Ultra-high speed digital micro-mirror device based ptychographic iterative engine method.

To reduce the long data acquisition time of the common mechanical scanning based Ptychographic Iterative Engine (PIE) technique, the digital micro-mirror device (DMD) is used to form the fast scanning illumination on the sample. Since the transverse mechanical scanning in the common PIE is replaced by the on/off switching of the micro-mirrors, the data acquisition time can be reduced from more than 15 minutes to less than 20 seconds for recording 12 × 10 diffraction patterns to cover the same field of 147.08 mm2. Furthermore, since the precision of DMD fabricated with the optical lithography is always higher than 10 nm (1 μm for the mechanical translation stage), the time consuming position-error-correction procedure is not required in the iterative reconstruction. These two improvements fundamentally speed up both the data acquisition and the reconstruction procedures in PIE, and relax its requirements on the stability of the imaging system, therefore remarkably improve its applicability for many practices. It is demonstrated experimentally with both USAF resolution target and biological sample that, the spatial resolution of 5.52 μm and the field of view of 147.08 mm2 can be reached with the DMD based PIE method. In a word, by using the DMD to replace the translation stage, we can effectively overcome the main shortcomings of common PIE related to the mechanical scanning, while keeping its advantages on both the high resolution and large field of view.