A study on the mechanical and electrical reliability of individual carbon nanotube field emission cathodes.

Individual carbon nanotube (CNT) field emission characteristics present a number of advantages for potential applications in electron microscopy and electron beam lithography. Mechanical and electrical reliability of individual CNT cathodes, however, remains a challenge and thus device integration of these cathodes has been limited. In this work, we present an investigation into the reliability issues concerning individual CNT field emission cathodes. We also introduce and analyze the reliability of a novel individual CNT cathode. The cathode structure is composed of a multi-walled carbon nanotube (MWNT) attached by Joule heating to a nickel-coated Si microstructure. The junction of the CNT and the Si microstructure is mechanically and electrically robust to withstand the strong electric field conditions that are typical for field emission devices. An optimal Ni film coating of 25 nm on the Si microstructure is required for mechanical and electrical stability. Experimental current-voltage data for the new cathode structure definitively demonstrates carbon nanotube field emission. Additionally, we demonstrate that our new nanofabrication method is capable of producing sophisticated cathode structures that were previously not realizable, such as one consisting of two parallel MWNTs, with highly controlled CNT lengths with 40 nm accuracy and nanotube-to-nanotube separations of less than 10 µm.