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Literature DB >> 9905549

Self-consistent kinetic calculations of helium rf glow discharges.

Abstract

Entities: Chemical

Source DB: PubMed Journal: Phys Rev A ISSN： 1050-2947 Impact factor: 3.140

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Authors: S Djurović; J R Roberts; M A Sobolewski; J K Olthoff
Journal: J Res Natl Inst Stand Technol Date: 1993 Mar-Apr

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