| Literature DB >> 36132962 |
Kazuma Ito1, Weifang Lu1, Sae Katsuro1, Renji Okuda1, Nanami Nakayama1, Naoki Sone1,2, Koichi Mizutani3, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Isamu Akasaki1,4.
Abstract
Multi-color emission from coaxial GaInN/GaN multiple-quantum-shell (MQS) nanowire-based light-emitting diodes (LEDs) was identified. In this study, MQS nanowire samples for LED processes were selectively grown on patterned commercial GaN/sapphire substrates using metal-organic chemical vapor deposition. Three electroluminescence (EL) emission peaks (440, 540, and 630 nm) were observed, which were primarily attributed to the nonpolar m-planes, semipolar r-planes, and the polar c-plane tips of nanowire arrays. A modified epitaxial growth sequence with improved crystalline quality for MQSs was used to effectively narrow the EL emission peaks. Specifically, nanowire-based LEDs manifested a clear redshift from 430 nm to 520 nm upon insertion of AlGaN spacers after the growth of each GaInN quantum well. This demonstrates the feasibility of lengthening the EL emission wavelength since an AlGaN spacer can suppress In decomposition of the GaInN quantum wells during ramping up the growth temperature for GaN barriers. EL spectra showed stable emission peaks as a function of the injection current, verifying the critical feature of the non-polarization of GaN/GaInN MQSs on nanowires. In addition, by comparing EL and photoluminescence spectra, the yellow-red emission linked to the In-fluctuation and point defects in the c-plane MQS was verified by varying the activation annealing time and lowering the growth temperature of the GaInN quantum wells. Therefore, optimization of MQS nanowire growth with a high quality of c-planes is considered critical for improving the luminous efficiency of nanowire-based micro-LEDs/white LEDs. This journal is © The Royal Society of Chemistry.Entities:
Year: 2021 PMID: 36132962 PMCID: PMC9419305 DOI: 10.1039/d1na00299f
Source DB: PubMed Journal: Nanoscale Adv ISSN: 2516-0230
MOCVD growth parameters for nanowire samples
| Samples | Temperature of GaN barriers in MQSs | Temperature of GaInN wells in MQSs | Spacers in MQS growth | TMG flow rate for p-type GaN shell growth (same thickness) | Activation time for p-GaN |
|---|---|---|---|---|---|
| a | 750 °C | 750 °C | GaN | 6 sccm | 30 min |
| b | 810 °C | 750 °C | GaN | 6 sccm | 30 min |
| c | 810 °C | 750 °C | AlGaN | 6 sccm | 30 min |
| d | 810 °C | 750 °C | AlGaN | 24 sccm | 30/90 min |
| e | 810 °C | 740 °C | AlGaN | 24 sccm | 30 min |
Fig. 1(a) Schematic diagram of the nanowire-based LED device structure. The hexagonal shape of the cross-sectional view of one nanowire is illustrated on the right, involving the n-type core, GaInN/GaN multiple-quantum-shell (MQS) active layer, and p-type GaN shell. (b) The designed LED chip (340 μm × 340 μm), and the corresponding (c) scanning electron microscopy (SEM) image after the process. (d) The planar-view SEM image of an as-grown nanowire sample and (e) the 30°-tilted view SEM image.
Fig. 2(a) Electroluminescence spectra of sample a at different injection currents. Three peaks located at 440, 540 and 630 nm are identified. (bi) and (bii) The cross-sectional view CL panchromatic mapping and SEM images of the nanowires in sample a. Panels in (c) show the CL spectra acquired in the c-plane apex region, r-plane, and top and bottom areas on the m-plane.
Fig. 3(a) The I–V characteristics of nanowire-LED samples b (without AlGaN spacers) and c (with AlGaN spacers). The cross-sectional view SEM images of sample b (ai) and c (aii) coated with the indium tin oxide film. (b) The normalized EL spectra of samples b and c at an injection current of 100 mA.
Fig. 4(a) EL spectra of sample d1 with an activation time of 30 min for the p-GaN shell. The corresponding light emission images at different injection currents are shown as insets. (b) The emission peak and intensity as a function of injection current varying from 10 to 100 mA. (c) EL spectra of sample d2 with an activation time of 90 min for the p-GaN shell. (d) The I–V characteristics and light output of sample d with 30 and 90 min activation, respectively.
Fig. 5(a) The EL spectra in sample e measured at different injection currents. The inset shows the EL spectrum at an injection current of 10 mA. (b) PL spectra of sample e measured under irradiation using a 405 nm laser with different current intensities.