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Literature DB >> 9976466

Electrical properties of He-implantation-produced nanocavities in silicon.

Abstract

Entities: Chemical

Source DB: PubMed Journal: Phys Rev B Condens Matter ISSN： 0163-1829

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Authors: Andrey Lomov; Kirill Shcherbachev; Yurii Chesnokov; Dmitry Kiselev
Journal: J Appl Crystallogr Date: 2017-03-22 Impact factor: 3.304

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