Literature DB >> 9962903

Negative ions in a radio-frequency oxygen plasma.

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Abstract

Entities:  

Year:  1995        PMID： 9962903     DOI： 10.1103/physreve.51.2425

Source DB:  PubMed          Journal:  Phys Rev E Stat Phys Plasmas Fluids Relat Interdiscip Topics        ISSN： 1063-651X


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  1 in total

1.  Formation and behavior of negative ions in low pressure aniline-containing RF plasmas.

Authors:  Cedric Pattyn; Eva Kovacevic; Thomas Strunskus; Thomas Lecas; Johannes Berndt
Journal:  Sci Rep       Date:  2019-07-26       Impact factor: 4.379
  1 in total

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