorescence
imaging.[4] SERS, a powerful technique for
biosensing and chemical identification, largely depends on the drastic
enhancement of weak Raman signal obtained from analyte molecules,
upon their interaction with optical near-fields of metallic nanostructures.[5,6] As an analytical technique, SERS combines the benefits of label-free
sensing, high sensitivity, and chemical specificity. An important
aim is to further improve the capabilities of SERS for diverse applications
such as healthcare and environmental monitoring using substrates that
can be fabricated reproducibly and have a uniform geometry.[7] As the enhancement of electromagnetic fields
occurs in nanoscale regions, termed as plasmonic hotspots, integration
of microfluidics capable of directing the analyte flow and resultant
concentration toward these hotspots can improve the sensitivity and
reduce the detection time for SERS.[8−11] Among various options, we explore
metallic nanohole arrays fabricated in suspended silicon nitride (Si3N4) membranes because they provide a unique option
to integrate SERS with flow-through sensing, which has yet to be shown
experimentally.Nanohole arrays in thin metallic films can act
as plasmonic substrates
with multifarious applications. Enhancement of the electromagnetic
field and extraordinary optical transmission (EOT) through the nanoholes
has led to their application in plasmonic sensing.[12−15] Primarily, they have been used
as a platform for SPR refractive-index sensing.[16−20] While groups have demonstrated nanohole-enhanced
Raman spectroscopy,[21−24] the reported Raman enhancement factors (below ∼105) are weaker than that of other SERS substrates. These previous experiments
relied on low-throughput fabrication techniques such as focused ion
beam (FIB) or electron-beam lithography to pattern nanoholes in a
metal film. Suspended nanohole arrays have been utilized for SPR sensing,
but have not been utilized for SERS. Flow-through suspended nanoholes
have been utilized for overcoming diffusion-limited transport in SPR
sensing.[10,11,25−27] Most of these methods, however, require external sources for generating
pressure gradients, which can often damage the fragile membrane, and
microfluidic tubing or an external power supply for creating an electric
field. A simple and robust sample delivery mechanism is needed for
flow-through sensing.In this work, nanoimprint lithography
(NIL)[28−31] is used to fabricate periodic
Ag nanohole arrays over a millimeter-sized suspended silicon nitride
(Si3N4) membrane with high throughput and reproducibility.
To improve the Raman enhancement factor (EF) on these large-area substrates,
plasmon resonances of suspended nanohole arrays are precisely tuned
using a sucrose solution. We report a high Raman EF of up to 107 for silver-coated suspended nanoholes using this technique.
Furthermore, suspended nanohole arrays are capable of fast flow through
the nanoholes driven by surface tension forces, which promote adsorption
of the analytes toward the plasmonic hotspot and further boost the
SERS signal by 50 times compared to diffusion-limited transport. Using
this optofluidic SERS substrate, we detect a 100 pM 4-mercaptopyridine
(4-MP) sample.
Experimental Methods
Fabrication
of Large-Area Suspended Nanohole Arrays
Suspended nanohole
arrays were fabricated over a region of 1 mm2 in size using
nanoimprint lithography (NIL), as shown in
Figure 1a–c. Low-stress silicon nitride
(200 nm) was deposited on both sides of single-sided polished (100)
silicon wafers using low-pressure chemical vapor deposition (LPCVD).
These wafers were then patterned using photolithography and dry etching
such that some regions on the back of the wafers had nitride removed,
exposing the silicon. Nanoimprint resist was then spun over the top
surface of the wafer. A nanoimprint mold was carefully placed on the
resist so that it aligned well with patterns etched on the back of
the wafer. The mold used for nanoimprinting had pillars with a 200
nm diameter, 500 nm periodicity, and 300 nm pillar height over a 1
cm × 1 cm area. Nanoimprinting generated nanohole patterns in
the resist layer. The sample was further processed to etch the nanohole
arrays into the top nitride layer. The etching was done for a fixed
time period such that the holes go about two-thirds of the way into
the nitride. This was necessary to protect the silicon from subsequent
KOH etching. The nanoimprint resist was then cleaned off, and samples
were placed in a KOH bath for anisotropic etching. A suspended nitride
membrane with nanohole array patterns was obtained. The samples were
further dry-etched to remove the remaining nitride from the bottom
of the nanoholes and obtain suspended open-ended nanoholes. Silver
(120 nm) was then deposited on the top of the samples using an electron-beam
evaporator.
