Tiziana Ritacco1,2, Wera Di Cianni1,2,3, Dario Perziano2, Pietro Magarò4, Annalisa Convertino5, Carmine Maletta4, Antonio De Luca1,2, Alberto Sanz de León3, Michele Giocondo1. 1. Institute of Nanotechnology─Nanotec Consiglio Nazionale delle Ricerche─Sede di Cosenza. Ponte P. Bucci - Cubo 33C, Rende 87036, Italy. 2. Physics Department, University of Calabria, 87036 Arcavacata di Rende, CS, Italy. 3. Departamento de Ciencia de los Materiales, I. M. y Q. I., IMEYMAT, Facultad de Ciencias, Universidad de Cádiz, Campus Río San Pedro, s/n, 11510 Puerto Real, Cádiz, Spain. 4. Department of Mechanical, Energy and Management Engineering, University of Calabria, Cubo 44C, Arcavacata di Rende 87036, Italy. 5. Institute for Microelectronics and Microsystems─IMM Consiglio Nazionale delle Ricerche, via del Fosso del Cavaliere 100, 00133 Roma, Italy.
Abstract
This paper reports on the nanofabrication of a fiber-reinforced polymer nanocomposite (FRPN) by two-photon direct laser writing (TP-DLW) using silica nanowires (SiO2 NWs) as nanofillers, since they feature a refractive index very close to that of the photoresist used as a polymeric matrix. This allows for the best resolution offered by the TP-DLW technique, even with high loads of SiO2 NWs, up to 70 wt %. The FRPN presented an increase of approximately 4 times in Young's modulus (8.23 GPa) and nanohardness (120 MPa) when compared to those of the bare photoresist, indicating how the proposed technique is well-suited for applications with higher structural requirements. Moreover, three different printing configurations can be implemented thanks to the use of silicon chips, on which the SiO2 NWs are grown, as fabrication substrates. First, they can be effectively used as an adhesive layer when the laser beam is focused at the interface with the silicon substrate. Second, they can be used as a sacrificial layer, when the laser beam is focused in a plane inside the SiO2 NW layer. Third, only the outer shell of the object is printed so that the SiO2 NW tangle acts as the internal skeleton for the structure being fabricated in the so-called shell and scaffold printing strategy.
This paper reports on the nanofabrication of a fiber-reinforced polymer nanocomposite (FRPN) by two-photon direct laser writing (TP-DLW) using silica nanowires (SiO2 NWs) as nanofillers, since they feature a refractive index very close to that of the photoresist used as a polymeric matrix. This allows for the best resolution offered by the TP-DLW technique, even with high loads of SiO2 NWs, up to 70 wt %. The FRPN presented an increase of approximately 4 times in Young's modulus (8.23 GPa) and nanohardness (120 MPa) when compared to those of the bare photoresist, indicating how the proposed technique is well-suited for applications with higher structural requirements. Moreover, three different printing configurations can be implemented thanks to the use of silicon chips, on which the SiO2 NWs are grown, as fabrication substrates. First, they can be effectively used as an adhesive layer when the laser beam is focused at the interface with the silicon substrate. Second, they can be used as a sacrificial layer, when the laser beam is focused in a plane inside the SiO2 NW layer. Third, only the outer shell of the object is printed so that the SiO2 NW tangle acts as the internal skeleton for the structure being fabricated in the so-called shell and scaffold printing strategy.
