Literature DB >> 18985672

Fabrication of silicon nanopillar teradot arrays by electron-beam patterning for nanoimprint molds.

Jung-Sub Wi1, Hyo-Sung Lee, Kipil Lim, Sung-Wook Nam, Hyun-Mi Kim, Soo-Yeon Park, Jae Jong Lee, Chris Daehoon Hong, Sungho Jin, Ki-Bum Kim.   

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Year:  2008        PMID: 18985672     DOI: 10.1002/smll.200800625

Source DB:  PubMed          Journal:  Small        ISSN: 1613-6810            Impact factor:   13.281


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  3 in total

1.  Silicon nano-well arrays for reliable pattern transfer and locally confined high temperature reactions.

Authors:  Jung-Sub Wi; Robert J Wilson; Donkoun Lee; Robert M White; Shan X Wang
Journal:  Nanotechnology       Date:  2011-06-28       Impact factor: 3.874

2.  Integration of solid-state nanopores in a 0.5 μm CMOS foundry process.

Authors:  A Uddin; S Yemenicioglu; C-H Chen; E Corigliano; K Milaninia; L Theogarajan
Journal:  Nanotechnology       Date:  2013-03-22       Impact factor: 3.874

Review 3.  Fabrication of Nanochannels.

Authors:  Yuqi Zhang; Xiang-Yu Kong; Loujun Gao; Ye Tian; Liping Wen; Lei Jiang
Journal:  Materials (Basel)       Date:  2015-09-17       Impact factor: 3.623

  3 in total

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