A photopatternable silicone for biological applications.

We show the application of a commercially available photopatternable silicone (PPS) that combines the advantageous features of both PDMS and SU-8 to address a critical bioMEMS materials deficiency. Using PPS, we demonstrate the ability to pattern free-standing mechanically isolated elastomeric structures on a silicon substrate: a feat that is challenging to accomplish using soft lithography-based fabrication. PPS readily integrates with many cell-based bioMEMS since it exhibits low autofluorescence and cells easily attach and proliferate on PPS-coated substrates. Because of its inherent photopatternable properties, PPS is compatible with standard microfabrication processes and easily aligns to complex featured substrates on a wafer scale. By leveraging PPS' unique properties, we demonstrate the design of a simple dielectrophoresis-based bioMEMS device for patterning mammalian cells. The key material properties and integration capabilities explored in this work should present new avenues for exploring silicone microstructures for the design and implementation of increasingly complex bioMEMS architectures.