NEMS-tunable dielectric chiral metasurfaces.

Active control of strong chiroptical responses in metasurfaces can offer new opportunities for optical polarization engineering. Plasmonic active chiral metasurfaces have been investigated before, but their tunable chiroptical responses is limited due to inherent loss of plasmonic resonances, thus stimulating research in low loss active dielectric chiral metasurfaces. Among diverse tuning methods, electrically tunable dielectric chiral metasurfaces are promising thanks to their potential for on-chip integration. Here, we experimentally demonstrate nano-electromechanically tunable dielectric chiral metasurfaces with reflective circular dichroism (CD). We show a difference between absolute reflection under circulary polarized incident light with orthogonal polarization of over 0.85 in simulation and over 0.45 experimentally. The devices enable continuous control of CD by induced electrostatic forces from 0.45 to 0.01 with an electrical bias of 3V. This work highlights the potential of nano-electromechanically tunable metasurfaces for scalable optical polarization modulators.