The two-photon direct laser writing (TP-DLW) technique has revolutionized
the three-dimensional (3D) micro/nanofabrication of polymeric materials,
allowing the 3D printing of structures with a resolution below the
diffraction limit (down to 50 nm). A femtosecond pulsed infrared laser
is focused on a UV photosensitive prepolymer (resist) and triggers
the polymerization by two-photon absorption (TPA).[1−13] TPA is a nonlinear, third-order optical absorption phenomenon theorized
in the early ‘30s of the past century by Göppert Mayer.[11] The smallest printable volume (volume pixel
or voxel) defines the achievable high spatial resolution, which is
due to the square dependence of the radiation intensity that further
narrows the Gaussian laser beam intensity profile. Therefore, only
in the inner volume of the focus figure, where the intensity is the
highest, it is possible to promote the electronic transition and the
material polymerization.[14−16]To confer and tune the
mechanical, electric, and optical properties
of the created structures, scientists have been exploring the possibility
to embed nanofillers in the form of fibrils or particles into different
polymeric matrixes, allowing us to fabricate structures suitable for
integrating in medical and microfluidic devices, electronic components,
and even small satellites.[17−32]In the case of transparent nanofillers, as silica nanowires
(SiO2 NWs), they could be embedded in polymeric matrices
and processed
by TP-DLW, allowing for the best performance in terms of resolution,
when their refractive indexes are perfectly matched, eliminating the
light scattering effects. This optimal condition could be achieved
by tuning the refractive index of the polymer during the synthesis[21,22] or that of the SiO2 NWs by adding a suitable dopant in
the production process.[23−25]In this work, to be considered
as a proof of concept, we used a
commercially available photoresist suitable for TP-DLW (IP-S from
NanoScribe) featuring a refractive index of 1.499, as reported by
Gissibl et al.,[24] practically coincident
with the refractive index of the bare SiO2 NWs and the
fused silica coverslip commonly used as fabrication substrates. To
prepare our samples, we used TP-DLW on silicon substrates with silica
nanowires grown on the top and soaked with the photoresist. The refractive
index matching between the polymer and the nanofiller allows us to
exploit the capabilities of the TP-DLW technique, with a resolution
considerably below the diffraction limit, in the order of hundreds
of nanometers. This enables the possibility of printing actual 3D
trajectories and manufacturing complex, high-resolution 3D objects
actually made of a fiber-reinforced nanocomposite. Other authors have
demonstrated the possibility to include nanowires directly in the
photopolymerizable resin, to confer peculiar properties to the TP-DLW-fabricated
structures.[25−30] However, in general, a minimal percentage of nanofillers can be
embedded in the presence of a refractive index mismatch, as the light
scattering would jeopardize the TP-DLW resolution. Our experiments
demonstrate that our approach consents to realize 3D structures with
reinforced structural properties and sub-micrometric resolution. Topographical
and mechanical characterization allowed evaluating the maximum resolution
of these nanocomposites in 3D fabrication, comparable to that of the
bare IP-S resin, and their hardness and elastic properties, obtaining
a notable increase in the mechanical properties. The development of
such a fiber-reinforced polymer nanocomposite (FRPN) for TP-DLW is
expected to have direct applications in different fields such as microfluidic
devices,[31] microelectromechanical systems,[32] or mechanical metamaterials.[33,34] In these cases, expanding the library of the materials processable
by TP-DLW will allow fabricating higher performance devices.
Experimental Section
Materials
Poly(propylene glycol methyl
ether acetate) (PGMEA), isopropanol (IPA), 49% hydrofluoric acid (HF)
solution, ammonium fluoride (NH4F), silane (SiH4), and hydrochloric acid (HCl) were purchased from Sigma Aldrich.
Edible red dye E120 is available at grocery stores. High-purity distilled
water was used to prepare all the solutions.
Synthesis
and characterization
Silica
nanowires (SiO2 NWs) on silicon (Si) wafers were produced
by thermal annealing of Si NWs grown by plasma-enhanced chemical vapor
deposition (PECVD). First, to induce the Si NW growth, a 2 nm-thick
Au film was deposited by physical vapor deposition (PVD) onto the
Si substrate prior to growth. The growth was performed using pure
SiH4 as a precursor at a total pressure of 1 Torr and substrate
temperature of 350 °C. A 13.56 MHz radiofrequency device with
a power density of 50 mW cm–2 was used to create
the plasma. Under these growth conditions, tens of μm-long Si
NWs with an average diameter of 30–300 nm at the bottom and
tapered shape are obtained.[21] After the
growth, the Si NWs were thermally oxidized in a convection oven (controlled
O2 atmosphere) at 980 °C for 8 h to form SiO2 NWs.[22,30]The morphological characterization
of the SiO2 NWs was performed using an FEI Quanta FEG 400
F7 scanning electron microscope (SEM). The average thickness of the
NW layer over the fabrication substrate, measured using a profilometer
(Veeco DEKTAK 8, Advanced Development profiler), is about 8 μm
(Figure ).
Figure 1
(a, b) SEM
images of SiO2 NWs grown on the Si substrate;
in (b), it is possible to distinguish the NWs with a homogenous distribution
of diameters in the range of 30–300 nm, and (c) profilometer
measure of the thickness of the SiO2 NW layer on the Si
substrate. The total thickness is about 8 μm.
(a, b) SEM
images of SiO2 NWs grown on the Si substrate;
in (b), it is possible to distinguish the NWs with a homogenous distribution
of diameters in the range of 30–300 nm, and (c) profilometer
measure of the thickness of the SiO2 NW layer on the Si
substrate. The total thickness is about 8 μm.
Fabrication Procedure via TP-DLW
TP-DLW was performed with a Photonic Professional GT system, from
Nanoscribe GmbH, based on an inverted microscope, using a 150 mW pulsed
erbium laser at 780 nm (pulse duration 100 fs, 80 MHz repetition rate).The used photoresist is the commercial IP-S from Nanoscribe GmbH.
