Langasite surface acoustic wave sensors: fabrication and testing.

We report on the development of harsh-environment surface acoustic wave sensors for wired and wireless operation. Surface acoustic wave devices with an interdigitated transducer emitter and multiple reflectors were fabricated on langasite substrates. Both wired and wireless temperature sensing was demonstrated using radar-mode (pulse) detection. Temperature resolution of better than ±0.5°C was achieved between 200°C and 600°C. Oxygen sensing was achieved by depositing a layer of ZnO on the propagation path. Although the ZnO layer caused additional attenuation of the surface wave, oxygen sensing was accomplished at temperatures up to 700°C. The results indicate that langasite SAW devices are a potential solution for harsh-environment gas and temperature sensing.