| Literature DB >> 18345113 |
Abstract
An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.Entities:
Year: 2000 PMID: 18345113 DOI: 10.1364/ao.39.002101
Source DB: PubMed Journal: Appl Opt ISSN: 1559-128X Impact factor: 1.980