An in situ nanoindentation specimen holder for a high voltage transmission electron microscope.

We describe in detail, the design, construction, and testing of a specimen holder that allows for the nanoindentation of surfaces while viewing in cross-section in a high voltage transmission electron microscope (TEM). This nanoindentation specimen holder, having three-axis position control of a diamond indenter in combination with micromachined specimens, allows for the first time the dynamic observation of subsurface microstructure evolution under an indenter tip. Additionally, the sample design techniques that have been developed for these procedures may eliminate the need for TEM specimen preparation for additional ex situ nanoindentation experiments. Initial experimental results from in situ indentation of Si samples in the high voltage electron microscope are reported here to demonstrate the capability of this new specimen holder.