It is composed by 95% of carbamate and methacrylate monomers, less
than 5% γ-butyrolactone, and less than 1% of photoinitiator.[35] Among all the photoresists available in our
lab, IP-S better matches the SiO2 NW refractive index,[18] evaluated by the optical contrast between the
resist and the filler in optical microscopy images.The SiO2 NW layer on the silicon chip is soaked with
a drop of IP-S and put on the inverted microscope stage. A 25×
and a 63× objectives with a numerical aperture (N.A.) of 1.2
and 1.4, respectively (Zeiss, Plan Apochromat), in the immersion mode,
were used, according to the scheme in Figure . In this configuration, the resist acts
as an immersion fluid for the front lens and the object is fabricated
upside down. Various simple parallelepipeds (base 500 × 500 μm2 and heights of 2, 8, and 12 μm) and a matrix of pyramids
(20 × 20 × 6 μm3) were designed and printed
in different z-positions, namely (a) adherent at
the interface with the Si wafer and (b) at a few microns above the
substrate, anchored to the SiO2 NWs only. Both samples
were printed as fully solid objects (Figure a,b). The parallelepiped was also printed
as a simple shell, in a “shell and scaffold” approach
(Figure c).
Figure 2
Scheme of the
printing configuration: the SiO2 NW layer
grown on the silicon chip is soaked with a drop of IP-S resist, acting
as an immersion fluid for the front lens. The object is fabricated
upside down, starting at the Si/SiO2 NW interface or a
few microns above it, depending on whether a permanently adherent
or a removable structure is required.
Figure 3
Objects
were printed via TP-DLW with three different approaches:
(a) first layer is printed at the interface with the Si for adhered
structures to the substrate; (b) first layer is printed leaving a
gap with the the Si substrate (z > 0); in this
case,
the object can be detached after the etching of the SiO2 between the resin and the Si substrate, which acts as a sacrificial
layer; (c) same case as (a) but printing only the outer shell of the
structure; in this case, the SiO2 NW tangle acts as an
internal scaffold (shell and scaffold approach) for the outer shell,
preventing its collapse. The unpolymerized material remaining inside
the shell is cured afterward by single-photon absorption using a UV
source.
Scheme of the
printing configuration: the SiO2 NW layer
grown on the silicon chip is soaked with a drop of IP-S resist, acting
as an immersion fluid for the front lens. The object is fabricated
upside down, starting at the Si/SiO2 NW interface or a
few microns above it, depending on whether a permanently adherent
or a removable structure is required.Objects
were printed via TP-DLW with three different approaches:
(a) first layer is printed at the interface with the Si for adhered
structures to the substrate; (b) first layer is printed leaving a
gap with the the Si substrate (z > 0); in this
case,
the object can be detached after the etching of the SiO2 between the resin and the Si substrate, which acts as a sacrificial
layer; (c) same case as (a) but printing only the outer shell of the
structure; in this case, the SiO2 NW tangle acts as an
internal scaffold (shell and scaffold approach) for the outer shell,
preventing its collapse. The unpolymerized material remaining inside
the shell is cured afterward by single-photon absorption using a UV
source.It is important to point out that
taller FRPN structures can be
made using thicker SiO2 layers or by mixing in the resist
the SiO2 NWs removed from the growth substrate. In the
last case, the in-dip configuration, where the resist acts as an immersion
fluid for the focusing lens, could be implemented provided that a
more accurate index matching is achieved, considering the typical
working distance of the focusing lens in the order of a few hundreds
of micrometers. This would lead to the possibility to fabricate 3D
PFRN structures whose z size is limited only by the z range of the sample holder stage (several millimeters).
In our case, structures shorter than 8 μm are fully made using
the FRPN, while the higher structures have an FRPN base and a fully
cured resist made of bare cured resist, in the rest of the volume.After the laser exposure, the samples are developed in PGMEA for
10 min to remove the exceeding unpolymerized resist and then washed
in IPA during 3 min to completely remove the PGMEA from the polymer.
Postprocessing of the FRPN with HF Buffer
The polymerized and developed FRPN still contains an excess of
SiO2 NWs, which are eliminated in a HF buffer. For this
purpose, samples were immersed in an etching solution (85 mL of distilled
H2O, 10 mL of HCl, and 5 mL of buffered HF solution) for
times ranging from 15 to 30 min, controlling the etching progress
of the SiO2 NWs at regular times. The buffered HF solution
was prepared using 40 g of NH4F, 60 mL of distilled H2O,
and 10 mL of 49% HF solution.
