Nanopore integrated nanogaps for DNA detection.

A high-throughput fabrication of sub-10 nm nanogap electrodes combined with solid-state nanopores is described. These devices should allow concomitant tunneling and ionic current detection of translocating DNA molecules. We report the optimal fabrication parameters in terms of dose, resist thickness, and gap shape that allow easy reproduction of the fabrication process at wafer scale. The device noise and current voltage characterizations performed and the influence of the nanoelectrodes on the ionic current noise is identified. In some cases, ionic current rectification for connected or biased nanogap electrodes is also observed. In order to increase the extremely low translocation rates, several experimental strategies were tested and modeled using finite element analysis. Our findings are useful for future device designs of nanopore integrated electrodes for DNA sequencing.