Digital processing methods using scanning densitometer and microcomputer for the structural analysis of a scanning electron micrograph.

The fundamental equation of image contrast with practical resolving power is shown taking account of the optical and specimen characteristics. Then, the structural factor which is used to indicate the scattering from the unit of structure to form the periodic object in a scanning electron microscopy can be derived straight-forwardly by digital processing. Based on the Fourier analysis, the reconstruction and subsequent interpretation of structural images such as biological specimens of rat microvilli have been successful. These microvilli must exhibit regularity of a hexagonal lattice consisting of rod-like crystalline arrays. Lattice defects are analysed by means of contrast enhancement, level slicing and histogram plotting techniques. The resolution of SEM can be tested from the granularity distance of coated films by the image sharpening by differentiation and subsequent superimposition of reconstructed images. Furthermore, the structural details in high brightness owing to reducing of the brightness level and filtering the high frequency component have been analysed.