Topographic
Characterization
The
topography of the printed samples was analyzed by profilometry (Veeco
DEKTAK 8, Advanced Development profiler), atomic force microscopy
(AFM, Bruker Bioscope Catalyst), scanning confocal microscopy (Zeiss
LSM 710), and SEM (FEI Quanta FEG 400 F7). AFM measurements were carried
out operating in the noncontact mode under ambient conditions. An
8 nm-radius silicon tip (model: RTESP-300, k = 40
N m–1, resonant frequency f0 = 300 kHz), on an antimony (n)-doped silicon cantilever,
was employed to scan the sample with a rate of 0.15 Hz.To reveal
the polymerized 3D structures inside the NW network by confocal microscopy,
a droplet of water solution containing an edible red dye (E120) was
casted on the NWs. The fluorescence of both the polymerized IP-S and
the dye, presenting a peak at λP = 540 nm and λD = 630 nm, respectively, was excited using a 514 nm laser.
A 63× oil-immersion N.A. 1.4 objective was used for the imaging.
Mechanical Characterization
The mechanical
characterization was carried out on the nanoscale by the instrumented
nanoindentation method on a (500 × 500 × 8 μm3) parallelepiped, to perform the measurement on the thickest
nanocomposite sample, with the aim of measuring the nanohardness and
elastic modulus of the fiber-reinforced polymer nanocomposite compared
to the bare resist. The tests were performed using a nanoindentation
platform (NHT, Anton Paar) equipped with a sphero-conical tip, with
a radius of 20 μm. A spherical tip was adopted instead of more
common sharp tips (such as Berkovich or Vickers) to limit the maximum
penetration depth due to the reduced thickness of the nanocomposite
samples. The maximum indentation load (Pmax) was varied between 0.5 and 10 mN with a holding time of 10 s. Results
are presented as the average of multiple indentations together with
the corresponding scatter band. More details about the mechanical
characterization are in the Supporting Information.
Results and Discussion
Nanofabrication
of FRPN via TP-DLW
A parallelepiped and a matrix of pyramids
were chosen as sample structures.
The first one demonstrates the effectiveness of the SiO2 NWs as a structural scaffold when only the outer shell is printed,
while the second one demonstrates the maximum achievable resolution
by TP-DLW. These structures, imaged by optical microscopy and AFM,
are presented in Figure .
Figure 4
(a, b) Optical microscopy images of the 500 × 500 × 2
μm3 parallelepiped and (c) AFM image of the 20 ×
20 × 6 μm3 pyramids printed through the SiO2 NW layer. In (b) and (c), the SiO2 NWs embedded
in the polymeric matrix can be observed.
(a, b) Optical microscopy images of the 500 × 500 × 2
μm3 parallelepiped and (c) AFM image of the 20 ×
20 × 6 μm3 pyramids printed through the SiO2 NW layer. In (b) and (c), the SiO2 NWs embedded
in the polymeric matrix can be observed.In the case of objects built directly adhered to the Si substrate
(Figure a), a subsequent
15 min bath in HF buffer completely etches the exposed SiO2 NWs, whereas the polymeric matrix adhered to the Si substrate protects
those embedded. It was checked that the objects are firmly held by
the SiO2 NW layer even after prolonging the immersion times
in the etching solution well beyond the optimum, estimated in about
15 min. The effect of the HF buffer on the SiO2 NWs was
studied by profilometry (Figure ). In this case, a structure of 12 μm height
was printed.
Figure 5
Profilometer measurements of an adhered (500 × 500
×
12 μm3) parallelepiped at the SiO2 NW
interface (a) before and (b) after 15 min of immersion in HF buffer.
A decrease in the roughness of the baseline evidences the successful
etching of the SiO2 NWs.
Profilometer measurements of an adhered (500 × 500
×
12 μm3) parallelepiped at the SiO2 NW
interface (a) before and (b) after 15 min of immersion in HF buffer.
A decrease in the roughness of the baseline evidences the successful
etching of the SiO2 NWs.The roughness, ascribed to the presence of the embedded SiO2 NWs, decreases significantly due to the removal of the SiO2 NWs exposed to the etching solution. The residual roughness
of the structure surface after the HF buffer bath (see Figure ) is ascribed to the dispersion
in the diameter of the SiO2 NWs emerging from the polymerized
surface, determining different etching stages for each SiO2 NW. Therefore, a better control on the SiO2 NW diameter
during the CVD process would lead to smoother surfaces in the cases
where the SiO2 NWs emerge from the polymerized volume.
