| Literature DB >> 35890777 |
Zhaoyue Liu1, Lina Zeng1, Ke Xu1, Zaijin Li1, Hao Chen1, Zhongliang Qiao1, Yi Qu1, Guojun Liu1, Lin Li1.
Abstract
In this paper, a pressure sensor based on a metal diaphragm and lever structure is designed, the sensing principle and mechanical structure of this sensor are analyzed and simulated, and its sensitization effectiveness and temperature compensation are verified. The maximum deflections of metal diaphragms of different sizes and materials were compared, and it was found that the square beryllium bronze diaphragm with a thickness of 1 mm and a side length of 20 mm had good elastic properties. The influence of the FBG in different positions of the lever on the center wavelength is analyzed. The sensitivity of the bare FBG is markedly improved under the influence of the two structures of the square elastic diaphragm and the lever, with a typical pressure sensitivity of 3.35 nm/MPa at 3 mm to the left of the lever center. The purpose of temperature compensation is achieved by adding another FBG that measures the temperature, and the sensing sensitivity can be tuned by adjusting the position of the FBG. It can meet the detection needs of a small range and high sensitivity.Entities:
Keywords: FBG; elastic diaphragm; lever structure; pressure sensing
Year: 2022 PMID: 35890777 PMCID: PMC9324662 DOI: 10.3390/s22145096
Source DB: PubMed Journal: Sensors (Basel) ISSN: 1424-8220 Impact factor: 3.847
Figure 1Schematic diagram of the pressure sensing structure.
Figure 2Schematic diagram of the diaphragm deformation and size.
Figure 3Schematic diagram of the mechanical model of the lever system.
Figure 4Simulation results of the central deflection vs. thickness h for the circular and square diaphragms. (a) Circular diaphragm size and its variation of center deflection. (b) square diaphragm size and its variation of center deflection.
Parameters of the three materials.
| Material | Spring Steel | Beryllium Bronze | Nodular Cast Iron |
|---|---|---|---|
| Young’s modulus/105 MPa | 2.06 | 1.24 | 1.59 |
| Poisson ratio | 0.3 | 0.35 | 0.28 |
Figure 5Plot of the square diaphragm with a and h.
Figure 6Distribution diagram of the force and shape variables of the square diaphragm. (a) Force distribution of square diaphragm. (b) Deformation variable distribution of square diaphragm.
Figure 7FBG reflectance and gate area length relationship.
Main Parameters of the Pressure Sensing Structure.
| Parameter | P/MPa |
| E/105 MPa | μ | a/mm | h/mm | L/mm | x/mm |
| |
|---|---|---|---|---|---|---|---|---|---|---|
| Value | 1.0 | 0.22 | 1.24 | 0.35 | 10 | 0.5 | 1551.15 | 10 | 3 | 16 |
Figure 8Effect of the FBG and metal bar distance on the wavelength change.
Figure 9Central wavelength offset and its relation to pressure. (a) The variation of wavelength with increasing pressure. (b) Pressure sensitivity under 0−0.5MPa.