| Literature DB >> 18555690 |
Abstract
Steps to improve the success yield of the in situ lift-out technique are presented. These include tapping the plinth of the system and monitoring the grounding current to check the lift-out needle is fixed to the material being removed. In addition, the relative success yields and the time to prepare a TEM lamella for the three main FIB methods are discussed and compared.Mesh:
Year: 2008 PMID: 18555690 DOI: 10.1016/j.micron.2008.02.006
Source DB: PubMed Journal: Micron ISSN: 0968-4328 Impact factor: 2.251