These findings were supported by SEM and AFM observations. In Figure , we compare the
etching process for both the kinds of structures (parallelepiped and
pyramid), presenting details in the order of few hundreds of nanometers. Figure a shows the SEM image
of a parallelepiped after 15 min in the HF buffer bath. The higher
magnification image in Figure b shows some SiO2 NWs still emerging from the surface.
However, after 30 min of etching, the surface of the parallelepiped
is totally smooth, and SiO2 NWs are completely absent (Figure c), indicating that
a bath lasting between 15 and 30 min is enough to remove the excess
of SiO2 NWs but not to penetrate inside the resin and eliminate
those embedded.
Figure 6
SEM micrographs of an adhered parallelepiped at the SiO2 NW interface after (a, b) 15 min and (c) 30 min of immersion
in
HF buffer. AFM imaging of a pyramid embedded in the SiO2 NWs, etched by a bath of (d) 5 min, (e) 20 min, and (f) 30 min.
SEM micrographs of an adhered parallelepiped at the SiO2 NW interface after (a, b) 15 min and (c) 30 min of immersion
in
HF buffer. AFM imaging of a pyramid embedded in the SiO2 NWs, etched by a bath of (d) 5 min, (e) 20 min, and (f) 30 min.Figure d–f
shows the AFM imaging of a pyramidal structure after the same etching
intervals, where similar results are obtained. In particular, in Figure d, the pyramid, bathed
in HF for 5 min, is visibly embedded in the NW layer. As a consequence,
the AFM imaging reveals only the apex of the pyramid but not all the
structure. A further bath of 15 min removes most of the SiO2 NWs (Figure e).
After another etching of 10 min (Figure f), meaning a total etching of 30 min, the
wires are completely removed from the pyramid surface, allowing us
to reveal the full volume of the object (20 × 20 × 6 μm3). Hence, in both cases, an optimal etching in the range of
15–30 min is estimated to completely remove the exceeding SiO2 NWs. Figure also allows evaluating the maximum achievable resolution, from the
sharpness of the corners and edges of both samples, in particular
for the apical part of the pyramid, which allows us to assess a sub-micrometric
resolution in the same order of magnitude as that of the bare photoresist.
In Figure f, the pyramid
surface is completely free from the SiO2 NWs, revealing
that they do not affect the TP-DLW resolution. In fact, the intertwining
of the polymeric segments composing the 3D object are perfectly recognizable
both in the top and bottom layers, showing that the diameter of the
strips is around 400 nm everywhere. This result demonstrates that
by matching the refractive indices of the SiO2 NWs and
the photoresist, the resolution of the TP-DLW technology is practically
preserved.Moreover, we observe that in the case of small structures,
the
total 30 min of etching generated few nanoholes, whose diameter is
50–80 nm, due to the removal of the superficial SiO2 NWs, embedded in the polymer and crossing the pyramid surface. This
effect can be controlled and limited by finely tuning the etching
time. However, an increase in the surface roughness is plausible because
of the dispersion in the NW diameter, as the larger the diameter the
longer the correct etching time. We conclude that this effect could
be fully avoided if monodisperse diameter NWs were available.In the second configuration analyzed, samples were printed, leaving
a gap between the bottom of the structure and the Si substrate (see Figures b and 7). In this case, an etching time in the range of 10–30
min was enough for the HF buffer to selectively dissolve the SiO2 NWs within the gaps, leaving the created objects completely
free. Thus, the SiO2 NWs act here as a sacrificial layer
that can be removed on demand. It must be noted that the necessary
etching time shortens when the gap clearance increases, so the objects
printed at larger gaps are detached first. Hence, the etching time
to eliminate the sacrificial layer can be tuned by controlling the
clearance of the gap and therefore the diffusion kinetics of the HF.
Even in this case, both a larger (500 × 500 × 2 μm3) parallelepiped and arrays of small (20 × 20 ×
6 μm3) pyramids could be printed. The parallelepiped
was fabricated according to the scheme in Figure b and analyzed by SEM imaging (Figure a), which reveals the gap between
the FPRN structure and the substrate surface. The scheme of the pyramid
fabrication is shown in Figure b; after printing, the objects were analyzed by confocal fluorescence
microscopy (CFM), as shown in Figure c,d. Here, the SiO2 NWs have been dyed with
E120, a food coloring which features a fluorescence peak at 630 nm,
well-distinct from that of the IP-S resin (540 nm), allowing us to
reveal the gap between the substrate and the pyramid base. Figure c shows a pyramid
presenting a gap of 6 μm. The sample was scanned at different
focal planes, as shown at the bottom of the figure. The CFM imaging
of the sample at different z-values clearly shows
that while the pyramid tip emerges from the SiO2 NW layer,
the base is trapped inside. Moreover, at a lower z-value, in the image at z = 3 μm, we did not
detect any fluorescence from the IP-S pyramid but only from the dyed
NWs, thus demonstrating the gap. By summing the contributions of the
pictures taken at the different focal planes, the 3D CFM profile of
the pyramid and the sacrificial layer was reconstructed, as shown
in the top of Figure c.
