Literature DB >> 18345113

Fringe modulation skewing effect in white-light vertical scanning interferometry.

A Harasaki, J C Wyant.   

Abstract

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

Entities:  

Year:  2000        PMID: 18345113     DOI: 10.1364/ao.39.002101

Source DB:  PubMed          Journal:  Appl Opt        ISSN: 1559-128X            Impact factor:   1.980


  4 in total

1.  Characterization of surface modifications by white light interferometry: applications in ion sputtering, laser ablation, and tribology experiments.

Authors:  Sergey V Baryshev; Robert A Erck; Jerry F Moore; Alexander V Zinovev; C Emil Tripa; Igor V Veryovkin
Journal:  J Vis Exp       Date:  2013-02-27       Impact factor: 1.355

2.  Ultrathin picoscale white light interferometer.

Authors:  Sunil Dahiya; Akansha Tyagi; Ankur Mandal; Thomas Pfeifer; Kamal P Singh
Journal:  Sci Rep       Date:  2022-05-23       Impact factor: 4.996

3.  Performance Analysis of Surface Reconstruction Algorithms in Vertical Scanning Interferometry Based on Coherence Envelope Detection.

Authors:  Dongxu Wu; Fusheng Liang; Chengwei Kang; Fengzhou Fang
Journal:  Micromachines (Basel)       Date:  2021-02-08       Impact factor: 2.891

Review 4.  Two-Process Random Textures: Measurement, Characterization, Modeling and Tribological Impact: A Review.

Authors:  Pawel Pawlus; Rafal Reizer; Wieslaw Żelasko
Journal:  Materials (Basel)       Date:  2021-12-30       Impact factor: 3.623

  4 in total

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