| Literature DB >> 22535070 |
W Chao1, P Fischer, T Tyliszczak, S Rekawa, E Anderson, P Naulleau.
Abstract
Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.Mesh:
Year: 2012 PMID: 22535070 DOI: 10.1364/OE.20.009777
Source DB: PubMed Journal: Opt Express ISSN: 1094-4087 Impact factor: 3.894