Digital holographic microscope with automatic focus tracking by detecting sample displacement in real time.

We propose a new method for focus tracking during the recording of a sequence of digital holograms while the sample experiences axial displacement. Corrected reconstruction distances can be automatically calculated, and well-focused amplitude and phase-contrast images can be obtained for each digitized hologram. The method is demonstrated for inspection of microelectromechanical systems subjected to thermal load. The method can be applied as a quasi-real-time procedure.