Rigid design of fast scanning probe microscopes using finite element analysis.

To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design process, it was possible to increase the first resonance frequency from 950 Hz for the whole system to 23.4 kHz for the whole system. This constitutes a factor of approximately 25 in resonance frequency and a factor of 625 in stiffness and, hence, noise immunity.