Figure 1
Fabrication of suspended nanohole array chip. (a) A silicon chip
after 200 nm low-stress nitride deposition and photolithography to
expose desired regions on the backside. (b) Nanoimprinting and dry
etching was performed to transfer the nanohole array pattern to the
top nitride membrane. Nanoimprint resist was then washed away. (c)
Anisotropic KOH etching of silicon was used to obtain the suspended
nitride membrane. A final dry etch removed the remaining nitride from
the bottom of the holes. Silver was then evaporated from the top to
obtain suspended metallic nanohole arrays. (d) A 1 in. × 1 in.
chip with a 1 cm × 1 cm nanoimprinted region in the center. The
nanoimprinted region further has a 1 mm × 1 mm suspended membrane
in the center (circled). (e) SEM image of the suspended membrane with
nanoholes. (f) SEM shows magnified image of the individual nitride
nanoholes.
Fabrication of suspended nanohole array chip. (a) A silicon chip
after 200 nm low-stress nitride deposition and photolithography to
expose desired regions on the backside. (b) Nanoimprinting and dry
etching was performed to transfer the nanohole array pattern to the
top nitride membrane. Nanoimprint resist was then washed away. (c)
Anisotropic KOH etching of silicon was used to obtain the suspended
nitride membrane. A final dry etch removed the remaining nitride from
the bottom of the holes. Silver was then evaporated from the top to
obtain suspended metallic nanohole arrays. (d) A 1 in. × 1 in.
chip with a 1 cm × 1 cm nanoimprinted region in the center. The
nanoimprinted region further has a 1 mm × 1 mm suspended membrane
in the center (circled). (e) SEM image of the suspended membrane with
nanoholes. (f) SEM shows magnified image of the individual nitride
nanoholes.
Raman Spectroscopy
For Raman measurements of benzenethiol
(BZT) and 4-MP solutions, a quartz cuvette with a 1 mm path length
was used. A 785 nm diode laser with an incident power of 10 mW was
loosely focused onto the sample using a 10× objective. The Raman
scattered light was collected in transmission mode using a 50×
objective (NA 0.5) and passed onto a spectrometer (Ocean Optics QE65000)
through a multimode fiber after removing the excitation light with
a notch filter. The acquisition time was 30 s. Neat BZT (∼10
M) and 0.6 M 4-MP solution were used to acquire the Raman spectra.
For formation of a self-assembled monolayer (SAM), chips were placed
in 1 mM BZT (eth.) or 1 mM 4-MP (aq.) overnight. They were then rinsed
thrice with ethanol (BZT samples) or deionized (DI) water (4-MP samples)
over a period of 30 min. The parameters used for calculation of the
enhancement factor are described in the Supporting
Information.
Optical Analysis
The chips were
placed on a Nikon Eclipse
LV 100 upright microscope stage with a 10× objective, and a fiber-optic
spectrometer was used to record transmission spectra through the nanoholes.
Sucrose solutions of desired concentrations (0–1.5 M) were
used to tune the transmission spectra. The SERS signal was then obtained
from the samples. ImageJ software was used for analysis and coloring of the images.
Data plots were prepared using Matlab (MathWorks, Inc.) and GraphPad
Prism version 5.04 (GraphPad Software, Inc.).
Computational Modeling
Three-dimensional (3D) finite-difference
time-domain (FDTD) simulations around the suspended nanoholes were
performed using FullWAVE simulation software. (RSoft, Inc.) A single
hole was simulated with periodic boundary conditions on the faces
intersected by the metal film to represent an infinite hole array
and absorbing boundary conditions on the final two faces. A grid size
of 3 nm was used around the hole in all dimensions. The index of refraction
for the nitride was set at 2, the optical constants for silver were
measured via ellipsometry, and the refractive indices of materials
surrounding the hole array were varied. The excitation wavelength
was set to 785 nm to match experiments.
Surface-Tension-Induced
Flow
A 30 nm thick SiO2 film was deposited on
the back of the samples using an electron-beam
evaporator. Using this directional deposition technique, the sidewalls
of the nanoholes, which lie parallel to the direction of evaporation,
were coated with a much thinner layer of silica. The desired volume
of aqueous solution was then added to the top surface of the chips,
as shown in Figure 4.
