| Literature DB >> 35629526 |
Aleksandr Kolchin1, Dmitrii Shuleiko1, Mikhail Martyshov1, Aleksandra Efimova1, Leonid Golovan1, Denis Presnov1,2,3, Tatiana Kunkel4,5, Victoriia Glukhenkaya6, Petr Lazarenko6, Pavel Kashkarov1,7, Stanislav Zabotnov1, Sergey Kozyukhin5.
Abstract
Ge2Sb2Te5 (GST225) looks to be a promising material for rewritable memory devices due to its relatively easy processing and high optical and electrophysical contrast for the crystalline and amorphous phases. In the present work, we combined the possibilities of crystallization and anisotropic structures fabrication using femtosecond laser treatment at the 1250 nm wavelength of 200 nm thin amorphous GST225 films on silicon oxide/silicon substrates. A raster treatment mode and photoexcited surface plasmon polariton generation allowed us to produce mutually orthogonal periodic structures, such as scanline tracks (the period is 120 ± 10 μm) and laser-induced gratings (the period is 1100 ± 50 nm), respectively. Alternating crystalline and amorphous phases at the irradiated surfaces were revealed according to Raman spectroscopy and optical microscopy studies for both types of structures. Such periodic modulation leads to artificial optical and electrophysical anisotropy. Reflectance spectra in the near infrared range differ for various polarizations of probing light, and this mainly results from the presence of laser-induced periodic surface structures. On the other hand, the scanline tracks cause strong conductivity anisotropy for dc measurements in the temperature range of 200-400 K. The obtained results are promising for designing new GST225-based memory devices in which anisotropy may promote increasing the information recording density.Entities:
Keywords: GST225; Raman spectroscopy; conductivity anisotropy; femtosecond direct laser writing; infrared spectroscopy
Year: 2022 PMID: 35629526 PMCID: PMC9143183 DOI: 10.3390/ma15103499
Source DB: PubMed Journal: Materials (Basel) ISSN: 1996-1944 Impact factor: 3.748
Figure 1Scheme of the studied sample, where the gray areas illustrate the deposited aluminum electrodes for the electrophysical measurements; scanlines are depicted by vertical brown stripes, and the LIPSS within them are indicated by black horizontal shading (a). OM image of the fabricated sample with the deposited aluminum contacts (b); OM image (c) and SEM micrograph image (d) of irradiated surface of the sample. Numbers 1 and 2 in subfigures (a,b) mark electrodes for electrophysical measurements: the applied current may be flow between electrode pairs 1–1 or 1–2.
Figure 2Raman spectra of as-deposited (a) and irradiated (b) GST225 samples, normalized by the integrated intensity of the whole spectra. Comparison of initial Raman spectra obtained between scanlines and at scanline center without normalization (c). The inset shows integrated intensities of Raman lines at 125 cm−1, 140 cm−1, and 158 cm−1 along the scanline cross section, normalized by the integrated intensity of the whole spectra. The diameter of the probing Raman beam equals 5 μm.
Figure 3IR reflection spectra of as-deposited (unpolarized light) (a) and irradiated (b) GST225 samples. Calculated reflectance spectra for the scanlines considered as laminar structure caused by presence of LIPSS (c) and the array of nanocrystals oriented along laser radiation polarization in amorphous surrounding (d). The latter is characterized by a 50% volume fraction in both calculations. The ratio of ellipsoid semi-axes is equal to 10.
Figure 4Temperature dependencies of conductivity (a) for the as-deposited sample and for the irradiated areas along and orthogonal to the scanlines. The scheme of crystalline and amorphous phases distribution inside the irradiated GST sample (b). Thin horizontal stripes indicate the presence of LIPSS within the scanlines; a-GST is amorphous GST225, c-Si and c-GST are crystalline silicon and crystalline GST225, respectively.