Figure 7
(a) SEM image of the cross section of an FRPN showing the gap between
the Si substrate and the sample printed with the IP-S resin. (b) Cartoon
depicting (a) for a clearer interpretation and (c) 3D CFM reconstruction
of a pyramid created in the SiO2 NW network, with a sacrificial
layer. The CFM images, taken at different focal planes, reveal the
sacrificial layer, the base of the pyramid embedded in the NWs, and
the emerging tip. (d) Cross section reconstructed from a stack of
images of a series of pyramids printed with a decreasing gap between
the structure bottom and the substrate from 9 to 0 μm. The SiO2 NW layer was infiltrated with a dye (E120) with a fluorescence
peak at 630 nm (red), well different from the 540 nm of the used resist
(yellow). The solid and the dashed white line trace the Si substrate
plane and the structure base, respectively. The position of the pyramid
with zero gap, poorly visible, is marked with the white arrow.
(a) SEM image of the cross section of an FRPN showing the gap between
the Si substrate and the sample printed with the IP-S resin. (b) Cartoon
depicting (a) for a clearer interpretation and (c) 3D CFM reconstruction
of a pyramid created in the SiO2 NW network, with a sacrificial
layer. The CFM images, taken at different focal planes, reveal the
sacrificial layer, the base of the pyramid embedded in the NWs, and
the emerging tip. (d) Cross section reconstructed from a stack of
images of a series of pyramids printed with a decreasing gap between
the structure bottom and the substrate from 9 to 0 μm. The SiO2 NW layer was infiltrated with a dye (E120) with a fluorescence
peak at 630 nm (red), well different from the 540 nm of the used resist
(yellow). The solid and the dashed white line trace the Si substrate
plane and the structure base, respectively. The position of the pyramid
with zero gap, poorly visible, is marked with the white arrow.To demonstrate the possibility to selectively control
the structure
removal, an array of 10 × 10 pyramids with an increasing gap
from 0 (the column on the right) to 9 μm was printed, as Figure d shows. Figure a shows the structure
before the HF buffer etching. The different z quotes
of each column in the matrix are revealed by the x–y footprint of the fluorescence image, smaller
for the deeper objects because of their pyramidal shape. Figure b shows the same
matrix after immersion in the HF buffer for 10 min. All the structures
with a gap below 7 μm are still attached to the fabrication
substrate, and the structures with a 9 μm gap are completely
removed, and only six structures with a 7–8 μm gap are
still present on the substrate. A further HF bath of 10 min (Figure c) causes the detachment
of the pyramids with a gap of >5 μm. Some pyramids with a
gap
of 5 μm, in the red square, have been removed but are still
present on the substrate. A magnification of these structures is shown
in Figure d–g,
where the CFM imaging at different planes and the 3D reconstruction
clearly demonstrate that these pyramids are not trapped in the NWs
anymore. The buffer was not stirred during the etching process given
the delicacy of the structures; therefore, the small irregularities
observed in the diagonals of the pyramids matrix are likely to be
caused by possible gradients of the fluoride ion concentration in
the bath. In any case, the possibility to tuning the etching time
between the gap and the exposed surface adds a further degree of freedom
in the fabrication process in the case of multistep fabrications.
Figure 8
CFM images
of a 10 × 10 array of FRPN pyramids, where all
the elements in each column have the same gap clearance from 0 (right)
to 9 μm (left). (a) Before etching and (b) after etching for
10 min and (c) for 20 min. (d–g) Magnification of the detail
of (b), taken at (d) z = 12 μm, (e) z = 6 μm, and (f) z = 12 μm,
(g) 3D reconstruction. An upside-down pyramid is recognizable and
two others that have been removed from the substrate appear in a rotated
position.
