| Literature DB >> 36234268 |
Jing Ni1, Xiaotian Zeng1, M S H Al-Furjan1,2, Huijun Zhao1, Liming Guan3, Zhi Cui1, Lidong Han1.
Abstract
Polytetrafluoroethylene (PTFE) plays an important role in semiconductor manufacturing. It is an important processing material for the key sealing components in the field of immersion lithography. The lack of research related to the mechanical processing of PTFE leads to many challenges in producing complex parts. This paper conducted a drilling experiment on PTFE. The effect of cutting parameters on the drilling performance was investigated. Thrust, torque, surface roughness, and drilling temperature were used to evaluate the influence of cutting parameters on drilling performance. In addition, the empirical mathematical models of thrust and torque were developed using analysis of variance (ANOVA). The results indicated that the spindle speed had the most important effect on the thrust and the feed rate had the most significant effect on the torque. The lowest values of thrust and torque were, respectively, 22.64 N and 0.12 Nm, achieved in the case of spindle speed of 5000 rev/min, and feed rate of 50 mm/min. The surface quality is also best at this cutting parameter. Studies have shown that higher spindle speeds with lower feed rates are ideal parameters for improving the drilling performance and machining quality of PTFE. In addition, it was found that the temperature differences due to different drilling depths were related to chip accumulation. Surface roughness inconsistencies at various locations in the inner wall of the hole were influenced by chip adhesion during machining. This paper provides a suggestion for optimizing cutting parameters and hole quality.Entities:
Keywords: cutting parameters; drilling temperature; polytetrafluoroethylene; surface roughness; thrust; torque
Year: 2022 PMID: 36234268 PMCID: PMC9570827 DOI: 10.3390/ma15196922
Source DB: PubMed Journal: Materials (Basel) ISSN: 1996-1944 Impact factor: 3.748
Physical and mechanical properties of the workpiece.
| Properties | Values |
|---|---|
| Density | 2.2 g/cm3 |
| Melting temperature | 327 °C |
| Glass transition temperature | 130 °C |
| Thermal conductivity | 0.25 W/(m·K) |
| Coefficient of linear expansion | 10 × 10−5/°C |
| Dynamic friction factor | 0.10 |
| Bending elastic ratio | 550 Mpa |
| Compressive strength | 11.8 Mpa |
Figure 1The geometrical details of cutting tool.
The geometrical parameters of twist drill.
| Geometrical Parameters | Value (°) |
|---|---|
| Helix angle (β) | 28 |
| Relief angle (γ) | 16 |
| chisel edge angle (Ψ) | 50 |
| Rake angle (α) | 30 |
Figure 2Experimental system setup.
Cutting parameters of the validation experiments.
| f (mm/min) | |||||
|---|---|---|---|---|---|
| 1000 | 2000 | 3000 | 4000 | 5000 | |
| 50 | H01 | H02 | H03 | H04 | H05 |
| 100 | H06 | H07 | H08 | H09 | H10 |
| 150 | H11 | H12 | H13 | H14 | H15 |
| 200 | H16 | H17 | H18 | H19 | H20 |
| 250 | H21 | H22 | H23 | H24 | H25 |
Figure 3Thermocouple hole size and preset position.
Figure 4Drilling process diagram: (a) Schematic diagram of drilling processing stage; (b) Curve of thrust and torque variation.
Figure 5Variation curves of thrust and torque at different cutting parameters. (a) Thrust; (b) Torque.
Figure 6Diagram of drilling principle.