Figure 4
Schematic for
surface-tension-induced flow through nanoholes. (a)
Aqueous solution is placed over the nanoholes. The top metal surface
is hydrophobic, whereas the silica layer within the holes and on the
backside of the chip is hydrophilic. (b) Hydrophilic nanohole sidewalls
suck in the solution, driving the flow toward the back of the chip
(shown as red arrows). (c–e) Bright-field images showing flow
of a 2 μL drop of water through the suspended nanohole array
within 2 min. The water drop shrinks as it is sucked in through the
hydrophilic nanohole sidewalls.
Bead and 4-MP Concentration
Fluorescent polystyrene
beads were obtained from Bangs Laboratories (poly(Styrene/2%DiVinylBenzene/Vinyl-COOH),
mean diameter: 2.19 μm) and were used at a final concentration
of 106 beads/mL in DI water. A 10 μL solution containing
beads was added on the top of the chips for the three cases I, II,
and III, as shown in Figure 5. The samples
were left undisturbed until the solution was consumed through evaporation
or flow. The top was then imaged using a fluorescence microscope to
monitor accumulation of particles. For SERS measurements, a 4-MP solution
of desired concentration and volume was added to the top of the chips
and allowed to completely flow through. Sucrose solution was used
to obtain the optimized SERS signal from the chips, as discussed earlier.
In the case of loss in the volume of sucrose from the top of the chip
due to flow-through, fresh sucrose solution was added to the sensing
region.
Figure 5
Bead concentration and time taken for
consumption of solution over
nanohole arrays for three cases. (a) Case I: Accumulation of 2 μm
polystyrene beads after evaporation of a 10 μL drop over dead-ended
nanohole arrays. The schematic shows cross section of a single dead-ended
nanohole for this case. (b) Case II: The same experiment performed
over suspended nanohole arrays with metal-coated (hydrophobic) sidewalls.
Evaporation from open end of nanoholes promotes directed flow and
concentration. (c) Case III: These samples had silica deposited on
the back surface and sidewalls, resulting in surface-tension-directed
flow. (d–f) Surface plots corresponding to (a–c) representing
the intensity of fluorescence over the suspended membrane. (g) Average
fluorescence intensity calculated from beads accumulated over the
suspended membranes after 3 rounds of experiments. These results demonstrate
that Case III surface-tension-induced flow-through promotes the most
effective concentration of particles over the nanoholes and is an
order of magnitude faster than purely evaporation-driven concentration.
Results and Discussion
Suspended
metallic nanohole arrays were fabricated on low-stress
silicon nitride (Si3N4) membranes using NIL
(Figure 1a–c). One such chip with a
1 cm × 1 cm area of imprinted nanohole arrays is shown in Figure 1d. The suspended membrane region, approximately
1 mm × 1 mm defined by KOH wet etching of Si, consisting of open-ended
nanoholes is also indicated. A scanning electron micrograph (SEM)
shows uniform suspended nanohole arrays (Figure 1e). An SEM image at higher magnification shows individual nanoholes
in the silicon nitride membrane (Figure 1f).
The holes are approximately 200 nm in diameter, and the array has
a periodicity of 500 nm. Silver (thickness 120 nm) was deposited over
the chips using electron-beam evaporation.Optimization of SERS
signal requires tuning of the plasmon resonances
of the metallic substrate such that, for a given laser wavelength,
there is maximum enhancement of electromagnetic field around nanoholes.
Generally, modification of the design of the plasmonic substrate such
as changing the periodicity of nanohole arrays or altering the wavelength
of the laser source is used for this tuning.[21,22,32] Here, we present a simple method to achieve
desired plasmon resonance conditions on suspended nanohole arrays
using refractive-index-based tuning. It has been established that
surface-plasmon-mediated transmission can be modulated by the refractive
index at the metal–dielectric interface. In fact, the shift
in transmission peaks of nanohole arrays due to change in refractive
index close to the sensor surface has been used for biosensing.[16−19] We utilized this intrinsic property of metallic nanohole arrays
to tune the resonance peaks. Here, we used sucrose solutions of appropriate
concentration on the nanohole array surface to shift the transmission
spectra as desired and tested the evolution of the SERS signal. Sugars
like glucose and sucrose have been reported to be very difficult to
detect using SERS owing to their small normal cross section and negligible
adsorption to bare metal surfaces.[33] This
property makes them suitable to be used on a SERS substrate without
adding unwanted Raman peaks.The schematic for SERS measurement
and the steps for signal optimization
from the suspended nanohole array chips are illustrated in Figure 2a. BZT and 4-MP were used to characterize the SERS
response of the chips as these molecules are known to have large scattering
cross sections and can easily form self-assembled monolayers (SAMs)
owing to thiol–metal bonding on gold or silver. Chips with
4-MP SAM layers were used for the results shown in Figure 2. By increasing the concentration of the added sucrose
solution, the transmission peak can be shifted to longer wavelengths.
