Improving the positional accuracy of the goniometer on the Philips CM series TEM.

We have developed a method to improve the accuracy for absolute relocation of a target specimen using the goniometer on a Philips transmission electron microscope. We have achieved this by characterizing the performance of the Philips compustage, modeling its behavior, and using this model to calculate the goniometer movements required for accurate target relocation. This resulted in a 10-fold improvement in the positioning accuracy of the goniometer. Copyright 1999 Academic Press.