Chip morphology under different machining parameters.
| NO | Drilling Parameters | Chip Morphology | |
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ANOVA results for thrust.
| Source | SS | DF | MS | F-Value | Cont (%) | |
|---|---|---|---|---|---|---|
| Model | 6709.86 | 4 | 1677.46 | 279.49 | <0.0001 | |
| A, Spindle speed | 3197.62 | 1 | 3197.62 | 532.78 | <0.0001 | 46.8 |
| B, Feed rate | 2716.66 | 1 | 2716.66 | 452.64 | <0.0001 | 39.8 |
| AB | 378.84 | 1 | 378.84 | 63.12 | <0.0001 | 5.5 |
| A2 | 416.75 | 1 | 416.75 | 69.44 | <0.0001 | 6.1 |
| R-square = 0.9824; Adjusted R-squared = 0.9789 | ||||||
ANOVA results for torque.
| Source | SS | DF | MS | F-Value | Cont (%) | |
|---|---|---|---|---|---|---|
| Model | 1319.09 | 1 | 439.70 | 176.67 | <0.0001 | |
| A, Spindle speed | 365.58 | 1 | 365.58 | 146.89 | <0.0001 | 26.7 |
| B, Feed rate | 891.43 | 1 | 891.43 | 358.17 | <0.0001 | 65 |
| B2 | 62.08 | 1 | 62.08 | 24.94 | <0.0001 | 4.5 |
| R-square = 0.9619;Adjusted R-squared = 0.9564 | ||||||
Validation experiments for thrust.
| No | Spindle Speed | Feed Rate | Thrust (N) | Error | |
|---|---|---|---|---|---|
| (rev/min) | (mm/min) | Experimental | Predicted Value | (%) | |
| 1 | 1000 | 50 | 38.59 | 41.37 | 7.20 |
| 2 | 1000 | 250 | 85.90 | 86.43 | 0.62 |
| 3 | 3000 | 50 | 26.20 | 23.40 | 10.7 |
| 4 | 3000 | 250 | 53.43 | 52.89 | 1.01 |
| 5 | 5000 | 50 | 22.64 | 24.95 | 10.2 |
| 6 | 5000 | 250 | 39.04 | 38.87 | 0.44 |
Validation experiments for torque.
| No | Spindle Speed | Feed Rate | Torque (N) | Error | |
|---|---|---|---|---|---|
| (rev/min) | (mm/min) | Experimental | Predicted Value | (%) | |
| 1 | 1000 | 50 | 26.05 | 22.47079 | 13.7 |
| 2 | 1000 | 250 | 39.35 | 39.35963 | 0.01 |
| 3 | 3000 | 50 | 15.79 | 17.06279 | 8.1 |
| 4 | 3000 | 250 | 32.9 | 33.95163 | 3.2 |
| 5 | 5000 | 50 | 12.2 | 11.65479 | 4.5 |
| 6 | 5000 | 250 | 29.04 | 28.54363 | 1.7 |
Figure 7Three-dimensional graph of drilling temperature under different drilling parameters. (a) at h1; (b) at h2.
Figure 8Comparative graphs of the temperatures of h1 and h2. (a) Spindle speed of 5000 rev/min; (b) Feed rate of 50 mm/min.
Figure 9Chip accumulation in drilling of PTFE: (a) Chip accumulation phenomenon; (b) Schematic diagram of chip accumulation.
Figure 10Surface roughness of hole inner wall under different cutting parameters: (a) Surface roughness of hole entrance; (b) Surface roughness of hole exit.
The RMSE values of thrust during different stages under different parameters.
| NO | Spindle Speed | Feed Rate | RMSE of Thrust | |
|---|---|---|---|---|
| Initial Drilling Phase | Late Drilling Phase | |||
| 1 | 1000 | 50 | 2.57625 | 2.87912 |
| 2 | 150 | 3.97652 | 4.11235 | |
| 3 | 250 | 6.57521 | 6.75261 | |
| 4 | 50 | 2.08725 | 2.76325 | |
| 5 | 3000 | 150 | 3.57622 | 3.87215 |
| 6 | 250 | 6.01258 | 6.91205 | |
| 7 | 50 | 1.87925 | 2.45630 | |
| 8 | 5000 | 150 | 3.11250 | 3.01752 |
| 9 | 250 | 5.15752 | 6.12486 | |
Figure 11Mechanism diagram of the effect of chip adhesion on surface roughness.
Figure 12Pictures of chip adhesion at different drilling depths: (a) Drilling depth of 10 mm; (b) Drilling depth of 30 mm.