Upon addition of approximately 1 M sucrose solution, the transmission
peak at 600 nm corresponding to the (1,0) silver–air interface
was shifted to 785 nm (Figure 2b).
Figure 2
Optimized SERS
from suspended nanohole arrays. (a) Schematics showing
the process of obtaining a SERS signal from chips with air as dielectric
media, resonance tuning using sucrose to improve the signal, and index
matching to further optimize the signal. (b) Figure showing normalized
transmission maxima at around 600 nm corresponding to (1,0) metal–air
interface shifts to 785 nm after addition of the desired concentration
of sucrose. (c) SERS signal obtained from the same spot on the chip
with the transmission peak tuned to different wavelengths. (d) SERS
signal obtained from the same spot before and after index matching.
There is close to 3 times increase in signal after index matching.
(e) SERS signal obtained from 4-MP SAM layers on suspended nanohole
arrays as compared to FIB milled dead-ended nanoholes. The signal
from suspended nanoholes is about 50 times higher than that obtained
from dead-ended samples.
Optimized SERS
from suspended nanohole arrays. (a) Schematics showing
the process of obtaining a SERS signal from chips with air as dielectric
media, resonance tuning using sucrose to improve the signal, and index
matching to further optimize the signal. (b) Figure showing normalized
transmission maxima at around 600 nm corresponding to (1,0) metal–air
interface shifts to 785 nm after addition of the desired concentration
of sucrose. (c) SERS signal obtained from the same spot on the chip
with the transmission peak tuned to different wavelengths. (d) SERS
signal obtained from the same spot before and after index matching.
There is close to 3 times increase in signal after index matching.
(e) SERS signal obtained from 4-MP SAM layers on suspended nanohole
arrays as compared to FIB milled dead-ended nanoholes. The signal
from suspended nanoholes is about 50 times higher than that obtained
from dead-ended samples.SERS spectra were obtained from the sample with variation
in the
position of the transmission peak of the nanoholes (Figure 2c). These measurements were taken from the same
spot on the sample to avoid any other sources of variation in signal.
As expected, the maximum SERS signal was obtained when the peak transmission
wavelength of the nanoholes matched the laser wavelength at 785 nm.
Upon adding the same sucrose solution to the backside cavity of the
suspended nanohole array membrane, a further increase (up to 300%)
in the SERS signal was observed (Figure 2d).
It has been known that surface-plasmon-enhanced transmission through
nanoholes can be enhanced up to an order of magnitude by matching
the refractive index on either side of the metal film.[34]Three-dimensional (3D) finite-difference
time-domain (FDTD) simulations
were performed to demonstrate the increase in the plasmonic field
around the nanohole arrays with refractive-index-based tuning (Figure 3). In the first case, air was used as the refractive
index medium and weak plasmonic hotspots can be observed at the edges
of the nanoholes (Figure 3a). With the addition
of sucrose and filling of the nanoholes such that the transmission
maxima is in resonance with the excitation wavelength (785 nm), more
than an order of magnitude enhancement of the plasmonic field at the
hotspots can be observed (Figure 3b,c). A further
increase in electric field was obtained with sucrose present on both
sides of the sample as well as inside the nanoholes (Figure 3d). The increase in electric field observed in these
FDTD simulations correlates qualitatively with the measured increase
in SERS signal (Figure 2c,d). For further comparison,
samples with dead-ended hole arrays were prepared using FIB milling;
120 nm thick silver was deposited on suspended nitride membranes and
nanoholes with diameter 200 nm and periodicity 500 nm were milled
through the silver but not through the nitride membrane. These samples
were also placed in a solution of 4-MP overnight to form a SAM layer.
