A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones.

Pressure-differential microphones inspired by the hearing mechanism of a special parasitoid fly have been described previously. The designs employ a beam structure that rotates about two pivots over an enclosed back volume. The back volume is only partially enclosed due to open slits around the perimeter of the beam. The open slits enable incoming sound waves to affect the pressure profile in the microphone's back volume. The goal of this work is to study the net moment applied to pressure-differential microphones by an incoming sound wave, which in-turn requires modeling the acoustic pressure distribution within the back volume. A lumped-element distributed transmission-line model of the back volume is introduced for this purpose. It is discovered that the net applied moment follows a low-pass filter behavior such that, at frequencies below a corner frequency depending on geometrical parameters of the design, the applied moment is unaffected by the open slits. This is in contrast to the high-pass filter behavior introduced by barometric pressure vents in conventional omnidirectional microphones. The model accurately predicts observed curvature in the frequency response of a prototype pressure-differential microphone 2 mm × 1 mm × 0.5 mm in size and employing piezoelectric readout.