Literature DB >> 9946195

Interaction of F and Cl with silicon surfaces.

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Abstract

Entities:  

Year:  1988        PMID: 9946195     DOI: 10.1103/physrevb.38.12508

Source DB:  PubMed          Journal:  Phys Rev B Condens Matter        ISSN: 0163-1829


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  1 in total

1.  On the importance of ions and ion-molecule reactions to plasma-surface interface reactions.

Authors:  Keri L Williams; Ina T Martin; Ellen R Fisher
Journal:  J Am Soc Mass Spectrom       Date:  2002-05       Impact factor: 3.109

  1 in total

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