To measure the SERS signal from the dead-ended hole array samples,
a drop of sucrose solution was added to the substrate such that the
transmission peak matches the laser wavelength. The SERS signal obtained
from an FIB milled dead-ended hole array sample as compared to the
signal obtained from the suspended nanohole array under optimized
transmission conditions is shown in Figure 2e. The signal obtained from suspended nanoholes was approximately
50 times higher as compared to dead-ended samples (Figure 2e). This difference could be attributed to a combination
of a number of factors, including refractive index matching between
the top and bottom sides of the suspended nanoholes, improved transmission,
and nanoscale variations in geometry of the nanohole edges (hotspots)
obtained via nanoimprinting as compared to ion milling.
Figure 3
Three-dimensional
FDTD simulations for suspended nanohole arrays
with an excitation wavelength of 785 nm. Electric field intensity
with (a) air as the dielectric medium around and inside the suspended
nanoholes. (b) Sucrose present on the top metal surface. Air present
inside and at the bottom end of the nanoholes. (c) Sucrose present
on the top silver surface and filling top half of the nanoholes, whereas
air is present elsewhere. Concentration of sucrose is adjusted such
that the transmission maxima through the nanoholes matches the excitation
wavelength (785 nm). (d) Sucrose present on both sides and completely
filling the nanoholes.
Three-dimensional
FDTD simulations for suspended nanohole arrays
with an excitation wavelength of 785 nm. Electric field intensity
with (a) air as the dielectric medium around and inside the suspended
nanoholes. (b) Sucrose present on the top metal surface. Air present
inside and at the bottom end of the nanoholes. (c) Sucrose present
on the top silver surface and filling top half of the nanoholes, whereas
air is present elsewhere. Concentration of sucrose is adjusted such
that the transmission maxima through the nanoholes matches the excitation
wavelength (785 nm). (d) Sucrose present on both sides and completely
filling the nanoholes.Raman signals obtained from neat solutions of 4-MP and BZT
were
used to calculate enhancement factors for the chips. The vibration
bands used for this calculation correspond to the in-plane ring breathing
mode coupled to the C–S stretching for the BZT and 4-MP samples.[35] When BZT adsorbed to the silver surface, the
vibration band was observed to shift from 1092 to 1072 cm–1. Similarly for 4-MP, the vibration band shifted from 1115 cm–1 in aqueous solution to 1099 cm–1 upon adsorbing to the silver surface. Enhancement factors of ∼107 were obtained for the suspended nanoholes for both 4-MP and
benzenethiol samples. These numbers were obtained repeatedly over
multiple spots on different samples using both BZT and 4-MP as analytes.
In comparison, previous studies on nanohole array SERS[21,22,24] have reported EFs in the range
of 104–105. This improvement in the EF
values (∼100 times) obtained by our system confirms that suspended
nanohole arrays can be used as excellent SERS substrates.Nanohole-based
biosensors with integrated flow-through fluidics
can provide one route to overcome diffusion-limited transport of analytes,
improving the detection time and detection limit of the sensor.[10,11] To facilitate the flow-through process, silica (30 nm), which is
hydrophilic, was deposited on the backside of the chips using electron-beam
evaporation. As this deposition technique is highly directional, the
sidewalls of the nanoholes, which lie parallel to the direction of
evaporation, were coated with a much thinner layer of silica. The
addition of the silica layer on the opposite side of sample injection
drastically altered the flow properties of the chip. Figure 4 shows the schematic
of chips with silica on the backside, and a hydrophobic top surface.
When an aqueous solution of analyte or particles was placed on the
top of the chip, flow through the nanoholes was initiated as soon
as the solution came into contact with the hydrophilic inner walls.
The solution then flowed and spread on the back surface of the chip.
Figure 4c–e shows snapshots of the flow
in process, where a 2 μL drop of water disappears through the
nanohole membrane within 2 min. For membranes of size 1 mm2, we obtained an approximate flow rate of 1 μL/min.Schematic for
surface-tension-induced flow through nanoholes. (a)
Aqueous solution is placed over the nanoholes. The top metal surface
is hydrophobic, whereas the silica layer within the holes and on the
backside of the chip is hydrophilic. (b) Hydrophilic nanohole sidewalls
suck in the solution, driving the flow toward the back of the chip
(shown as red arrows). (c–e) Bright-field images showing flow
of a 2 μL drop of water through the suspended nanohole array
within 2 min. The water drop shrinks as it is sucked in through the
hydrophilic nanohole sidewalls.The effect of flow-through concentration as compared to diffusion-limited
adsorption or evaporation-driven concentration over suspended nanoholes
was visualized using fluorescent 2 μm polystyrene beads. In
Figure 5, we compare
the accumulation of polystyrene beads (106 beads/mL) in
three cases: (I) where the holes were dead-ended; (II) where the holes
were open and concentration was driven by evaporation through the
open-end of the nanoholes; and (III) holes were open and silica was
deposited on the backside, leading to flow and concentration. Schematics
for the cross section of a single nanohole accompany the fluorescence
images for each of the three cases in Figure 5(a–c). During the evaporation of a liquid drop on a surface,
evaporation of solution from the pinned outer edges generates an outward
flow and concentrates particles at the edges. This phenomenon, known
as the “coffee stain effect”,[36] is clearly visible in images (a) and (b) in Figure 5. The particles were randomly distributed within the area
of the drop, as shown in Figure 5a, as their
position was determined by diffusion and the outer flow. In case II,
open-ended holes with no silica also promoted evaporation-based localized
flow and accumulation of particles over the nanohole array was obtained.