CFM images
of a 10 × 10 array of FRPN pyramids, where all
the elements in each column have the same gap clearance from 0 (right)
to 9 μm (left). (a) Before etching and (b) after etching for
10 min and (c) for 20 min. (d–g) Magnification of the detail
of (b), taken at (d) z = 12 μm, (e) z = 6 μm, and (f) z = 12 μm,
(g) 3D reconstruction. An upside-down pyramid is recognizable and
two others that have been removed from the substrate appear in a rotated
position.Finally, hollow structures were
also successfully manufactured
according to the shell and scaffold printing strategy, often used
in the additive manufacturing domain to considerably shorten the processing
time when larger solid objects have to be fabricated. In this standard
fabrication method, only an external shell, together with an internal
structure that prevents the collapse of the object, is polymerized
by TP-DLW. After a standard development stage in PGMEA + IPA, the
unpolymerized resist remaining inside of the shell is cured by single-photon
absorption exposing the sample to a UV (360 nm) light source.[36,37] In our case, the object is built as a hollow structure (shell) with
the first layer printed at the interface with the Si substrate. The
internal structure being printed here is made redundant by the presence
of the SiO2 NWs acting as the scaffold in preventing the
collapse of the thin shell, considerably shortening the process time. Figure shows the profilometry
of a (500 × 500 × 8 μm3) parallelepiped
before and after the etching with the HF buffer. As in the case of
the solid objects, the high roughness associated with the SiO2 NWs is strongly decreased after 15 min of etching. In this
approach, the aim is to etch only the excess of SiO2 NWs
out of the shell, so the time is expected to be the same as for solid
objects (Figure a).
Profilometry results evidence that the SiO2 NWs are able
to provide an internal scaffold with a self-standing structure and
prove that the SiO2 NWs inside the shell remain unaltered.
Hence, this strategy can be adopted in TP-DLW when large volumes are
needed, reducing significantly the printing times.[38,39]
Figure 9
Profilometer
measurements of an adhered (500 × 500 ×
8 μm3) parallelepiped at the SiO2 NW interface
following the shell and scaffold approach (a) before and (b) after
15 min of immersion in HF buffer. The decrease in the surface roughness
indicates the successful etching of the exposed SiO2 NWs.
Profilometer
measurements of an adhered (500 × 500 ×
8 μm3) parallelepiped at the SiO2 NW interface
following the shell and scaffold approach (a) before and (b) after
15 min of immersion in HF buffer. The decrease in the surface roughness
indicates the successful etching of the exposed SiO2 NWs.Finally, it is important to point out that the
ability to print
structures attached to the SiO2 NWs eliminates the need
to be exactly at the interface with the substrate for the proper anchoring
of the object to be manufactured. This would eliminate the necessity
of using the complex autofocus system for the interface detection
in the DLW devices. Instead, our approach makes possible to have an
effective range of z heights, determined by the thickness
of the nanowires layer, from which the manufacture could start, making
the autofocus system redundant.
Mechanical
Characterization of the FRPN
The mechanical properties of
the manufactured PFPN were measured
by nanoindentation, on the (500 × 500 × 8 μm3) parallelepiped, to have the thicker possible nanocomposite layer. Figure reports the results
of the nanomechanical characterization, as obtained from varying the
indentation load Pmax between 0.5 and
10 mN. Each datapoint in the figure represents the average value with
its associated scatter band corresponding to the data obtained from
five different indentations. In particular, Figure a reports the evolution of Young’s
modulus (EIT) and of the nanohardness
(HIT) as a function of the indentation
load. Results revealed a significant increase in HIT with the indentation force up to a value of 8 mN. Above
this value, it reaches a plateau for higher indentation loads. On
the other hand, the EIT remains constant
throughout the whole range of indentation loads studied (0.5–10
mN).
Figure 10
(a) Young’s modulus (EIT) and
nanohardness (HIT) as a function of the
indentation load; (b) Maximum indentation depth (hmax) and residual depth (hp) as a function of the indentation force. For both plots, each datapoint
is the average of five different indentations and is reported in the
corresponding scatter band.
(a) Young’s modulus (EIT) and
nanohardness (HIT) as a function of the
indentation load; (b) Maximum indentation depth (hmax) and residual depth (hp) as a function of the indentation force. For both plots, each datapoint
is the average of five different indentations and is reported in the
corresponding scatter band.Nevertheless, as it can be seen in Figure b, the maximum penetration reached (hmax) during the indentation is always below
700 nm, i.e., lower than 10% of the thickness of the nanocomposite.
Therefore, it can be concluded that the studied region, either during
plastic and elastic deformation, will not be affected by the presence
of the Si substrate. More details about these experiments are in the Supporting Information.According to these
results, an indentation load equal to 10 mN
was chosen to evaluate the mechanical properties at the nanoscale
of the nanocomposite since under these conditions, both EIT and HIT are in the plateau
region (i.e., maximum values that can be obtained). Then, a matrix
of 10 × 8 indentation points was carried out with 100 μm
spacing between each indentation. Hence, the indentation area is about
87 μm2 (see the Supporting Information), indicating that the analyzed zone is much larger than the typical
size of the nanofiber reinforcements. As a consequence, indentation
tests provide effective results of the FRPN layer averaged within
the volume of the process zone, i.e., inhomogeneities in mechanical
properties present on a lower length scale are not considered. An
example of force versus indentation depth curve is shown in Figure .
