3D in vivo optical coherence tomography based on a low-voltage, large-scan-range 2D MEMS mirror.

3D in vivo optical imaging on a mouse has been obtained using a 2D MEMS mirror for lateral scanning in a time-domain optical coherence tomography (OCT) system. The MEMS mirror aperture size is 1 x 1 mm(2), and the device footprint is 2 x 2 mm(2). The MEMS mirror scans +/- 30 degrees optical angles about both x and y-axis at only 5.5V DC voltage. An endoscopic probe with an outer diameter of 5.8 mm has been designed, manufactured and packaged. The probe scans an average transverse area of 2 mm x 2 mm. The imaging speed of the probe is about 2.5 frames per second, limited by the speed of the employed optical delay line.