There was no significant difference in the time scales of evaporation
for cases I and II. For case III (open-ended holes with silica), the
flow was based on surface tension and the time scale was an order
of magnitude less than evaporation-based methods. This case demonstrates
a significantly higher concentration as most of the solution was directed
to flow through the nanoholes, improving particle aggregation over
the holes (Figure 5c). The absence of a prominent
outer ring for the drop indicates the dominance of nanohole directed
flow and the relatively shorter time scale of the process. Surface
plots revealing the intensity of fluorescence for these three cases
are shown in Figure 5(d–f). The average
fluorescence from the accumulated beads over the suspended membrane
area was calculated over three rounds of experiments and is shown
in Figure 5g.Bead concentration and time taken for
consumption of solution over
nanohole arrays for three cases. (a) Case I: Accumulation of 2 μm
polystyrene beads after evaporation of a 10 μL drop over dead-ended
nanohole arrays. The schematic shows cross section of a single dead-ended
nanohole for this case. (b) Case II: The same experiment performed
over suspended nanohole arrays with metal-coated (hydrophobic) sidewalls.
Evaporation from open end of nanoholes promotes directed flow and
concentration. (c) Case III: These samples had silica deposited on
the back surface and sidewalls, resulting in surface-tension-directed
flow. (d–f) Surface plots corresponding to (a–c) representing
the intensity of fluorescence over the suspended membrane. (g) Average
fluorescence intensity calculated from beads accumulated over the
suspended membranes after 3 rounds of experiments. These results demonstrate
that Case III surface-tension-induced flow-through promotes the most
effective concentration of particles over the nanoholes and is an
order of magnitude faster than purely evaporation-driven concentration.These results illustrate that
surface-tension-induced flow through
nanoholes promotes the most efficient concentration of particles and
is at least an order of magnitude faster as compared to evaporation-based
techniques. This principle can also be utilized for overcoming diffusion-limited
interaction of analytes with the nanoholes for plasmonic sensing.
For small analyte molecules, the passive flow generated by surface
tension forces drives them to pass within less than 100 nm (radius
of the nanoholes) of the hotspot, i.e., edge of the nanoholes and
the nanohole sidewalls. This short distance can be easily overcome
by diffusion of analyte molecules increasing the probability of the
analytes adsorbing on or close to the plasmonic hotspots, which can
lead to enhancement of the Raman signal of analytes. The 4-MP molecules,
which have a thiol group, can be captured on the nanohole array substrate
through formation of covalent thiol–silver bonds. The molecules
may also get physically adsorbed to silica layered regions inside
the nanoholes through van der Waals forces.To demonstrate the
advantage of flow through the nanoholes over
diffusion-based transport for SERS sensing, we performed experiments
where the nanohole substrates were prepared in two different ways.
In the first case, 20 μL of 100 nM 4-MP solution was allowed
to completely flow through suspended nanoholes in about 20 min. For
diffusion-based adsorption, substrates were submerged in a reservoir
containing identical 4-MP solution for the same amount of time. The
SERS signal obtained from both the samples is shown in Figure 6a. Samples with surface-tension-induced flow gave
about 50 times higher signal as compared to diffusion-limited adsorption.