Figure 11
Indentation load vs
penetration depth curve for the FRPN fabricated
in this work.
Indentation load vs
penetration depth curve for the FRPN fabricated
in this work.The indentation tests revealed
that the FRPN mechanical properties
are characterized by a value of Young’s modulus and nanohardness
equal to 8.63 ± 0.78 GPa and 120.06 ± 10.77 MPa, respectively.
With the purpose of evaluating how the use of SiO2 NW substrates
allows enhancing the mechanical properties of the obtained material,
nanoindentation experiments were carried out also on the bare polymeric
matrix. The indentation tests showed a marked reduction of both Young’s
modulus and nanohardness. In fact, while Young’s modulus of
the polymeric matrix is equal to 1.94 ± 0.10 GPa, the nanohardness
reaches a mean value of 33.47 ± 0.35 MPa, as given in Table . These results evidence
that the FRPN exhibits significantly enhanced mechanical properties
compared to the bare polymer, with an increase of approximately 4
times in Young’s modulus and nanohardness values. To the best
of our knowledge, this is the first work where the actual mechanical
properties of an FRPN prepared by TP-DLW are measured. Other authors
recently reported on the mechanical properties of zeolite-based nanocomposites,
also prepared by TP-DLW. In their case, they observed an increase
in the shear modulus of also approximately 4 times when the zeolite
filler was at 70%.[40] However, the values
obtained were in the range of 10–100 MPa, significantly below
ours. Therefore, these materials are promising for structural applications
in the nanotechnology sector that require higher structural yields,
such as in microfluidics.
Table 1
Comparison of Young’s
modulus
and nanohardness values for bare polymeric resin (IP-S) and the FRPN
loaded with SiO2 NWs printed via TP-DLW in this work
Young’s
modulus (GPa)
Nanohardness
(MPa)
IP-S
1.94 ± 0.10
33.47 ± 0.35
FRPN
8.63 ± 0.78
10.77
Conclusions
The use of transparent fillers as SiO2 NWs together
with photosensitive resins allows for the immediate implementation
of TP-DLW in the fabrication of FRPN 3D objects, as long as the refractive
index of the glassy filler and the polymeric matrix match. Even if
these indices do not match perfectly, in this study, we have proven
that different objects can be successfully manufactured through an
SiO2 NW layer using a commercial resist (IP-S). This allowed
obtaining an FRPN with high filling volume fractions, up to 70%. Under
optimal conditions (i.e., with a more accurate refractive index matching),
this percentage could be raised up to saturation, being able to manufacture
3D glassy objects with sub-micrometric resolution, in analogy with
the results recently reported by Kotz et al.[18] Moreover, the use of substrates containing SiO2 NWs offers
many practical advantages in the TP-DLW technique as it allows for
the fabrication of high-resolution structures with improved mechanical
features. This was demonstrated by printing objects at either the
interface with the Si wafer or leaving a variable gap. In the first
case, the structure is permanently attached to the substrate. In the
second case, a sacrificial layer that can be removed under well-controlled
conditions is created. This allows releasing the fabricated object
on demand. Moreover, the SiO2 NWs can provide a robust
internal scaffold when hollow structures are manufactured using the
shell and scaffold printing strategy, shortening considerably the
fabrication time. Finally, the use of such substrates makes a sophisticated
autofocus system unnecessary.On the other hand, the embedding
of SiO2 NWs in a polymeric
matrix for TP-DLW expands the range of materials with enhanced mechanical
properties for TP-DLW. In fact, the mechanical characterization at
the nanoscale shows a remarkable improvement in the nanohardness and
elastic modulus of the FRPN, around 4 times higher compared to that
the bare IP-S resist. This makes the proposed technique well-suited
for applications requiring higher mechanical performance, as in advanced
microfluidics or micromechanics.
Authors: J Serbin; A Egbert; A Ostendorf; B N Chichkov; R Houbertz; G Domann; J Schulz; C Cronauer; L Fröhlich; M Popall Journal: Opt Lett Date: 2003-03-01 Impact factor: 3.776
Authors: Jonas Lölsberg; John Linkhorst; Arne Cinar; Alexander Jans; Alexander J C Kuehne; Matthias Wessling Journal: Lab Chip Date: 2018-05-01 Impact factor: 6.799
Authors: Frederik Kotz; Alexander S Quick; Patrick Risch; Tanja Martin; Tobias Hoose; Michael Thiel; Dorothea Helmer; Bastian E Rapp Journal: Adv Mater Date: 2021-01-14 Impact factor: 30.849