Literature DB >> 9945813

Selective low-power plasma decomposition of silane-methane mixtures for the preparation of methylated amorphous silicon.

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Abstract

Entities:  

Year:  1988        PMID： 9945813     DOI： 10.1103/physrevb.38.9895

Source DB:  PubMed          Journal:  Phys Rev B Condens Matter        ISSN： 0163-1829


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  1 in total

1.  Characterization of a-SiC(x):H thin films as an encapsulation material for integrated silicon based neural interface devices.

Authors:  Jui-Mei Hsu; Prashant Tathireddy; Loren Rieth; A Richard Normann; Florian Solzbacher
Journal:  Thin Solid Films       Date:  2007-11-01       Impact factor: 2.183
  1 in total

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