The experiment was repeated over multiple sets of samples and similar
results were observed (Figure S3, Supporting Information). To demonstrate detection of low concentration samples, 50 μL
of 4-MP at a concentration of 100 pM (i.e., 5 fmol of 4-MP) was allowed
to flow through the sample for about an hour. The SERS signal collected
from this sample shown in Figure 6b demonstrates
the capability of the method to detect low concentrations of analyte
molecules. The high sensitivity in this case results from the combination
of two factors: large Raman enhancement factor of the nanohole array
substrate and flow-through-based concentration of molecules at the
hot spot.
Figure 6
SERS with surface-tension-induced flow-through. (a) Comparison
of SERS spectra obtained from flow-through of 100 nM 4-MP (red spectrum)
as compared to diffusive transport (blue). (b) SERS spectra obtained
after flow-through of 100 pM 4-MP for an hour.
SERS with surface-tension-induced flow-through. (a) Comparison
of SERS spectra obtained from flow-through of 100 nM 4-MP (red spectrum)
as compared to diffusive transport (blue). (b) SERS spectra obtained
after flow-through of 100 pM 4-MP for an hour.The limit of detection of the setup, in terms of 4-MP concentration,
would depend on the duration of time the solution is allowed to flow
through the nanoholes. However, it can be estimated in terms of number
of molecules of 4-MP in solution. Using the peak at 1099 cm–1 in the SERS signal shown in Figure 6b, the
signal-to-noise (S/N) ratio was calculated to be approximately 55.
Assuming a linear concentration vs signal response (Figure S2, Supporting Information), and calculating for
a final S/N ratio of 3, gave us a limit of detection of approximately
272 amol of 4-MP molecules in solution.
Conclusion
We
have demonstrated the fabrication of millimeter-sized suspended
metallic nanohole arrays using NIL and their potential for flow-through
SERS. Refractive-index-based tuning with sucrose solution was implemented
on this suspended nanohole array substrate for optimized SERS. This
tuning method was utilized to match the plasmon resonance peaks with
the excitation laser wavelength. Sucrose solution was used because
it has a very weak intrinsic Raman signal and, therefore, does not
contribute detectable background to the measurements. This simple
tuning method can also be utilized for plasmon-enhanced fluorescence[37,38] where the plasmon resonance can be tuned based on the excitation
or emission spectra of the fluorescent species. Furthermore, this
technique can easily be translated to other plasmonic substrates utilizing
the principle that, by changing the refractive index of the dielectric
medium around the metal, plasmon resonance conditions can be changed
to optimize the detection of the optical signal from analyte molecules.
The suspended Ag nanohole arrays have a SERS enhancement factor on
the order of 107, which is 2 orders of magnitude greater
than those reported previously for nanohole arrays and compares well
with other commonly used SERS substrates. Our demonstration of high
SERS enhancement factor from nanohole arrays can open up many possibilities,
because the nanohole geometry enables trapping of biomolecules and
small particles,[11,39] formation of model membranes
such as suspended lipid bilayers,[19,40−42] as well as flow-through sensing to overcome the diffusion limit.[10,11,24−26] To combine
nanohole-enhanced SERS with flow-through sensing, we have demonstrated
surface-tension-induced passive flow and concentration of particles
over the nanohole arrays. Passive flow rates of around 1 μL/min
were obtained using this technique. This passive flow allowed us to
overcome diffusion-limited transport of analytes and reduced the time
required to consume the solution while bringing the analyte molecules
closer to the plasmonic hotspots. Our device design utilizing passive
flow obviates the use of a bulky external pump and fluidic interconnects,
thus improving the simplicity and portability of the process. Thus,
the simple and novel resonance tuning as well as passive flow-through
technique discussed here on a suspended nanohole array platform can
help alleviate the mass transport limitations and benefit wide applications
in optofluidics.
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Authors: Marjan Saboktakin; Xingchen Ye; Uday K Chettiar; Nader Engheta; Christopher B Murray; Cherie R Kagan Journal: ACS Nano Date: 2013-08-09 Impact factor: 15.881
Authors: Shailabh Kumar; Timothy W Johnson; Christopher K Wood; Tao Qu; Nathan J Wittenberg; Lauren M Otto; Jonah Shaver; Nicholas J Long; Randall H Victora; Joshua B Edel; Sang-Hyun Oh Journal: ACS Appl Mater Interfaces Date: 2016-02-29 Impact factor: 9.229
Authors: W Elliott Martin; Ning Ge; Bernadeta R Srijanto; Emily Furnish; C Patrick Collier; Christine A Trinkle; Christopher I Richards Journal: ACS Omega Date: 2017-07-25
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