High-resolution angular beam stability monitoring at a nanofocusing beamline.

Two semi-transparent imaging beam-position monitors developed at the ESRF have been installed at the micro-analysis beamline ID22 for monitoring the angular stability of the X-ray beam. This system allows low-frequency (10 Hz) angular beam stability measurements at a submicroradian range. It is demonstrated that the incoming macro-beam angular fluctuations are one of the major sources of focal spot instabilities downstream of the Kirkpatrick-Baez mirrors. It is also shown that scanning the energy by rotating the so-called fixed-exit monochromator induces some unexpected angular beam shifts that are, to a large extent, deterministic.